초록 ▼

A self-calibrating pressure transducer is disclosed. The device uses an embedded zirconia membrane which pumps a determined quantity of oxygen into the device. The associated pressure can be determined, and thus, the transducer pressure readings can be calibrated. The zirconia membrane obtains oxyg

A self-calibrating pressure transducer is disclosed. The device uses an embedded zirconia membrane which pumps a determined quantity of oxygen into the device. The associated pressure can be determined, and thus, the transducer pressure readings can be calibrated. The zirconia membrane obtains oxygen from the surrounding environment when possible. Otherwise, an oxygen reservoir or other source is utilized. In another embodiment, a reversible fuel cell assembly is used to pump oxygen and hydrogen into the system. Since a known amount of gas is pumped across the cell, the pressure produced can be determined, and thus, the device can be calibrated. An isolation valve system is used to allow the device to be calibrated in situ. Calibration is optionally automated so that calibration can be continuously monitored. The device is preferably a fully integrated MEMS device. Since the device can be calibrated without removing it from the process, reductions in costs and down time are realized.

대표청구항 ▼

What is claimed is: 1. A self-calibrating pressure transducer for accurately measuring process created pressure, comprising: a pressure transducer membrane; a calibration chamber including an isolation calibration membrane and containing a quantity of a calibration substance; an interior transducer

What is claimed is: 1. A self-calibrating pressure transducer for accurately measuring process created pressure, comprising: a pressure transducer membrane; a calibration chamber including an isolation calibration membrane and containing a quantity of a calibration substance; an interior transducer chamber in operable flow communication with both said pressure transducer membrane and said isolation calibration membrane; said interior transducer chamber further including a first section in flow communication with said pressure transducer membrane and a second section in flow communication with said isolation calibration membrane, with both said first and second sections of said interior transducer chamber substantially full of a fill fluid; a first two-way valve disposed between said first and second sections of said interior transducer chamber, said first two-way valve having a selectable open mode for allowing flow communication between said first and second sections and further having a selectable closed mode for preventing flow communication between said first and second sections; a process isolation chamber having a process isolation membrane disposed for deflection by said process created pressure, with said process isolation chamber substantially full of a fill fluid; a second two-way valve disposed between said process isolation chamber and said interior chamber, said second two-way valve having a selectable open mode for allowing flow communication between said process isolation chamber and said first section of said interior chamber and further having a selectable closed mode for preventing flow communication between said process isolation chamber and said first section interior chamber; said self-calibrating pressure transducer automatically assuming a self-calibration mode responsive to selective positioning of said second two-way valve in said closed mode and selective positioning of said first two-way valve in said open mode, allowing a precisely measurable amount of calibration substance to enter said calibration chamber, thereby deflecting said isolation calibration membrane, forcing fill fluid to pass through said open first two-way valve, impacting and deflecting said pressure transducer membrane with a measurable force comparable to the known deflective force on the isolation calibration membrane, thereby self-calibrating the pressure transducer; and, said self-calibrating pressure transducer automatically assuming an operation mode responsive to selective positioning of said first two-way valve in said closed mode and selective positioning of said second two-way valve in said open mode, allowing process created pressure to deflect the process isolation membrane, forcing the fill fluid to pass through the open second two-way valve and impacting and deflecting said pressure transducer membrane in order to measure the process created pressure. 2. The self-calibrating pressure transducer according to claim 1, further comprising an apparatus utilizing a coulometric process for creating precise, measurable changes in the quantity of calibration substance in the calibration chamber, thereby deflecting said isolation calibration membrane, and moving said fill fluid to impact against said pressure transducer with a predetermined, self-calibrating force. 3. The self-calibrating pressure transducer according to claim 1, further comprising an apparatus utilizing a potentiometric process for precisely measuring the quantity of calibration substance in the calibration chamber, thereby confirming the self-calibrating force. 4. The self-calibrating pressure transducer according to claim 3, wherein said calibration substance is oxygen. 5. The self-calibrating pressure transducer according to claim 1, wherein said isolation calibration membrane is a mobile oxide ceramic cell. 6. The self-calibrating pressure transducer according to claim 1, wherein said isolation calibration membrane is a zirconia membrane. 7. The self-calibrating pressure transducer according to claim 1, wherein said isolation calibration membrane and said pressure transducer membrane are each embedded in a silicon substrate. 8. The self-calibrating pressure transducer according to claim 4, further comprising an ambient oxygen source for supplying said oxygen to said calibration chamber. 9. The self-calibrating pressure transducer according to claim 4, further comprising an integrated oxygen reservoir for supplying said oxygen to said calibration chamber. 10. The self-calibrating pressure transducer according to claim 4, further comprising an assembly for supplying, by electrolysis of surrounding carbon dioxide, said oxygen to said calibration chamber. 11. The self-calibrating pressure transducer according to claim 4, further comprising an assembly for supplying, by electrolysis of surrounding water, said oxygen to said calibration chamber. 12. The self-calibrating pressure transducer according to claim 1, wherein said isolation calibration membrane is a zirconia membrane, wherein said calibration substance is oxygen, and further comprising an integrated oxygen reservoir for supplying said oxygen to said calibration chamber. 13. The self-calibrating pressure transducer according to claim 1, further comprising a temperature sensor disposed in said calibration chamber for monitoring changes in temperature of said calibration substance. 14. The self-calibrating pressure transducer according to claim 1, wherein said pressure transducer is remotely directed to assume said self-calibration mode or said operational mode by a computing device. 15. The self-calibrating pressure transducer according to claim 1, wherein said first section of said interior transducer chamber is on an opposite side of said transducer membrane from the process pressure to be measured, whereby self-calibration of the pressure transducer is achieved by a subtraction process. 16. A self-calibrating pressure transducer for accurately measuring process created pressure, comprising: a pressure transducer membrane; a process isolation chamber having a process isolation membrane disposed for deflection by said process pressure and substantially full of a fill fluid; a calibration chamber including an isolation calibration membrane and containing a quantity of a calibration substance; an interior transducer chamber in operable flow communication with both said pressure transducer membrane and said isolation calibration membrane; said interior transducer chamber further including a first section in flow communication with said pressure transducer membrane and a second section in flow communication with said isolation calibration membrane, with both said first and a second sections of said interior transducer chamber substantially full of a fill fluid; a three-way valve in flow communication with said first section of said interior transducer chamber, said second section of said interior transducer chamber and said process isolation chamber; said three-way valve having a first, calibration mode wherein said first and second sections of said interior transducer chamber are in flow communication with each other and said first section of said interior transducer is not in flow communication with said process isolation chamber; said three-way valve having a second, operation mode wherein said first section of said interior transducer chamber is in flow communication with said process isolation chamber and said first section of said interior transducer chamber is not in flow communication with said second section of said interior transducer chamber; whereby selective positioning of said three-way valve in said first, calibration mode allows deflection of said isolation calibration membrane to move fill fluid through said three-way valve, impacting and deflecting said pressure transducer membrane with a measurable force comparable to the known deflective force on the isolation calibration membrane for self-calibrating the pressure transducer; and, whereby selective positioning of said three-way valve in said second, operation mode allows process created pressure to deflect said process isolation membrane, moving fill fluid through said three-way valve, impacting and deflecting said pressure transducer membrane, thereby measuring the process created pressure. 17. The self-calibrating pressure transducer according to claim 16, further comprising an apparatus utilizing a coulometric process for creating precise, measurable changes in the quantity of calibration substance in said calibration chamber, thereby deflecting said isolation calibration membrane, and moving said fill fluid to impact against said pressure transducer membrane with a predetermined, self-calibrating force. 18. The self-calibrating pressure transducer according to claim 16, further comprising an apparatus utilizing a potentiometric process for precisely measuring the quantity of calibration substance in the calibration chamber, thereby confirming the self-calibrating force. 19. The self-calibrating pressure transducer according to claim 16, wherein said calibration substance is oxygen. 20. The self-calibrating pressure transducer according to claim 16, wherein said isolation calibration membrane is a mobile oxide ceramic cell. 21. The self-calibrating pressure transducer according to claim 16, wherein said isolation calibration membrane is a zirconia membrane. 22. The self-calibrating pressure transducer according to claim 16, wherein said isolation calibration membrane and said pressure transducer membrane are each embedded in a silicon substrate. 23. The self-calibrating pressure transducer according to claim 19, further comprising an ambient oxygen source for supplying said oxygen to said calibration chamber. 24. The self-calibrating pressure transducer according to claim 19, further comprising an integrated oxygen reservoir for supplying said oxygen to said calibration chamber. 25. The self-calibrating pressure transducer according to claim 19, further comprising an assembly for supplying oxygen to said calibration chamber by electrolysis of surrounding carbon dioxide. 26. The self-calibrating pressure transducer according to claim 19, further comprising an assembly for supplying oxygen to said calibration chamber by electrolysis of surrounding water.