IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0447160
(2003-05-29)
|
우선권정보 |
JP-2002-161817(2002-06-03); JP-2002-326914(2002-11-11) |
발명자
/ 주소 |
- Takagi,Kunihiko
- Seto,Takeshi
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출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
8 인용 특허 :
10 |
초록
▼
The invention provides a pump which has reduced pressure loss by using fewer mechanical on-off valves, which has increased reliability, which can be used under a high load pressure, which can be driven at a high frequency, and which has good drive efficiency by increasing discharge fluid volume per
The invention provides a pump which has reduced pressure loss by using fewer mechanical on-off valves, which has increased reliability, which can be used under a high load pressure, which can be driven at a high frequency, and which has good drive efficiency by increasing discharge fluid volume per pumping period. A circular diaphragm, disposed at the bottom portion of a case, has its outer peripheral edge secured to and supported by the case. A piezoelectric device to move the diaphragm is disposed at the bottom surface of the diaphragm. A space between the diaphragm and the top wall of the case is a pump chamber. An inlet flow path, having a check valve serving as a fluid resistor disposed thereat, and an outlet flow path, which opens to the pump chamber during operation of the pump, open towards the pump chamber. In the pump, driving of the piezoelectric device is controlled so that an average displacement velocity in a pump chamber volume reducing step of the diaphragm becomes a velocity at which the diaphragm reaches the reached-displacement-position in a time equal to or less than 쩍 and equal to or greater than 1/10 of a natural vibration period T of fluid inside the pump chamber and the outlet flow path.
대표청구항
▼
What is claimed is: 1. A pump, comprising: a movable wall including at least a diaphragm; an actuator to displace the movable wall; a driving device to control driving of the actuator; a pump chamber having a volume that is changeable by the displacement of the movable wall; at least one inlet flow
What is claimed is: 1. A pump, comprising: a movable wall including at least a diaphragm; an actuator to displace the movable wall; a driving device to control driving of the actuator; a pump chamber having a volume that is changeable by the displacement of the movable wall; at least one inlet flow path to allow an operating fluid to flow into the pump chamber; and at least one outlet flow path to allow the operating fluid to flow out of the pump chamber, the outlet flow path being opened to the pump chamber during operation of the pump, a combined inertance value of the at least one inlet flow path being smaller than a combined inertance value of the at least one outlet flow path, and the inlet flow path having a fluid resistor to cause a resistance to the flow of the operating fluid to be smaller when the operating fluid flows into the pump chamber than when the operating fluid flows out of the pump chamber; the driving device including a displacement controlling device to control movement of the movable wall based on detection information from pump pressure detecting means for detecting pressure inside the pump; and the displacement controlling device measuring time up to when the pump pressure detecting means detects a predetermined pressure change after completion of the displacement of the movable wall for one period, and controlling the movement of the movable wall based on information of the measured time. 2. The pump according to claim 1, the displacement controlling device controlling the movement of the movable wall so that the measured time becomes extended. 3. A pump, comprising: a movable wall including at least a diaphragm; an actuator to displace the movable wall; a driving device to control driving of the actuator; a pump chamber having a volume that is changeable by the displacement of the movable wall; at least one inlet flow path to allow an operating fluid to flow into the pump chamber; and at least one outlet flow path to allow the operating fluid to flow out of the pump chamber, the outlet flow path being opened to the pump chamber during operation of the pump, a combined inertance value of the at least one inlet flow path being smaller than a combined inertance value of the at least one outlet flow path, and the inlet flow path having a fluid resistor to cause a resistance to the flow of the operating fluid to be smaller when the operating fluid flows into the pump chamber than when the operating fluid flows out of the pump chamber; the driving device including a displacement controlling device to control movement of the movable wall based on detection information from pump pressure detecting means for detecting pressure inside the pump, and the displacement controlling device controlling the movement of the movable wall based on a calculation value using a predetermined value and a value detected by the pump pressure detecting device. 4. The pump according to claim 3, the calculation value being a value resulting from time-integrating a difference between the value detected by the pump pressure detecting device and the predetermined value for a period in which the value detected by the pump pressure detecting means is equal to or greater than the predetermined value. 5. The pump according to claim 4, the displacement controlling device controlling the movement of the movable wall so that the calculation value increases. 6. The pump according to claim 3, the predetermined value being a value measured by the pump pressure detecting device prior to driving the actuator. 7. The pump according to claim 3, the predetermined value being a value measured by the pump pressure detecting device when the driving of the actuator is stopped temporarily. 8. The pump according to claim 3, the predetermined value being a previously inputted value substantially equivalent to a load pressure at a location downstream from the outlet flow path. 9. The pump according to claim 3, the driving device further including a load pressure detecting device to detect a load pressure at a location downstream from the outlet flow path, and the predetermined value being a value measured by the load pressure detecting device. 10. A pump, comprising: a movable wall including at least a diaphragm; an actuator to displace the movable wall; a driving device to control driving of the actuator; a pump chamber having a volume that is changeable by the displacement of the movable wall; at least one inlet flow path to allow an operating fluid to flow into the pump chamber; and at least one outlet flow path to allow the operating fluid to flow out of the pump chamber, the outlet flow path being opened to the pump chamber during operation of the pump, a combined inertance value of the at least one inlet flow path being smaller than a combined inertance value of the at least one outlet flow path, and the inlet flow path having a fluid resistor to cause a resistance to the flow of the operating fluid to be smaller when the operating fluid flows into the pump chamber than when the operating fluid flows out of the pump chamber; the driving device including a displacement controlling device to control movement of the movable wall based on detection information from pump pressure detecting means for detecting pressure inside the pump, the displacement controlling device controlling a displacement velocity in the pump chamber volume reducing step of the movable wall by changing a displacement time of the movable wall while holding the reached-displacement-position of the movable wall constant. 11. A pump, comprising: a movable wall including at least a diaphragm; an actuator to displace the movable wall; a driving device to control driving of the actuator; a pump chamber having a volume that is changeable by the displacement of the movable wall; at least one inlet flow path to allow an operating fluid to flow into the pump chamber; and at least one outlet flow path to allow the operating fluid to flow out of the pump chamber, the outlet flow path being opened to the pump chamber during operation of the pump, a combined inertance value of the at least one inlet flow path being smaller than a combined inertance value of the at least one outlet flow path, and the inlet flow path having a fluid resistor to cause a resistance to the flow of the operating fluid to be smaller when the operating fluid flows into the pump chamber than when the operating fluid flows out of the pump chamber; the driving device including a displacement controlling device to control movement of the movable wall based on detection information from pump pressure detecting means for detecting pressure inside the pump, and the displacement controlling device performing a controlling operation so that the movable wall is displaced in a direction in which the volume of the pump chamber is increased after a reduction in the pressure detected by the pump pressure detecting device to a value less than a predetermined value.
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