[특허]Facilities connection box for pre-facilitation of wafer fabrication equipment

Applied Materials, Inc.

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Facilities connection box for pre-facilitation of wafer fabrication equipment

특허상세정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	F16K-001/00
미국특허분류(USC)	137/312; 137/597; 137/884; 204/298.25; 204/298.35; 414/935
출원번호	US-0335968 (2003-01-02)
발명자 / 주소	Lappen,Alan Rick Schauer,Ronald V.
출원인 / 주소	Applied Materials, Inc.
대리인 / 주소	Dugan &
인용정보	피인용 횟수 : 10 인용 특허 : 73

초록
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A facilities connection box is provided to accommodate pre-plumbing of facilities lines required in connection with an installation of semiconductor device manufacturing equipment. The facilities connection box accommodates termination of double-containment facilities lines that are adapted to carry hazardous materials required for operation of the semiconductor device manufacturing equipment. Each double-containment facilities line is terminated in an isolation compartment of the facilities connection box. Each isolation compartment has an entry port ad...

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The invention claimed is: 1. A facilities connection box adapted to couple double-containment lines to semiconductor device manufacturing equipment, comprising: an enclosure; a first isolation compartment defined inside the enclosure; a second isolation compartment defined inside the enclosure; an isolation partition which defines a boundary between the first and second isolation compartments; a first entry port associated with the first isolation compartment and adapted to couple to a first incoming double-containment fluid line; a first exit port associated with the first isolation compartment and adapted to permit egress of a first outgoing fluid line from the first isolation compartment; a second entry port associated with the second isolation compartment and adapted to couple to a second incoming double-containment fluid line; and a second exit port associated with the second isolation compartment and adapted to permit egress of a second outgoing fluid line from the second isolation compartment, to the semiconductor device manufacturing equipment; wherein: the first isolation compartment is adapted to accommodate a fluid flow path between the first entry port and the first exit port; and the second isolation compartment is adapted to accommodate a fluid flow path between the second entry port and the second exit port. 2. The facilities connection box of claim 1, wherein the first entry port is formed in a front wall of the first isolation compartment and the second entry port is formed in a front wall of the second isolation compartment. 3. The facilities connection box of claim 2, wherein the front walls of the first and second isolation compartments are formed by a front wall of the enclosure. 4. The facilities connection box of claim 1, wherein the first exit port is formed in a top wall of the first isolation compartment and the second exit port is formed in a top wall of the second isolation compartment. 5. The facilities connection box of claim 1, wherein the first and second exit ports are formed in a top plate of the enclosure. 6. The facilities connection box of claim 5, wherein the isolation partition is below and does not contact the top plate of the enclosure. 7. The facilities connection box of claim 6, further comprising a spray mechanism that extends laterally above the isolation partition. 8. The facilities connection box of claim 7, wherein the spray mechanism is adapted to spray fluid into both of the first and second isolation compartments. 9. The facilities connection box of claim 1, further comprising: a first drain formed in a bottom wall of the first isolation compartment; and a second drain formed in a bottom wall of the second isolation compartment. 10. The facilities connection box of claim 1, further comprising: a first liquid detection sensor positioned to detect liquid in the first isolation compartment; and a second liquid detection sensor positioned to detect liquid in a second isolation compartment. 11. The facilities connection box of claim 1, further comprising: a first liquid detection sensor positioned to detect liquid in the first isolation compartment; a second liquid detection sensor positioned to detect liquid in the second isolation compartment; a first drain formed in a bottom wall of the first isolation compartment; a first drain valve coupled to the first drain; a second drain formed in a bottom wall of the second isolation compartment; a second drain valve coupled to the second drain; a spray mechanism adapted to spray a fluid into both of the first and second isolation compartments; and a controller coupled to the first and second liquid detection sensors, the first and second drain valves and the spray mechanism and adapted to: receive detection signals from the first and second liquid detection sensors; selectively open the first and second drain valves; and selectively actuate the spray mechanism to spray fluid into the first and second isolation compartments. 12. The facilities connection box of claim 1, further comprising a spray mechanism that extends laterally above the isolation partition. 13. The facilities connection box of claim 12, wherein the spray mechanism is adapted to spray a fluid into both of the first and second isolation compartments. 14. The facilities connection box of claim 1, further comprising: a first flow path provided within the first isolation compartment and including a coupling connector that couples a line that enters the first isolation compartment via the first entry port with a line that exits the first isolation compartment via the first exit port; and a second flow path provided within the second isolation compartment and including a coupling connector that couples a line that enters the second isolation compartment via the second entry port with a line that exits the second isolation compartment via the second exit port. 15. The facilities connection box of claim 2, wherein the first exit port is formed in a top wall of the first isolation compartment and the second exit port is formed in a top wall of the second isolation compartment. 16. The facilities connection box of claim 2, wherein the first and second exit ports are formed in a top plate of the enclosure. 17. The facilities connection box of claim 1 further comprising an exhaust mechanism coupled to a pump and adapted to remove exhaust from the enclosure. 18. A facilities connection box adapted to couple double-containment lines to a semiconductor device manufacturing tool, comprising: an enclosure; a plurality of isolation compartments contained within the enclosure, each isolation compartment being divided from an adjacent isolation compartment by an isolation partition, each isolation compartment having associated therewith a respective entry port adapted to couple to a respective incoming double-containment fluid line and a respective exit port adapted to permit egress of a respective outgoing fluid line from the respective isolation compartment. 19. The facilities connection box of claim 18, wherein the isolation compartments are arranged in a row parallel to a front wall of the enclosure. 20. The facilities connection box of claim 19, further comprising a spray mechanism that extends parallel to the front wall of the enclosure and is adapted to spray a fluid into each of the isolation compartments. 21. The facilities connection box of claim 20, further comprising a plurality of drains, each formed in a bottom wall of a respective one of the isolation compartments. 22. The facilities connection box of claim 21, further comprising a plurality of liquid detection sensors, each positioned to detect liquid in a respective one of the isolation compartments. 23. The facilities connection box of claim 18, further comprising a second plurality of entry ports that are not isolated from each other. 24. The facilities connection box of claim 22, further comprising: a plurality of drain valves, each coupled to a respective one of the drains; and a controller coupled to the liquid detection sensors, the drain valves and the spray mechanism and adapted to: receive detection signals from the liquid detection sensors; selectively open the drain valves; and selectively actuate the spray mechanism to spray fluid into the isolation compartments. 25. The facilities connection box of claim 18 further comprising an exhaust mechanism coupled to a pump and adapted to remove exhaust from the enclosure.

이 특허에 인용된 특허 (73)

이 특허를 인용한 특허 (10)

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Facilities connection box for pre-facilitation of wafer fabrication equipment

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이 특허에 인용된 특허 (73)

이 특허를 인용한 특허 (10)

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Facilities connection box for pre-facilitation of wafer fabrication equipment

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이 특허에 인용된 특허 (73)

이 특허를 인용한 특허 (10)

IPC 상위 출원인

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상세정보조회

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IPC 상세정보(version : 201201)

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