Substrate carrier and method for making a substrate carrier
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G03B-027/58
G03B-027/62
출원번호
US-0829462
(2004-04-22)
우선권정보
EP-03076171(2003-04-22); EP-03077038(2003-06-30)
발명자
/ 주소
Gilissen,Noud Jan
Ottens,Joost Jeroen
Van Der Schoot,Harmen Klaas
Vosters,Petrus Matthijs Henricus
출원인 / 주소
ASML Netherlands B.V.
대리인 / 주소
Pillsbury Winthrop Shaw Pittman LLP
인용정보
피인용 횟수 :
5인용 특허 :
10
초록▼
A carrier for carrying a lithographic substrate or a lithographic patterning means. The carrier comprises a first member provided with an open hollow structure that is open to at least one side of the member. The carrier further comprises a second member connected to the first member, such that a cl
A carrier for carrying a lithographic substrate or a lithographic patterning means. The carrier comprises a first member provided with an open hollow structure that is open to at least one side of the member. The carrier further comprises a second member connected to the first member, such that a closed hollow internal structure is formed between the carrier members.
대표청구항▼
The invention claimed is: 1. A carrier constructed to carry a lithographic substrate or a lithographic patterning device, said carrier comprising: a first member provided with an open hollow structure that is open to at least one side of said first member, said first member constructed to support a
The invention claimed is: 1. A carrier constructed to carry a lithographic substrate or a lithographic patterning device, said carrier comprising: a first member provided with an open hollow structure that is open to at least one side of said first member, said first member constructed to support a lithographic substrate or a lithographic patterning device; and a second member connected to said first member, such that a closed hollow internal structure is formed between said first and second members. 2. A carrier according to claim 1, wherein said second member has an open, hollow structure which together with said open hollow structure of said first member forms said closed internal structure of said carrier. 3. A carrier according to claim 2, wherein said open, hollow structure of said first and second members includes a plurality of spaced apart ribs. 4. A carrier according to claim 1, further comprising: a third member positioned between said first and second members, said third member having an open, hollow structure, that is open to two opposite sides thereof. 5. A carrier according to claim 4, wherein said third member includes a plurality of spaced apart interior walls in said open, hollow structure. 6. A carrier according to claim 3, wherein said open, hollow structure of said first and second members includes an additional plate positioned against said ribs. 7. A carrier according to claim 1, wherein said first and second members of said carrier are made of different materials, of which at least one is chosen from a group consisting of glass, carbon and ceramics. 8. A lithographic apparatus comprising: a radiation system constructed to provide a beam of radiation; a support structure constructed to support a patterning device, said patterning device serving to impart a cross-section of said beam with a pattern to form a patterned beam; and a projection system that projects said patterned beam onto a target portion of a substrate, wherein said apparatus further includes a table constructed to hold said substrate or said patterning device, said table including a carrier constructed to carry a lithographic substrate or a lithographic patterning device, said carrier including a first member provided with an open hollow structure that is open to at least one side of said first member, said first member constructed to support a lithographic substrate or a lithographic patterning device; and a second member connected to said first member, such that a closed hollow internal structure is formed between said first and second members. 9. A lithographic apparatus according to claim 8, wherein said second member has an open, hollow structure which together with said open hollow structure of said first member forms said closed internal structure of said carrier. 10. A lithographic apparatus according to claim 9, wherein said open, hollow structure of said first and second members includes a plurality of spaced apart ribs. 11. A lithographic apparatus according to claim 10, wherein said open, hollow structure of said first and second members includes an additional plate positioned against said ribs. 12. A lithographic apparatus according to claim 8, wherein said carrier further includes a third member positioned between said first and second members, said third member having an open, hollow structure, that is open to two opposite sides thereof. 13. A lithographic apparatus according to claim 12, wherein said third member includes a plurality of spaced apart interior walls in said open, hollow structure. 14. A lithographic apparatus according to claim 8, wherein said first and second members of said carrier are made of different materials, of which at least one is chosen from a group consisting of glass, carbon and ceramics. 15. A method for making a carrier for carrying a lithographic substrate or a lithographic patterning device, the method comprising: providing at least two members, one of the at least two members being constructed to support a lithographic substrate or a lithographic patterning device; and connecting the at least two members to each other to form a carrier, where the at least two members are formed in such a way that the carrier comprises a substantially closed, hollow internal structure. 16. A method according to claim 15, further comprising: forming the at least two members by a milling technique. 17. A method according to claim 15, further comprising: providing at least one of the at least two members with means for holding the substrate or the patterning device. 18. A method according to claim 15, wherein: forming the carrier includes providing a mirror on at least one side of the carrier, the mirror being arranged to be used in combination with a position determining unit. 19. A method according to claim 15, further comprising: forming a hollow structure in a third member in such a way that the third member comprises a first and a second open side, attaching the first member to the first open side of the third member and attaching the second member to the second open side of the third member in such a way that the carrier comprises a substantially closed, hollow internal structure. 20. A method according to claim 19, comprising forming a hollow structure in the first and the second member in such a way that the first and second member have one open side, attaching the open side of the first member to the first open side of the third member and attaching the open side of the second member to the second open side of the third member in such a way that the carrier comprises a substantially closed, hollow internal structure. 21. A method according to claim 15 further comprising: providing an additional plate; and positioning the addition plate in between the first and third member or the second and third member. 22. A method according to claim 15, further comprising: forming the hollow structure in the third member using an extrusion technique or a water jet cutting technique. 23. A method according to claim 15, further comprising: forming openings in the carrier. 24. A method according to claim 15, wherein the at least two members forming the carrier are joined by anodic bonding.
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Vermeulen, Marcus Martinus Petrus Adrianus; Jacobs, Johannes Henricus Wilhelmus; Ottens, Joost Jeroen, Support structure, lithographic apparatus and method.
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