초록 ▼

A connector apparatus is provided which is configured to replace a separation module in a system for dispensing a fluid. When it is desired to purge the system of a dispensed fluid, the connector apparatus, having the same configuration of an inlet and an outlet as the separation module, replaces th

A connector apparatus is provided which is configured to replace a separation module in a system for dispensing a fluid. When it is desired to purge the system of a dispensed fluid, the connector apparatus, having the same configuration of an inlet and an outlet as the separation module, replaces the separation module and a purging fluid is passed through the system.

대표청구항 ▼

We claim: 1. A fluid separation apparatus comprising: a separation module; a fluid connector member; said separation module including: a housing; a separation element contained within the housing; a first set of at least three connectors on one end of the housing and being in fluid communication wi

We claim: 1. A fluid separation apparatus comprising: a separation module; a fluid connector member; said separation module including: a housing; a separation element contained within the housing; a first set of at least three connectors on one end of the housing and being in fluid communication with the interior thereof, at least two connectors for respectively introducing fluids to and withdrawing fluids from the interior of the housing, and at least one connector that is a gas vent from the housing, said first set of at least three connectors being parallel and spaced apart from one another and being exclusive of one another; said fluid connector member including a second set of at least three connectors being positioned and sized and shaped to engage simultaneously in fluid tight engagement with the first set of connectors, wherein the simultaneous fluid tight engagement is effected through a first motion which, during said engagement, is substantially linear and parallel to longitudinal axes of both the first and second sets of connectors. 2. The apparatus of claim 1 further comprising a locking mechanism to lock a module receptor holding the separation module to a manifold assembly comprising the fluid connector member, the locking occurring upon engagement of the first and second sets of connectors. 3. The apparatus of claim 2 wherein a hinge couples to a module receptor holding the separation module, and allows the module receptor to effect the substantially linear first motion during said engagement. 4. The apparatus of claim 1 further comprising a hinge coupled to a module receptor holding the separation module, the hinge facilitating the substantially linear and parallel motion during said engagement. 5. A separation module, comprising: a housing; a separation element contained within the housing, the separation element dividing the interior of the housing into first and second volumes; a first set of at least three connectors on one end of the housing and being in fluid communication with the interior thereof, at least two connectors for respectively introducing fluids to and withdrawing fluids from the interior of the housing, the connector for introducing fluid to the interior of the housing being in fluid communication with the first volume and the connector for withdrawing fluid from the interior of the housing being in fluid communication with the second volume, and at least one connector that is a gas vent from the housing, said first set of at least three connectors being parallel and spaced apart from one another and being exclusive of one another, said first set of connectors configured to operably connect simultaneously to a second set of at least three connectors on a fluid connector member by forming a fluid tight engagement with the second set of at least three connectors, wherein the simultaneous fluid tight engagement is effected through a first motion which, during said engagement, is substantially linear and parallel to longitudinal axes of both the first and second sets of connectors. 6. The separation module of claim 5 wherein the fluid tight engagement is effected through a first motion which, during said engagement, is substantially linear and parallel to longitudinal axes of both the first and second sets of connectors. 7. A disposable fluid separation module, comprising: a housing having a first end and a second end; a separation element within the housing, the separation element dividing the interior of the housing into first and second volumes; and a first set of at least three connectors on a first end of the housing, the at least three connectors being spaced apart and parallel, the at least three connectors comprising: a fluid inlet to the housing, the fluid inlet being in fluid communication with the first volume; a fluid outlet from the housing, the fluid outlet being in fluid communication with the second volume; and a gas vent from the housing; wherein the first set of at least three connectors is configured to operably connect simultaneously to a second set of at least three connectors on a fluid connector member by forming a fluid tight engagement with the second set of at least three connectors, wherein the simultaneous fluid tight engagement is affected through a first motion which, during said engagement, is substantially linear and parallel to longitudinal axes of both the first and second sets of connectors. 8. The disposable fluid separation module of claim 7, comprising: at least one projection on the housing configured to mate with at least one corresponding slot on a module receptor to facilitate alignment of the connectors with corresponding connectors of a fluid connector member. 9. The disposable fluid separation module of claim 7, wherein the separation element separates unwanted components from a semiconductor process fluid. 10. The disposable fluid separation module of claim 9, wherein the semiconductor process fluid comprises at least one of a photochemical, a primer, an adhesion promoter, a photoresist, an edge bead remover, an antireflective coating, a developer, and a dielectric. 11. The disposable fluid separation module of claim 7, wherein the separation element comprises a flat sheet membrane. 12. The disposable fluid separation module of claim 7, wherein the separation element comprises a hollow fiber membrane. 13. The disposable fluid separation module of claim 7, wherein the separation element is permanently secured within the housing. 14. A fluid separation apparatus according to claim 1, wherein the at least one connector that is a gas vent is capable of automatically venting the gas. 15. A separation module according to claim 5, wherein the at least one connector that is a gas vent is capable of automatically venting the gas. 16. A disposable fluid separation module according to claim 7, wherein the gas vent is capable of automatically venting the gas. 17. A fluid separation apparatus according to claim 1, further comprising a pump interfaced to the separation module via the fluid connector member.