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Bubbler for substrate processing

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01F-003/04
출원번호 US-0622127 (2003-07-17)
발명자 / 주소
  • Stamp,Michael R.
  • AmRhein,Frederick J.
  • Dale,Arnold J.
  • Pottebaum,Joseph C.
  • Ebert,Brian J.
출원인 / 주소
  • ASM America, Inc.
대리인 / 주소
    Knobbe, Martens, Olson &
인용정보 피인용 횟수 : 14  인용 특허 : 21

초록

A vaporization chamber for a substrate processing system includes a main body, a cover member and a transition member. The main body is made of aluminum and defines a first inner surface, which defines, at least in part, a cavity. The cover member is also made of aluminum. The cover member defines

대표청구항

We claim: 1. A substrate processing system for processing a substrate, comprising: a carrier gas source; a liquid source container; a reactor; a vaporization chamber comprising a body that forms a first inner surface that defines at least in part a cavity, the cavity being in communication with the

이 특허에 인용된 특허 (21)

  1. Geatz Tobin (Durham NC), Apparatus and method for the transfer and delivery of high purity chemicals.
  2. Fair David L. (Rockford IL), Bubbler container automatic refill system.
  3. Fair David L. (Rockford IL), Bubbler container automatic refill system.
  4. Tompkins, Gregory Edward; Sirota, Don Nus; Logue, Raymond Carl, Bubbler for use in vapor generation systems.
  5. Birtcher Charles Michael ; Steidl Thomas Andrew ; Martinez Martin Castaneda ; Hamidi Jamshid Jay, Chemical delivery system with ultrasonic fluid sensors.
  6. Lipisko Bruce A. (Carlsbad CA) Schumacher John C. (Rancho Santa Fe CA) Howard Richard E. (Escondido CA) Randke Peter T. (San Marcos CA) Sandu Adrian (La Mesa CA) Fletcher Robert E. (Vista CA) Graf Ha, Chemical refill system.
  7. Lipisko Bruce A. (Carlsbad CA) Schumacher John C. (Rancho Santa Fe CA) Howard Richard E. (Escondido CA) Randtke Peter T. (San Marcos CA) Sandu Adrian (La Mesa CA) Fletcher Robert E. (Vista CA) Graf H, Chemical refill system.
  8. Yamamuka Mikio,JPX ; Kawahara Takaaki,JPX ; Tarutani Masayoshi,JPX ; Horikawa Tsuyoshi,JPX, Chemical vapor deposition apparatus.
  9. Groll, William A., Cryogenic treatment of cookware and bakeware.
  10. Siegele Stephen H. ; Noah Craig M. ; Gregg John N., Level control systems for high purity chemical delivery systems.
  11. Collins Craig C. (Santa Cruz CA) Richie Michael A. (Santa Cruz CA) Walker Fred F. (Santa Cruz CA) Goodrich Brian C. (Los Gatos CA) Campbell Lowell B. (Santa Cruz CA), Liquid source bubbler.
  12. Miyazaki Shinji (Yokohama JPX) Tsunashima Yoshitaka (Tokyo JPX), Liquid source container device.
  13. Schmitt John V. ; Marsh Richard A., Measurement of quantity of incompressible substance in a closed container.
  14. Yamazaki Masahiro (Yokohama JPX) Iizuka Shigeru (Yokohama JPX) Kamiya Shigemitsu (Kawasaki JPX) Oka Yoshiro (Yokohama JPX) Fujino Katsuhiro (Yokohama JPX), Method and apparatus for feeding drug liquid from hermetic returnable can.
  15. Ameen Michael S. ; Hillman Joseph T., Method and apparatus for preparing and metallizing high aspect ratio silicon semiconductor device contacts to reduce the.
  16. Clare James H. (Reynoldsburg OH), Method for providing metallurgically bonded thermally sprayed coatings.
  17. Peloquin Conrad (San Leandro CA), Method for welding ferrous alloys to aluminum and aluminum alloys or refractory metals.
  18. Alig ; Craig S., Ozone reactor for liquids.
  19. Zhao Jun ; Somekh Sasson ; Sajoto Talex ; Dornfest Charles ; Selyutin Leonid, Temperature controlled process and chamber lid.
  20. Yoshioka Naoki,JPX ; Ito Seiji,JPX, Unit for vaporizing liquid materials.
  21. McMenamin Joseph C. (Oceanside CA), Vapor mass flow control system.

이 특허를 인용한 특허 (14)

  1. Spohn, Ronald F.; Peters, David Walter, Apparatus and method for delivering vapor phase reagent to a deposition chamber.
  2. Spohn, Ronald F.; Peters, David Walter, Bubbler apparatus and delivery method.
  3. Spohn, Ronald F.; Peters, David Walter, Bubbler apparatus and method for delivering vapor phase reagent to a deposition chamber.
  4. Stamp,Michael R.; AmRhein,Frederick J.; Dale,Arnold J.; Pottebaum,Joseph C.; Ebert,Brian J., Bubbler for substrate processing.
  5. Cunning, Hugh; Williams, Graham; Odedra, Rajesh; Kanjolia, Ravi, Bubbler for the transportation of substances by a carrier gas.
  6. Spohn, Ronald F.; Peters, David Walter, Diptube apparatus and delivery method.
  7. Spohn, Ronald F.; Peters, David Walter, Diptube apparatus and method for delivering vapor phase reagent to a deposition chamber.
  8. Spohn, Ronald F.; Peters, David Walter, Reagent dispensing apparatus and delivery method.
  9. Sarigiannis, Demetrius; Ahmed, M. Mushtaq, Reagent dispensing apparatuses and delivery methods.
  10. Kanjolia, Ravi; Platts, Chris; Nguyen, Nam; Wilkinson, Mark, Solid precursor delivery assemblies and related methods.
  11. Birtcher, Charles Michael; Steidl, Thomas Andrew; Lei, Xinjian, Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel.
  12. Steidl, Thomas Andrew; Birtcher, Charles Michael; Lei, Xinjian, Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel.
  13. Birtcher, Charles Michael; Steidl, Thomas Andrew, Splashguard for high flow vacuum bubbler vessel.
  14. Birtcher, Charles Michael; Steidl, Thomas Andrew, Splashguard for high flow vacuum bubbler vessel.
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