Film or layer made of semi-conductive material and method for producing said film or layer
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-021/8238
H01L-021/70
출원번호
US-0481537
(2002-06-27)
우선권정보
DE-101 31 249(2001-06-28)
국제출원번호
PCT/EP02/007125
(2002-06-27)
§371/§102 date
20031218
(20031218)
국제공개번호
WO03/003430
(2003-01-09)
발명자
/ 주소
Murphy,Brian
Wahlich,Reinhold
Schmolke,R체diger
Von Ammon,Wilfried
Moreland,James
출원인 / 주소
Siltronic AG
대리인 / 주소
Brooks Kushman P.C.
인용정보
피인용 횟수 :
7인용 특허 :
10
초록▼
The invention relates to a film or a layer made of semi-conducting material with low defect density in the thin layer, and a SOI-disk with a thin silicon layer exhibiting low surface roughness, defect density and thickness variations. The invention also relates to a method for producing a film or a
The invention relates to a film or a layer made of semi-conducting material with low defect density in the thin layer, and a SOI-disk with a thin silicon layer exhibiting low surface roughness, defect density and thickness variations. The invention also relates to a method for producing a film or a layer made of semi-conductive material. Said method comprises the following steps: a) producing structures from a semi-conductive material with periodically repeated recesses which have a given geometrical structure, b) thermally treating the surface structured material until a layer with periodically repeated hollow spaces is formed under a closed layer on the surface of the material, c) separating the closed layer on the surface along the layer of hollow spaces from the remainder of the semi-conductive material.
대표청구항▼
What is claimed is: 1. A process for producing a film or a layer of semiconducting material, comprising the following steps: a) producing structures comprising periodically recurring recesses of predetermined geometries on the surface of a semiconducting material, b) heat treating the surface-struc
What is claimed is: 1. A process for producing a film or a layer of semiconducting material, comprising the following steps: a) producing structures comprising periodically recurring recesses of predetermined geometries on the surface of a semiconducting material, b) heat treating the surface-structured material until a layer comprising periodically recurring cavities has formed beneath a closed layer at the surface of the material, and c) separating the closed layer at the surface from the remainder of the semiconducting material, along the layer of cavities. 2. The process of claim 1, wherein the geometric dimensions of the recesses are selected as a function of the desired thickness of the film or layer which is to be produced. 3. The process of claim 1, wherein the geometric dimensions of the recesses and the distances between the recesses are selected in such a way that, during heat treating in step b), a closed surface forms above a layer of individual cavities which form from the recesses, without the individual cavities fusing together to form larger cavities. 4. The process of claim 1, wherein the heat treating in step b) takes place under atmospheric pressure or reduced pressure. 5. The process of claim 1, wherein the heat treating in step b) takes place between 200째 C. and 1500째 C. for a period of from 3 seconds to 6 hours. 6. The process of claim 1, wherein the conditions of the heat treating in step b) are selected in such a way that the COPs which are present in the semiconducting material are simultaneously annealed. 7. The process of claim 1, wherein the heat treating in step b) is combined with a low-energy ion bombardment of the surface. 8. The process of claim 1, wherein the thickness of the layer of semiconducting material is reduced after production of this layer by a measure which is selected from the group consisting of polishing, vapor-phase or liquid etching and oxidation and subsequent reduction of the surface. 9. The process of claim 1, wherein the semiconducting material is in the form of a wafer. 10. The process of claim 1, wherein the recesses are holes or trenches. 11. The process of claim 10, wherein the recesses are holes which are substantially round or square in cross section, the holes having the same geometry and being arranged in a regular pattern with constant hole-to-hole distances. 12. The process of claim 1, wherein the heat treating in step b) is carried out in an atmosphere which prevents the formation of a layer of oxide on the semiconducting material. 13. The process of claim 12, wherein the atmosphere contains hydrogen and/or argon. 14. The process of claim 1, wherein the surface of the layer of semiconducting material, after this layer has been produced, is subjected to a smoothing treatment by polishing or heat treatment. 15. The process of claim 14, wherein the heat treatment for smoothing the surface is carried out in an atmosphere which contains hydrogen and/or argon. 16. The process of claim 1, wherein the semiconducting material is selected from the group consisting of silicon, silicon-germanium, gallium arsenide, silicon carbide and indium phosphide. 17. The process of claim 16, wherein the semiconducting material is silicon. 18. The process of claim 16, wherein the semiconducting material is monocrystalline. 19. The process of claim 1, wherein the separation in step c) is carried out by means of a mechanical, chemical or heat treatment or a combination thereof. 20. The process of claim 19, characterized in that the mechanical treatment is selected from the group consisting of application of shear forces, treatment with a jet of fluid, and acoustic treatment with ultrasound or megasound. 21. The process of claim 19, wherein the heat treatment in step c) leads to fusion of the cavities which have been produced in step b) and therefore to separation. 22. The process of claim 21, wherein the heat treatment in step c) takes place between 800 and 1370째 C. at atmospheric pressure or reduced pressure for a period of from 3 seconds to 4 hours. 23. The process of claim 1, wherein the surface beneath which a layer of cavities has been produced in accordance with steps a) and b) is joined to the surface of a carrier material before the layer is separated from the remainder of the semiconducting material in accordance with step c). 24. The process of claim 23, wherein the process is carried out at least twice in succession, in such a manner that the carrier material with the layer of semiconducting material located thereon is used once again as a carrier material, so that one or more further layers are applied to the first layer. 25. The process of claim 23, wherein the carrier material is in the form of a wafer. 26. The process of claim 23, wherein the surfaces of substrate and carrier material which are joined to one another have the same geometric dimensions. 27. The process of claim 23, wherein the carrier material is selected from a group consisting of silicon, silicon-germanium, silicon carbide, gallium arsenide, quartz, plastic, glass and ceramic. 28. The process of claim 27, wherein the carrier material is silicon. 29. The process of claim 27, wherein the carrier material bears an electrically insulating layer at the surface. 30. A thin layer of semiconducting material separated from a wafer of FZ or CZ crystal without the use of ion implantation which, prior to depositing any epitaxial layer thereon, has an HF defect density of less than 0.1/cm2 and a Secco etch defect density of less than 10/cm2. 31. The film or thin layer of claim 30, wherein separation from the wafer is effected by the steps of a) the production of structures comprising periodically recurring recesses of predetermined geometries on the surface of a semiconducting material, b) heat treatment of the surface-structured material until layer comprising periodically recurring cavities has formed beneath a closed layer at the surface of the material, c) separation of the closed layer at the surface from the remainder of the semiconducting material along the layer of cavities. 32. The film or thin layer of claim 30 which has a thickness of 20 nm or less and a thickness variation of 5% or less. 33. The film or thin layer of claim 30 which is free of crystal damage caused by ion implantation. 34. The film or thin layer of claim 30 which further has an epitaxial layer of semiconducting material deposited thereon. 35. An SOI wafer, comprising a carrier wafer and a thin layer of silicon separated from an FZ or CZ wafer, and which, prior to depositing any epitaxial layer, has an HF defect density less than 0. 1/cm2 and a Secco etch defect density of less than 10/cm 2. 36. The SOI wafer of claim 35, wherein said thin layer of silicon has a thickness of 20 nm or less and a thickness variation of 5% or less. 37. The SOI wafer of claim 35, wherein said thin layer of silicon is separated from said CZ or FZ wafer by the steps of a) the production of structures comprising periodically recurring recesses of predetermined geometries on the surface of a semiconducting material, b) heat treatment of the surface-structured material until layer comprising periodically recurring cavities has formed beneath a closed layer at the surface of the material, c) separation of the closed layer at the surface from the remainder of the semiconducting material along the layer of cavities. 38. The SOI wafer of claim 36, which is free of radiation-induced defects. 39. An SOI wafer comprising a carrier wafer and a thin layer of semiconductor material, said thin layer of semiconductor material separated from a CZ or FZ wafer by the steps of a) the production of structures comprising periodically recurring recesses of predetermined geometries on the surface of a semiconducting material, b) heat treatment of the surface-structured material until layer comprising periodically recurring cavities has formed beneath a closed layer at the surface of the material, c) separation of the closed layer at the surface from the remainder of the semiconducting material along the layer of cavities, said thin layer having an HF defect density below 0.1/cm2 and a Secco etch defect density less than 10/cm2.
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이 특허에 인용된 특허 (10)
Sato Nobuhiko,JPX ; Yonehara Takao,JPX ; Sakaguchi Kiyofumi,JPX, Method for producing semiconductor substrate.
Ogura, Atsushi, Semiconductor substrate manufacturing method and semiconductor device manufacturing method, and semiconductor substrate and semiconductor device manufactured by the methods.
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