초록 ▼

Sorting/storage device for wafers. A sorting device is provided in which at least two cassettes containing wafers may be present and the wafers are moved from one cassette to the other cassette or vice versa. If appropriate, a measuring station may be present in the sorting device. In the immediate

Sorting/storage device for wafers. A sorting device is provided in which at least two cassettes containing wafers may be present and the wafers are moved from one cassette to the other cassette or vice versa. If appropriate, a measuring station may be present in the sorting device. In the immediate vicinity of the sorting device, the cassettes are stored in a magazine which is designed for this purpose and the cassettes are moved using a handling device for cassettes.

대표청구항 ▼

What is claimed is: 1. A device for sorting wafers stored in cassettes comprising: a housing; a wafer handling device arranged in a chamber configured to be sealed off with respect to the housing, wherein the wafer-handling device accesses a measuring station configured to carry out measurements di

What is claimed is: 1. A device for sorting wafers stored in cassettes comprising: a housing; a wafer handling device arranged in a chamber configured to be sealed off with respect to the housing, wherein the wafer-handling device accesses a measuring station configured to carry out measurements directly on said wafers; a part for receiving at least two closable cassettes arranged in the housing and separated from said chamber by a partition, said part configured to independently position each received cassette against a related closable opening in said partition, wherein through opening of said closable opening said closable cassette is opened when placed against the opening and placed in communication with said chamber so that said wafer handling device can sort wafers by moving the wafers into and out from one cassette and into an other cassette after opening each of said at least two cassettes; a store for closable cassettes arranged in the housing; and a handling device for closable cassettes arranged in the housing, wherein the store for closable cassettes and the handling device for closable cassettes are separated from the part for receiving at least two cassettes, wherein the part for receiving at least two cassettes comprises a turntable, wherein said turntable comprises two or more levels which are independently rotatable, wherein the turntable is configured to receive one of the at least two cassettes on each of the two or more levels, wherein said turntable is configured to place each of the at least two cassettes in a position against a related closeable opening. 2. The device of claim 1, wherein the device is configured for sorting wafers stored in FOUPs. 3. The device of claim 1, wherein the store for cassettes comprises a rotatable magazine. 4. A method for assembling a batch of wafers in cassettes comprising the steps of: placing at least a first and a second closed cassette in a store; employing a cassette handling device to select and move a first cassette from the store to a first closable opening in a sealed chamber; opening said first closable opening together with said first cassette; employing a cassette handling device to select and move a second cassette from the store to a second closable opening in said sealed chamber; opening said second closable opening together with said second cassette; performing a direct measurement of said wafers in a measuring station; and employing a wafer-handling device, provided in said sealed chamber, to transfer wafers to and from the measuring station communicating with said sealed chamber and to sort the wafers by transferring wafers directly between the first cassette and the second cassette, wherein employing the cassette handling device to select and move the first cassette comprises: moving the first cassette from the store to a recess on a first level of a turntable; and rotating the first level of the turntable so as to move the first cassette to the first closable opening; and wherein employing the cassette handling device to select and move the second cassette comprises: moving the second cassette from the store to a recess on a second level of the turntable; and rotating the second level of the turntable independently of the first level so as to move the second cassette to the second closable opening. 5. The method of claim 4, further comprising the step of testing the wafers during sorting the wafers.