초록 ▼

An actuated edge grip chuck includes tabs with raised portions that press against the side of a substrate as opposed clamping on the top or bottom surfaces. The edge grip chuck includes a solid-state actuator to move a moveable tab into an open position. The solid-state actuator may be, e.g., a piez

An actuated edge grip chuck includes tabs with raised portions that press against the side of a substrate as opposed clamping on the top or bottom surfaces. The edge grip chuck includes a solid-state actuator to move a moveable tab into an open position. The solid-state actuator may be, e.g., a piezoelectric actuator or a shape memory alloy. The tab may be biased into the closed position such that when a substrate is held by the edge by the moveable tab and one or more fixed tabs. If desired, more than one moveable tab may be used.

대표청구항 ▼

What is claimed is: 1. An edge grip chuck comprising: a body; at least one tab coupled to said body, said tab having a raised portion to contact the edge of a substrate, the tab having a horizontally extending base coupled to the raised portion, the base having a top surface to contact the bottom s

What is claimed is: 1. An edge grip chuck comprising: a body; at least one tab coupled to said body, said tab having a raised portion to contact the edge of a substrate, the tab having a horizontally extending base coupled to the raised portion, the base having a top surface to contact the bottom surface of the substrate; a moveable tab movably coupled to said body, said moveable tab having a raised portion to contact the edge of said substrate, the movable tab having a horizontally extending base coupled to the raised portion, the base having a top surface to contact the bottom surface of the substrate; wherein the top surface of the base of the tab and the top surface of the base of the movable tab are positioned above the body such that the substrate does not contact the body; and a solid-state actuator coupled to said moveable tab, said solid-state actuator moving said moveable tab to hold said substrate. 2. The edge grip chuck of claim 1, wherein said at least one tab includes two tabs fixedly coupled to said body. 3. The edge grip chuck of claim 1, wherein said solid-state actuator is a piezoelectric actuator. 4. The edge grip chuck of claim 1, wherein said solid-state actuator is a shape memory alloy. 5. The edge grip chuck of claim 1, wherein said moveable tab is biased closed to hold said substrate. 6. The edge grip chuck of claim 1, further comprising a means for coupling said solid-state actuator to said moveable tab. 7. The edge grip chuck of claim 6, wherein said means for coupling said solid-state actuator to said moveable tab comprises: at least one rod coupled to said body; and a slider slidably mounted on said at least one rod, said slider being coupled to said moveable tab and wherein said solid-state actuator is coupled to said slider. 8. The edge grip chuck of claim 7, wherein said slider and said moveable tab are integrally formed. 9. The edge grip chuck of claim 1, further comprising a plurality of moveable tabs moveably coupled to said body, each of said plurality of moveable tabs having a raised portion to contact the edge of said substrate. 10. The edge grip chuck of claim 9, further comprising a plurality of solid-state actuators, each of said plurality of moveable tabs being coupled to a respective solid-state actuator. 11. The edge grip chuck of claim 1, wherein said at least one tab is formed from poly-ether-ether-ketone. 12. The edge grip chuck of claim 1, wherein the bottom side of said body has a recessed portion, said solid-state actuator is coupled to said body within said recessed portion of said body. 13. An apparatus comprising: a chamber; a stage mounted inside said chamber, said stage having a chuck for holding a substrate, said chuck comprising: a body; a moveable tab movably coupled to said body, said moveable tab having a raised portion to contact the edge of said substrate, the moveable tab having a horizontally extending base coupled to the raised portion, the base having a top surface to contact the bottom surface of the substrate, wherein the top surface of the base of the moveable tab is positioned above a top surface of the body; and a solid-state actuator coupled to said moveable tab, said solid-state actuator moving said moveable tab to hold said substrate. 14. The apparatus of claim 13, wherein said chamber is a vacuum chamber. 15. The apparatus of claim 13, wherein said solid-state actuator is one of a piezoelectric actuator and a shape memory alloy. 16. The apparatus of claim 13, wherein said chuck further comprises a fixed tab having a raised portion to contact the edge of said substrate. 17. The edge grip chuck of claim 13, wherein the bottom side of said body has a recessed portion, said solid-state actuator is coupled to said body within said recessed portion of said body. 18. A method comprising: actuating a moveable tab on a chuck into an open position with a solid-state actuator; loading a substrate onto said chuck by placing the substrate on the top surface of a horizontally extending base of the moveable tab, the horizontally extending base of the moveable tab being positioned above the top surface of the chuck; and actuating said moveable tab into a closed position to hold said substrate by the edge, wherein the bottom surface of the substrate does not physically contact the top surface of the chuck. 19. The method of claim 18, further comprising biasing said moveable tab into a closed position. 20. An edge grip chuck for holding a substrate having a top surface, a bottom surface and a side, said edge grip chuck comprising: a rotatable body coupled to a shaft, said rotatable body configured to rotate about an axis of rotation defined by said shaft; and a plurality of tabs mounted to said body, said tabs having a raised portion to contact the side of a substrate, wherein the area of contact between the raised portion of each tab and said side of said substrate defines a tangent on said side of said substrate that is non-parallel with the top surface of said substrate, wherein each tab has a horizontally extending base coupled to the raised portion, the base having a top surface to contact the bottom surface of the substrate; wherein at least one of said tabs is a moveable tab movably mounted to said body. 21. The edge grip chuck of claim 20, further comprising a solid-state actuator coupled to said moveable tab, said solid-state actuator moving said moveable tab to hold said substrate. 22. The edge grip chuck of claim 20, wherein said raised portion of each tab is beveled. 23. The edge grip chuck of claim 20, wherein at least one of said tabs is fixedly coupled to said body. 24. The edge grip chuck of claim 20, wherein each of said tabs has a base surface that supports the bottom surface of said substrate. 25. The edge grip chuck of claim 24, wherein said body has a top surface, said base surface of each tab is above the top of said body. 26. The edge grip chuck of claim 24, wherein said tabs are poly-ether-ether-ketone.