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Electrostatic actuator for microelectromechanical systems and methods of fabrication

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H02N-001/00
  • G02B-026/10
  • G02B-026/08
출원번호 US-0766720 (2004-01-27)
발명자 / 주소
  • Adams,Scott
  • Davis,Tim
  • Miller,Scott
  • Shaw,Kevin
  • Chong,John Matthew
  • Lee,Seung (Chris) Bok
출원인 / 주소
  • Calient Networks, Inc.
대리인 / 주소
    Blakely, Sokoloff, Taylor &
인용정보 피인용 횟수 : 15  인용 특허 : 138

초록

A method and apparatus are described that may be used to provide decoupled rotation of structures about different pivot points. The apparatus may include one or more fixed blades mounted to a frame or substrate, one or more movable blades mounted to each structure to be moved, and flexures on which

대표청구항

What is claimed is: 1. An apparatus, comprising: a central stage; a movable frame disposed around the central stage; and a fixed frame disposed around the movable frame, the central stage coupled to the movable frame with a first flexure and a second flexure, the movable frame coupled to the fixed

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  2. Adams,Scott; Davis,Tim; Miller,Scott; Shaw,Kevin; Chong,John Matthew; Lee,Seung Bok (Chris), Electrostatic actuator for microelectromechanical systems and methods of fabrication.
  3. Moidu, Abdul Jaleel K., Electrostatic comb actuator.
  4. Wu, Lei; Xie, Huikai, Electrothermal microactuator for large vertical displacement without tilt or lateral shift.
  5. Bibl, Andreas; Higginson, John A., Forming piezoelectric actuators.
  6. Bibl,Andreas; Higginson,John A., Forming piezoelectric actuators.
  7. Bibl,Andreas; Higginson,John A.; Menzel,Christoph; Hoisington,Paul A., Forming piezoelectric actuators.
  8. Wood,Frederick F.; Yavid,Dmitriy, Inertial drive scanning arrangement and method.
  9. Patel, Satyadev R.; Huibers, Andrew G.; Chiang, Steve S., Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates.
  10. Weir, Michael P.; Dunki-Jacobs, Robert J., Micro-electromechanical device.
  11. Prandi, Luciano; Caminada, Carlo; Lasalandra, Ernesto, Microelectromechanical gyroscope with suppression of capacitive coupling spurious signals and control method.
  12. Gutierrez, Roman C.; Calvet, Robert J.; Jain, Ankur; Liu, Xiaolei; Wang, Guiqin, Motion controlled actuator.
  13. Bibl, Andreas; Higginson, John A., Piezoelectric actuators.
  14. Booth, Jr., Roger A.; Cheng, Kangguo; Todi, Ravi M.; Wang, Geng, Three dimensional integrated deep trench decoupling capacitors.
  15. Booth, Jr., Roger A.; Cheng, Kangguo; Todi, Ravi M.; Wang, Geng, Three dimensional integrated deep trench decoupling capacitors.
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