초록 ▼

There are provided a substrate floating apparatus for preventing interference between a glass substrate and a floating board when floating and conveying the glass substrate and a method of manufacturing LCD devices using the substrate floating apparatus. The substrate floating apparatus includes a b

There are provided a substrate floating apparatus for preventing interference between a glass substrate and a floating board when floating and conveying the glass substrate and a method of manufacturing LCD devices using the substrate floating apparatus. The substrate floating apparatus includes a body into which floating fluid is supplied and which stores the floating fluid, a floating board that is placed on the top of the body and through which the floating fluid is sprayed to float the substrate to the predetermined height, and a fixing member that mechanically fixes the floating board on the top of the body. A certain process is performed while floating the substrate.

대표청구항 ▼

What is claimed is: 1. An apparatus for floating a substrate by a predetermined height, comprising: a body for storing a floating fluid supplied thereinto; a floating board, placed on the body, having: a plurality of openings for spraying the floating fluid to float the substrate to the predetermi

What is claimed is: 1. An apparatus for floating a substrate by a predetermined height, comprising: a body for storing a floating fluid supplied thereinto; a floating board, placed on the body, having: a plurality of openings for spraying the floating fluid to float the substrate to the predetermined height, and an outer periphery having a groove; a cover, coplanar with a top surface of the floating board and enclosing the outer periphery of the floating board, having a protrusion fixedly inserted into the groove of the floating board; and a connecting member, provided at one or more positions of the periphery of the body, to connect the body to the cover. 2. An apparatus for floating a substrate by a predetermined height, comprising: a body for storing floating fluid supplied thereinto; a floating board, placed on the body, having: a plurality of openings for spraying the floating fluid to float the substrate to the predetermined height, and an outer periphery having a groove; a cover, coplanar with a top surface of the floating board and enclosing the outer periphery of the floating board, having a supporting projection for supporting the floating board while pressing and bending the periphery of the floating board; and a connecting members, provided at one or more positions of the periphery of the body, to connect the body to the cover.