초록 ▼

An article of manufacture and apparatus are provided for planarizing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including polishing article comprising a body having at least a partially conductive surface adapted to polish the substrate and a

An article of manufacture and apparatus are provided for planarizing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including polishing article comprising a body having at least a partially conductive surface adapted to polish the substrate and a mounting surface. A plurality of perforations may be formed in the polishing article for flow of material therethrough. In another aspect, a polishing article for polishing a substrate includes a body having a polishing surface and a conductive element disposed therein. The conductive element may have a contact surface that extends beyond a plane defined by the polishing surface. The polishing surface may have one or more pockets formed therein. The conductive element may be disposed in each of the polishing pockets.

대표청구항 ▼

What is claimed is: 1. A polishing article for polishing a substrate, comprising: a body having a polishing surface adapted to polish the substrate; at least one conductive element embedded in the polishing surface, wherein the conductive element has a contact surface that extends beyond a plane d

What is claimed is: 1. A polishing article for polishing a substrate, comprising: a body having a polishing surface adapted to polish the substrate; at least one conductive element embedded in the polishing surface, wherein the conductive element has a contact surface that extends beyond a plane defined by the polishing surface; and one or more pockets formed in the polishing surface, wherein the conductive element is disposed in at least one of the pockets. 2. The polishing article of claim 1, wherein the biasing member is a spring, a foam polymer, plastic tubing, an elastomer, or combinations thereof, and urges a compliant contact surface of the conductive element to electrically contact the substrate disposed on the polishing surface. 3. The polishing article of claim 1, further comprising a biasing member disposed in the pocket between the conductive element and the body. 4. The polishing article of claim 1, wherein the conductive element is selected from at least one of the group of conductive tubing, a brush, a spring, a pin, a bar, a rod, a coil, a cylinder, a roller, a ball, or combinations thereof. 5. The polishing article of claim 1, wherein the conductive element further comprises a contact surface that extends beyond a plane defined by the polishing surface. 6. The polishing article of claim 5, wherein the contact surface is rounded, cylindrical, spherical or comprised of fibers, loops, fingers, strands, or combinations thereof. 7. The polishing article of claim 1, wherein the conductive element further comprises: a carrier disposed in the pocket; a contact member disposed on the carrier; and wherein at least a portion of the contact member extends beyond a plane defined by the polishing surface. 8. The polishing article of claim 7, wherein the carrier and contact member are conductive. 9. The polishing article of claim 7, wherein the contact member comprises a plurality of balls, pins, a rod, a spring, conductive tubing, a brush, a bar, a coil, a cylinder, a roller, or combinations thereof. 10. The polishing article of claim 7, wherein at least one of the carrier and contact member is made of graphite. 11. The polishing article of claim 1, further comprising a connector coupled to the conductive member and adapted to electrically couple the conductive member to a bias power source through or around the body. 12. An article of manufacture for polishing a substrate, comprising: a polishing article comprising a body having at least a partially conductive surface adapted to polish the substrate and a mounting surface, wherein the conductive surface has a resistivity of about 10 Ω-cm or less, wherein the body comprises at least a conductive material having at least a portion of a conductive polymer, conductive filler materials, a polymer composite with conductive materials, or combinations thereof. 13. The article of claim 12, wherein the conductive filler materials comprise carbon powder, carbon fibers, carbon nanotubes, carbon nanofoam, carbon aerogels, or combinations thereof. 14. The article of claim 12, wherein the conductive filler materials comprise carbon powder, carbon fibers, or combinations thereof. 15. An article of manufacture for polishing a substrate, comprising: a polishing article comprising a body having at least a partially conductive surface adapted to polish the substrate and a mounting surface, wherein the polishing article further comprises a plurality of perforations formed therein and a plurality of grooves disposed in the polishing surface. 16. The article of claim 15, wherein at least a portion of the plurality of grooves intersect with at least a portion of a plurality of perforations disposed in the polishing surface. 17. The article of claim 15, wherein the body comprises at least a conductive material having at least a portion of a conductive polymer, conductive filler materials, a polymer composite with conductive materials, a conductive metal, a metal mesh, or combinations thereof. 18. The article of claim 17, wherein the conductive filler materials comprise conductive fillers include carbon powder, carbon fibers, carbon nanotubes, carbon nanofoam, carbon aerogels, or combinations thereof. 19. The article of claim 16, wherein the conductive filler materials comprise carbon powder, carbon fibers, or combinations thereof. 20. The article of claim 15, wherein the body comprises a metal mesh disposed in a conventional polishing material. 21. An article of manufacture for polishing a substrate, comprising: a polishing article comprising a body having at least a partially conductive surface adapted to polish the substrate and a mounting surface, wherein the polishing article further comprises a plurality of perforations formed therein; and a polishing article support comprising a plurality of perforations disposed therein for flow of material therethrough, wherein the article of manufacture is disposed on the polishing article support. 22. The article of claim 21, wherein a plurality of perforations in the polishing article are aligned with the plurality of perforations of the polishing article support. 23. The article of claim 21, wherein the body comprises at least a conductive material having at least a portion of a conductive polymer, conductive filler materials, a polymer composite with conductive materials, a conductive metal, a metal mesh, or combinations thereof. 24. The article of claim 23, wherein the conductive filler materials comprise carbon powder, carbon fibers, carbon nanotubes, carbon nanofoam, carbon aerogels, and combinations thereof. 25. The article of claim 23, wherein the conductive filler materials comprise carbon powder, carbon fibers, and combinations thereof. 26. The article of claim 21, wherein the body comprises a metal mesh disposed in a conventional polishing material. 27. An apparatus for processing a substrate, comprising: a basin; a permeable disc disposed in the basin; a polishing article disposed on the permeable disk and at least a portion of the polishing article comprising an electrode, wherein the polishing article comprises a body having at least a partially conductive surface adapted to polish the substrate and a mounting surface, wherein the polishing article further comprises a plurality of perforations formed therein; a counter electrode disposed in the basin between the permeable disc and the bottom of the basin; and a polishing head adapted to retain the substrate during processing. 28. The article of claim 27, wherein the body comprises at least a conductive material having at least a portion of a conductive polymer, conductive filler materials, a polymer composite with conductive materials, a conductive metal, a metal mesh, or combinations thereof. 29. The article of claim 28, wherein the conductive filler materials comprise conductive fillers include carbon powder, carbon fibers, carbon nanotubes, carbon nanofoam, carbon aerogels, or combinations thereof. 30. The article of claim 28, wherein the conductive filler materials comprise carbon powder, carbon fibers, or combinations thereof. 31. The article of claim 27, wherein the body comprises a metal mesh disposed in a conventional polishing material. 32. A polishing article for polishing a substrate, comprising: a body having a polishing surface adapted to polish the substrate; and at least one conductive element embedded in the polishing surface, the conductive element having a contact surface that extends beyond a plane defined by the polishing surface; and a biasing member disposed between the at least conductive element and the body, the biasing member adapted to urge the at least one conductive element towards the polishing surface. 33. The polishing article of claim 32, wherein the body comprises a dielectric material selected from the group of polyurethane, polycarbonate, polyphenylene sulfide, felt fibers leached with urethane, filled polymers, foamed polymers, and combinations thereof. 34. The polishing article of claim 32, wherein the body has a plurality of apertures formed therethrough. 35. The polishing article of claim 32, wherein the biasing member comprises a spring, a foam polymer, plastic tubing, an elastomer, or combinations thereof. 36. The polishing article of claim 32, wherein the biasing member is resilient and urges a compliant contact surface of the conductive element to electrically contact the substrate disposed on the polishing surface. 37. The polishing article of claim 32, wherein the at least one conductive element is selected from at least one of the group of conductive tubing, a brush, a spring, a pin, a bar, a rod, a coil, a cylinder, a roller, a ball, or combinations thereof and combinations thereof. 38. The polishing article of claim 37, wherein the at least one conductive element comprises carbon, a conductive metal, or combinations thereof. 39. The polishing article of claim 32, wherein the biasing member is selected from the group of a spring, a foam polymer, plastic tubing, an elastomer, and combinations thereof, the at least one conductive element is selected from at least one of the group of conductive tubing, a brush, a spring, a pin, a bar, a rod, a coil, a cylinder, a roller, a ball, and combinations thereof, wherein the biasing member urges a compliant contact surface of the conductive element to electrically contact the substrate disposed on the polishing surface. 40. The polishing article of claim 39, wherein the at least one conductive element comprises carbon, a conductive metal, or combinations thereof. 41. The polishing article of claim 32, wherein the at least one conductive element comprises a plurality of graphite or gold balls seated on and electrically coupled through a graphite carrier. 42. The polishing article of claim 32, wherein the at least one conductive element comprises one or more graphite rods each seated on a graphite carrier. 43. The polishing article of claim 32, wherein the at least one conductive element comprises one or more carbon fibers. 44. The polishing article of claim 32, wherein the at least one conductive element comprises a plurality of loop of graphite, gold, or conductive metal, coupled to a tie wire base embedded in the body. 45. A polishing article for polishing a substrate, comprising: a body having a polishing surface adapted to polish the substrate; and a plurality of conductive compliant elements embedded in the polishing surface, the conductive compliant elements having a contact surface that extends beyond a plane defined by the polishing surface and is adapted to be urged by the substrate towards the polishing surface; and a biasing member disposed between the conductive compliant elements and the body. 46. The polishing article of claim 45, wherein the biasing member is selected from the group of a spring, a foam polymer, plastic tubing, an elastomer, and combinations thereof, the at least one conductive element is selected from at least one of the group of conductive tubing, a brush, a spring, a pin, a bar, a rod, a coil, a cylinder, a roller, a ball, and combinations thereof, wherein the at least one conductive element has a compliant contact surface to electrically contact the substrate disposed on the polishing surface. 47. The polishing article of claim 45, wherein the at least one conductive element comprises carbon, a conductive metal, or combinations thereof. 48. The polishing article of claim 46, wherein the at least one conductive element comprises one or more carbon fibers. 49. The polishing article of claim 45, wherein the at least one conductive element comprises a plurality of loop of graphite, gold, or conductive metal, coupled to a tie wire base embedded in the body. 50. A polishing article for polishing a substrate, comprising: a body having a polishing surface adapted to polish the substrate; and at least one conductive element embedded in the polishing surface, the conductive element having a contact surface that extends beyond a plane defined by the polishing surface, wherein the contact surface is rounded, cylindrical, spherical or comprised of fibers, loops, fingers, strands, or combinations thereof. 51. The polishing article of claim 50, wherein the body comprises a dielectric material selected from the group of polyurethane, polycarbonete, polyphenylene sulfide, felt fibers leached with urethane, filled polymers, foamed polymers, and combinations thereof, and has a plurality of apertures formed therethrough. 52. The polishing article of claim 50, wherein the at least one conductive element is selected from at least one of the group of conductive tubing, a brush, a spring, a pin, a bar, a rod, a coil, a cylinder, a roller, a ball, and combinations thereof. 53. The polishing article of claim 52, wherein the at least one conductive element comprises carbon, a conductive metal, or combinations thereof. 54. The polishing article of claim 50, wherein the at least one conductive element comprises a plurality of graphite or gold balls seated on and electrically coupled through a graphite carrier. 55. The polishing article of claim 50, wherein the at least one conductive element comprises one or more graphite rods each seated on a graphite carrier. 56. The polishing article of claim 50, wherein the at least one conductive element comprises one or more carbon fibers. 57. The polishing article of claim 50, wherein the at least one conductive element comprises a plurality of loop of graphite, gold, or conductive metal, coupled to a tie wire base embedded in the body. 58. A polishing article for polishing a substrate, comprising: a body having a polishing surface adapted to polish the substrate; and at least one conductive element embedded in the polishing surface, comprising: a carrier disposed in a pocket formed in the body; and a contact member disposed on the carrier, the contact member having a contact surface extending beyond a plane defined by the polishing surface. 59. The polishing article of claim 58, wherein the carrier and contact member are conductive. 60. The polishing article of claim 59, wherein at least one of the carrier and contact member is made of graphite, carbon, a conductive metal, or combinations thereof. 61. The polishing article of claim 58, wherein the contact member comprises a plurality of conductive tubing, a brush, springs, pins, bars, rods, coils, cylinders, rollers, balls, or combinations thereof. 62. The polishing article of claim 58, wherein the body comprises a dielectric material selected from the group of polyurethane, polycarbonate, polyphenylene sulfide, felt fibers leached with urethane, filled polymers, foamed polymers, and combinations thereof, and has a plurality of apertures formed therethrough. 63. The polishing article of claim 58, wherein the at least one conductive element comprises a plurality of graphite or gold balls seated on and electrically coupled through a graphite carrier. 64. The polishing article of claim 58, wherein the at least one conductive element comprises one or more graphite rods each seated on a graphite carrier. 65. The polishing article of claim 58, wherein the at least one conductive element comprises one or more carbon fibers disposed on a carrier. 66. The polishing article of claim 58, wherein the at least one conductive element comprises a plurality of loop of graphite, gold, or conductive metal, coupled to a carrier comprising a tie wire base. 67. An apparatus for processing a substrate, comprising: a basin; a permeable disc disposed in the basin; a polishing article is disposed on the permeable disk and at least a portion of the polishing article comprising an electrode, wherein the polishing article comprises: a body having a polishing surface adapted to polish the substrate; and at least one conductive element embedded in the polishing surface, the conductive element having a contact surface that extends beyond a plane defined by the polishing surface. a counter electrode disposed in the basin between the permeable disc and the bottom of the basin; and a polishing head adapted to retain the substrate during processing.