IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0413509
(2003-04-14)
|
우선권정보 |
DE-202 05 819 U(2002-04-12) |
발명자
/ 주소 |
- Graves,Todd
- Vondran,Martin
- Benzinger,Martin
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
1 인용 특허 :
33 |
초록
▼
A system and method for providing process chemicals. The system includes a housing comprising a functional component positioned in a first compartment, a control module positioned in a second compartment and at least one connecting line positioned in a third compartment. At least one compartment is
A system and method for providing process chemicals. The system includes a housing comprising a functional component positioned in a first compartment, a control module positioned in a second compartment and at least one connecting line positioned in a third compartment. At least one compartment is positioned in a defined location in the housing. Modules may be removable received in their respective compartments.
대표청구항
▼
What is claimed is: 1. A method of providing process chemicals, comprising: providing a housing comprising a first compartment, a second compartment, and a third compartment, wherein the first compartment is constructed and arranged to removably receive a functional module, and wherein the third co
What is claimed is: 1. A method of providing process chemicals, comprising: providing a housing comprising a first compartment, a second compartment, and a third compartment, wherein the first compartment is constructed and arranged to removably receive a functional module, and wherein the third compartment extends to each sidewall of the housing; and providing a functional module selected from a plurality of functional modules dimensioned to be interchangeably received within the first compartment, the plurality of functional modules including: a maintenance module; a sample drawing module; an analytical module; a humidifier module; a tank module; a DI module; a mixing module; a mixing tank module; a sensor module; a single pump module; a double pump module; a single filter module; and a double filter module. 2. The method of claim 1, wherein the housing further comprises a fourth compartment, and wherein each of the first, second, third, and fourth compartments are positioned in defined locations within the housing. 3. The method of claim 1, further comprising: providing a second functional module selected from the group consisting of: a maintenance module; a sample drawing module; an analytical module; a humidifier module; a tank module; a DI module; a mixing module; a mixing tank module; a sensor module; a single pump module; a double pump module; a single filter module; and a double filter module; and positioning the second functional module in another first compartment in the housing. 4. A system for providing process chemicals, comprising: a housing comprising: a first compartment; a second compartment; and a third compartment, the third compartment extending to each sidewall of the housing, wherein the first compartment is constructed and arranged to removably receive any one of a plurality of functional modules including: a maintenance module; a sample drawing module; an analytical module; a humidifier module; a tank module; a DI module; a mixing module; a mixing tank module; a sensor module; a single pump module; a double pump module; a single filter module; and a double filter module, wherein each of the functional modules is dimensioned so as to be interchangeable with one another. 5. The system of claim 4, wherein the second compartment is constructed and arranged to removably receive a control module. 6. The system of claim 5, wherein the third compartment is constructed and arranged to removably receive at least one connecting line. 7. The system of claim 6, wherein the housing further comprises a fourth compartment constructed and arranged to individually and removably receive each of: a rinse-interface module; an analytical-interface module; a control-interface module; a FAB supply-interface module; a humidifier-interface module; a titrator-interface module; a DI interface module; a sample pulling-interface module; a double pump-interface module; a single-pump interface module; a filter-interface module; and a FAB return-interface module. 8. The system of claim 7, further comprising: two or more first compartments identical to one another; and two or more fourth compartments identical to one another. 9. The system of claim 7, wherein the housing is a first housing, the system further comprising a second housing comprising: a first compartment constructed and arranged to be connected to the first compartment of the first housing; a second compartment constructed and arranged to be connected to the second compartment of the first housing; a third compartment constructed and arranged to be connected to the third compartment of the first housing; and a fourth compartment constructed and arranged to be connected to the fourth compartment of the first housing. 10. The system of claim 9, wherein the first housing is identical to the second housing. 11. A system for providing process chemicals, comprising: a first housing comprising a first compartment, a second compartment, and a third compartment; a functional module selected from a plurality of functional modules dimensioned so as to be interchangeably received in the first compartment; a control module received in the second compartment; and at least one connecting line positioned in the third compartment, wherein each of the first, second, and third compartments is positioned in a defined location in the first housing, wherein the third compartment houses only the at least one connecting line, and wherein a location of a module within each of the first and second compartments identifies whether the module is a functional module or a control module. 12. The system of claim 11, wherein the first compartment is constructed and arranged to individually house any of a maintenance module; a sample drawing module; an analytical module; a humidifier module; a tank module; a DI module; a mixing module; a mixing tank module; a sensor module; a single pump module; a double pump module; a single filter module; and a double filter module, each dimensioned to fit within the first compartment. 13. The system of claim 11, further comprising an interface module positioned in a fourth compartment of the first housing. 14. The system of claim 13, wherein the interface module is removably positioned in the fourth compartment. 15. The system of claim 14, wherein the fourth compartment includes a rack for removably receiving the interface module. 16. The system of claim 14, wherein the first housing comprises: two or more first compartments each identical to one another; and two or more fourth compartments each identical to one another. 17. The system of claim 13, wherein the at least one connecting line is a supply line. 18. The system of claim 17, further comprising at least one drain line positioned in a fifth compartment of the first housing. 19. The system of claim 18, further comprising at least one hydraulic auxiliary line positioned in a sixth compartment of the first housing. 20. The system of claim 19, further comprising at least one electrical connecting line positioned in a seventh compartment of the first housing. 21. The system of claim 11, wherein at least one of the functional module and the control module is removable. 22. The system of claim 21, wherein at least one of the first compartment and the second compartment includes a rack. 23. The system of claim 11, wherein the first housing further comprises an aeration channel and a ventilation channel. 24. The system of claim 11, further comprising a second housing positioned adjacent the first housing, wherein the second housing comprises: a first compartment constructed and arranged to be connected to the first compartment of the first housing; a second compartment constructed and arranged to be connected to the second compartment of the first housing; and a third compartment constructed and arranged to be connected to the third compartment of the first housing. 25. The system of claim 24, further comprising: a functional module positioned in the first compartment of the second housing; a control module positioned in the second compartment of the second housing; and at least one connecting line positioned in the third compartment of the second housing; wherein the first compartment in the first housing has a defined location within the first housing corresponding to a defined location of the first compartment in the second housing. 26. The system of claim 25, wherein the second and third compartments of the first housing each have defined locations within the first housing corresponding to locations of the second and third compartments of the second housing. 27. The system of claim 11, further comprising a second housing for electrical control equipment. 28. The system of claim 11, wherein the control module is operatively coupled to the functional module to control operation of the functional module.
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