$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Installation for making available highly pure fine chemicals 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B08B-007/00
출원번호 US-0413509 (2003-04-14)
우선권정보 DE-202 05 819 U(2002-04-12)
발명자 / 주소
  • Graves,Todd
  • Vondran,Martin
  • Benzinger,Martin
출원인 / 주소
  • Kinetics Germany GmbH
대리인 / 주소
    Lowrie, Lando &
인용정보 피인용 횟수 : 1  인용 특허 : 33

초록

A system and method for providing process chemicals. The system includes a housing comprising a functional component positioned in a first compartment, a control module positioned in a second compartment and at least one connecting line positioned in a third compartment. At least one compartment is

대표청구항

What is claimed is: 1. A method of providing process chemicals, comprising: providing a housing comprising a first compartment, a second compartment, and a third compartment, wherein the first compartment is constructed and arranged to removably receive a functional module, and wherein the third co

이 특허에 인용된 특허 (33)

  1. Obeng Yaw S. ; Schultz Laurence D., Apparatus and method for continuous delivery and conditioning of a polishing slurry.
  2. Vanell James F. ; Ward Steven D. ; Mullins James M., Apparatus and method for dynamically mixing slurry for chemical mechanical polishing.
  3. Ushakov Vladimir F. (ulitsa Starykh boloherrkov ; 9 ; kv. 56 Voronezh SUX) Pergunov Alexandr I. (Leninsky prospekt ; 152 ; kv. 75 Voronezh SUX) Alexeev Albert V. (ulitsa Ostuzheva ; 1 ; kv. 6 Voronez, Apparatus for preparing and feeding an abrasive-containing suspension into the zone of action of work tools of polishing.
  4. Bertoglio Guido (Viganello CHX), Apparatus to continuously mix and homogenize powdered substances with liquid substances.
  5. Noah Craig M. ; Gregg John N. ; Jackson Robert M. ; Esser Craig, Bulk chemical delivery system.
  6. Davis James L. (Marlow OK), Cement metering system.
  7. Jackson Robert M., Chemical cabinet employing air flow baffles.
  8. Gregg John N. ; Noah Craig M. ; Jackson Robert M., Chemical delivery system having purge system utilizing multiple purge techniques.
  9. Birtcher Charles Michael ; Steidl Thomas Andrew ; Sheehy William J., Chemical delivery system with spill containment door.
  10. Danielson Donald D. (Aloha OR) Feller Allen D. (Portland OR) Cadien Kenneth C. (Portland OR), Chemical mechanical polishing slurry delivery and mixing system.
  11. Botelho Alexandre de Almeida ; Del Prato Thomas Anthony ; Ford Robert William, Dynamic blending gas delivery system and method.
  12. Young, Jr., Robert Raymond, Gas isolation box.
  13. Stehr Norbert (Grunstadt DEX) Marz Dieter (Mannheim DEX), Installation for the mixing of liquid and solid matter.
  14. Schmitkons James W. (Lorain OH) Noss Jeffrey (Bay Village OH), Method & apparatus for metering flow of a two-component dispensing system.
  15. Noss Jeffrey S. (Bay Village OH) Price Richard P. (Parma Heights OH) Schmitkons James W. (Lorain OH), Method and apparatus for compensating for changes in viscosity in a two-component dispensing system.
  16. Kaminski Donald R. (Magnolia TX) Sims Burnie (Scott LA), Method and apparatus for mixing dry particulate material with a liquid.
  17. Jones Clifford (Lawrenceville GA) Baker John L. (Wenatchee WA), Method for blending diverse blowing agents.
  18. Cadeo Angelo (Eichtenweg 24 4852 Rothrist CHX) Zellweger Ruedi (Zofingen CHX), Method for continuously producing a flowable mixture.
  19. Peltzer Charles T., Method for manufacturing a system for mixing fluids.
  20. Peltzer Charles T., Method for manufacturing a system for treating reclaimed water to provide treated water.
  21. Pardikes Dennis (12811 S. 82nd Ct. Palos Park IL 60464), Method of inverting, mixing, and activating polymers.
  22. Vanell James F. ; Bray Chad B., Method of manufacturing a semiconductor component and chemical-mechanical polishing system therefor.
  23. Cho, Thomas; Navasca, Robert J.; Ishikawa, Tetsuya, Modular gas panel closet for a semiconductor wafer processing platform.
  24. Murphy James J. (Austin TX) Farkas Janos (Austin TX) Markert Lucia C. (Austin TX) Jairath Rahul (Austin TX), Point of use slurry dispensing system.
  25. Brazelton Carl L. (Austin TX), Polymer feed system.
  26. Bishop David C. (Des Plaines IL), Precision metering system for the delivery of abrasive lapping and polishing slurries.
  27. Millis Andrew D. (Hampton GB2), Slurry producing apparatus.
  28. Davis Shawn D., Substrate treatment apparatus.
  29. Purvis Fay A. ; MacBride William R. ; Norman Edward C., System and method for producing and maintaining predetermined proportionate mixtures of fluids.
  30. Peltzer Charles T. (3950 Miraloma Anaheim CA 92806), System for treating reclaimed water to provide treated water and corresponding method.
  31. Hall James C. (San Jose CA) Goodbread Jon P. (Thornton CO) O\Connor Kenneth M. (Fremont CA), Transportable environmentally safe chemical dispense module.
  32. Livanos Vassilios J. (Fort Lee NJ) Ngai Eugene Y. (White House Station NJ), Ventilated cabinet for containing gas supply vessels.
  33. Kimura Norio (Tokyo JPX) Aoki Katsuyuki (Tokyo JPX) Kawashima Kiyotaka (Tokyo JPX) Ishikawa Seiji (Tokyo JPX), Waste treatment system in a polishing apparatus.

이 특허를 인용한 특허 (1)

  1. Kandiyeli, David; Graves, Todd; Yang, Rhey, System and method for delivering chemicals.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로