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Apparatus and method for forming a battery in an integrated circuit

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/00
출원번호 US-0632652 (2003-08-02)
발명자 / 주소
  • Ballantine,Arne W.
  • Groves,Robert A.
  • Lund,Jennifer L.
  • Nakos,James S.
  • Rice,Michael B.
  • Stamper,Anthony K.
출원인 / 주소
  • International Business Machines Corporation
대리인 / 주소
    Schmeiser, Olsen &
인용정보 피인용 횟수 : 27  인용 특허 : 17

초록

A method and structure that provides a battery within an integrated circuit for providing voltage to low-current electronic devices that exist within the integrated circuit. The method includes Front-End-Of-Line (FEOL) processing for generating a layer of electronic devices on a semiconductor wafer,

대표청구항

We claim: 1. A method for forming an electrochemical structure within an integrated circuit, comprising the steps of: providing a semiconductor wafer; forming a layer of electronic devices on the semiconductor wafer, wherein the layer of electronic devices includes at least one electronic device; f

이 특허에 인용된 특허 (17)

  1. Matsuzaki Kazuo,JPX, Battery mounted integrated circuit device.
  2. Kirlin Peter S. ; Van Buskirk Peter C., Chemical mechanical polishing of FeRAM capacitors.
  3. Bates John B. (Oak Ridge TN) Dudney Nancy J. (Knoxville TN) Gruzalski Greg R. (Oak Ridge TN) Luck Christopher F. (Knoxville TN), Electra-optical device including a nitrogen containing electrolyte.
  4. Bates John B. (Oak Ridge TN) Dudney Nancy J. (Knoxville TN), Method for making an electrochemical cell.
  5. Yoon Young Soo,KRX ; Jung Hyung Jin,KRX ; Choi Won Kook,KRX ; Yoon Seok Jin,KRX, Method for making electrical and electronic devices with vertically integrated and interconnected thin-film type battery.
  6. Chow Melanie M. (Poughquag NY) Cronin John E. (Milton VT) Guthrie William L. (Hopewell Junction NY) Kaanta Carter W. (Essex Junction VT) Luther Barbara (Devon PA) Patrick William J. (Newburgh NY) Per, Method for producing coplanar multi-level metal/insulator films on a substrate and for forming patterned conductive line.
  7. Beyer Klaus Dietrich, Method for removing crevices induced by chemical-mechanical polishing.
  8. Jenson, Mark Lynn, Method of continuous processing of thin-film batteries and like devices.
  9. Bates John B. (Oak Ridge TN) Dudney Nancy J. (Knoxville TN), Method of making an electrolyte for an electrochemical cell.
  10. Cronin John Edward, Methods for the preparation of a semiconductor structure having multiple levels of self-aligned interconnection metalliz.
  11. LaFollette, Rodney M.; Salmon, Linton G.; Harb, John N., Microscopic batteries for MEMS systems.
  12. Kurokawa Hiroshi (Osaka JPX) Nohma Toshiyuki (Osaka JPX) Yamamoto Yuuji (Osaka JPX) Uehara Mayumi (Osaka JPX) Nishio Koji (Osaka JPX) Saitoh Toshihiko (Osaka JPX), Non-aqueous battery having a lithium-nickel-oxygen cathode.
  13. Bates John B. (116 Baltimore Dr. Oak Ridge TN 37830) Dudney Nancy J. (11634 S. Monticello Rd. Knoxville TN 37922) Weatherspoon Kim A. (223 Wadsworth Pl. Oak Ridge TN 37830), Packaging material for thin film lithium batteries.
  14. Cronin John Edward ; Kaanta Carter Welling, Self-aligned metallurgy.
  15. Balkanski Minko (2 Avenue Camoens 75016 Paris FRX), Self-powered electronic component and manufacturing method therefor.
  16. Hobson David O., Solid state thin film battery having a high temperature lithium alloy anode.
  17. Bates John B. (Oak Ridge TN) Dudney Nancy J. (Knoxville TN) Gruzalski Greg R. (Oak Ridge TN) Luck Christopher F. (Knoxville TN), Thin film battery and method for making same.

이 특허를 인용한 특허 (27)

  1. Shacklette, Lawrence Wayne; Rendek, Jr., Louis Joseph; Smith, David M., Battery cell for MEMS device and related methods.
  2. Zhang, Hongmei; Demaray, Richard E., Deposition of LiCoO2.
  3. Snyder, Shawn W.; Neudecker, Bernd J., Electrochemical apparatus with barrier layer protected substrate.
  4. Snyder, Shawn W.; Neudecker, Bernd J., Electrochemical apparatus with barrier layer protected substrate.
  5. Snyder, Shawn W.; Neudecker, Bernd J., Electrochemical apparatus with barrier layer protected substrate.
  6. Snyder, Shawn W.; Neudecker, Bernd J., Electrochemical apparatus with barrier layer protected substrate.
  7. Brantner, Paul C., Energy device with integral collector surface for electromagnetic energy harvesting and method thereof.
  8. Brantner, Paul C., Energy device with integral conductive surface for data communication via electromagnetic energy and method thereof.
  9. Keating, Joseph A.; Bradow, Timothy N.; Johnson, Raymond R.; Narayan, Prativadi B., Environmentally-powered wireless sensor module.
  10. Neudecker, Bernd J.; Snyder, Shawn W., Hybrid thin-film battery.
  11. Neudecker, Bernd J.; Snyder, Shawn W., Hybrid thin-film battery.
  12. Bates, John B., Low voltage thin film batteries.
  13. Snyder, Shawn W.; Brantner, Paul C.; Zoetewey, Henry L., Masking of and material constraint for depositing battery layers on flexible substrates.
  14. Snyder, Shawn W.; Neudecker, Bernd J.; Brantner, Paul C., Metal film encapsulation.
  15. Snyder, Shawn W.; Neudecker, Bernd J.; Brantner, Paul C., Metal film encapsulation.
  16. Porthault, Hélène; Le Cras, Frédéric; Franger, Sylvain, Method for producing 3D-structured thin films.
  17. Neudecker, Bernd J.; Whitacre, Jay F., Method for sputter targets for electrolyte films.
  18. Brantner, Paul C.; Keating, Joseph A.; Johnson, Raymond R.; Bradow, Timothy N.; Narayan, Prativadi B.; Neudecker, Bernd J., Passive over/under voltage control and protection for energy storage devices associated with energy harvesting.
  19. Neudecker, Bernd J.; Keating, Joseph A., Printed circuit board with integrated thin film battery.
  20. Neudecker, Bernd J.; Keating, Joseph A., Printed circuit board with integrated thin film battery.
  21. Snyder, Shawn W.; Brantner, Paul C.; Keating, Joseph A.; Bradow, Timothy N.; Narayan, Prativadi B.; Neudecker, Bernd J., Robust metal film encapsulation.
  22. Neudecker, Bernd J.; Milonopoulou, Vassiliki, Sputtering target of Li3PO4 and method for producing same.
  23. Johnson, Raymond R.; Snyder, Shawn W.; Brantner, Paul C.; Bradow, Timothy J.; Neudecker, Bernd J., Thin film battery on an integrated circuit or circuit board and method thereof.
  24. Neudecker, Bernd J., Thin film electrolyte for thin film batteries.
  25. Neudecker, Bernd J.; Snyder, Shawn W., Thin film encapsulation for thin film batteries and other devices.
  26. Neudecker, Bernd J.; Snyder, Shawn W., Thin film encapsulation for thin film batteries and other devices.
  27. Demaray, Richard E.; Narasimhan, Mukundan, Transparent conductive oxides.
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