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Extractor/buffer 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65G-065/02
  • B65G-065/00
출원번호 US-0727353 (2003-12-03)
발명자 / 주소
  • Fosnight,William John
  • Bufano,Michael
  • Friedman,Gerald
  • Sullivan,Robert
출원인 / 주소
  • Brooks Automation, Inc.
대리인 / 주소
    Weingarten, Schurgin, Gagnebin &
인용정보 피인용 횟수 : 15  인용 특허 : 47

초록

An automated material handling system that includes an extractor/buffer apparatus capable of simultaneously accessing multiple Work-In-Process (WIP) parts, thereby providing a highly efficient interface between WIP storage locations and transport equipment. The extractor/buffer apparatus includes mu

대표청구항

What is claimed is: 1. A material unit transfer apparatus for moving plurality of material units between transport equipment and plurality of material unit storage locations, for use in an automated material handling system, the apparatus comprising: a first substantially planar platform configured

이 특허에 인용된 특허 (47)

  1. Prentakis Antonios E. (Cambridge MA), Apparatus and method for loading and unloading wafers.
  2. Friedman Daniel J., Apparatus for carrying semiconductor devices.
  3. Perlov Ilya ; Gantvarg Eugene, Apparatus for moving a cassette.
  4. Brown Paul D., Article transfer methods.
  5. Conboy Michael R. ; Ryan Patrick J. ; Coss ; Jr. Elfido, Automated material handling system method and arrangement.
  6. Michael R. Conboy ; Patrick J. Ryan ; Elfido Coss, Jr., Automated material handling system method and arrangement.
  7. Nakane Hisashi (Kawasaki JPX) Uehara Akira (Yokohama JPX) Miyazaki Shigekazu (Sagamihara JPX) Kiyota Hiroyuki (Hiratsuka JPX) Hijikata Isamu (Tokyo JPX), Automatic apparatus for continuous treatment of leaf materials with gas plasma.
  8. Iwasaki Junji,JPX ; Katsube Junichi,JPX ; Itami Yasushi,JPX, Automatic carrier control method in semiconductor wafer cassette transportation apparatus.
  9. Fazio Rosario (Perth Amboy NJ) Frank James L. (Grand Haven MI), Bi-directional transfer mechanism.
  10. Southworth Peter R. (Mission Viejo CA) Baxter Gregory R. (Orange CA), Conveyor system.
  11. Lehrieder, Erwin Paul Josef; R?sch, Andreas Bruno, Device for conveying a supply roll.
  12. Bachrach Robert Z., Factory automation apparatus and method for handling, moving and storing semiconductor wafer carriers.
  13. Asakawa Teruo (Yamanashi JPX) Ohsawa Tetsu (Kofu JPX), Handling apparatus for transferring carriers and a method of transferring carriers.
  14. Goetzke, Michael, Installation for processing wafers.
  15. Fosnight William J., Integrated intrabay buffer, delivery, and stocker system.
  16. Shepherd Philip B. (Sedalia CO) Dolin Rick L. (Littleton CO), Lightweight building material board.
  17. Tau Lok L. ; Conboy Michael R. ; Jackson Thomas P., Material movement server.
  18. Christopher Hofmeister ; Glenn L Sindledecker, Material transport system.
  19. Hainsworth Thomas E. (Holland MI), Materials handling system.
  20. Gary Ettinger ; Greg Wiese ; Arulkumar Shanmugasundrum, Method and apparatus for transferring semiconductor substrates using an input module.
  21. Wooding Michael J. (Sunnyvale CA) Cardema Rudolfo S. (San Jose CA) Ramiller Charles L. (Santa Clara CA), Method and system for loading wafers.
  22. Goerigk Peter,DEX, Method and system of managing wafers in a semiconductor device production facility.
  23. Elger, Jurgen, Plant for processing wafers.
  24. Matsumoto Takashi (Ise JPX) Tanaka Shigeru (Ise JPX) Shinya Tsutomu (Ise JPX) Iwasawa Yoshiyuki (Tokyo JPX) Ishida Tsutomu (Tokyo JPX) Harada Hiroshi (Tokyo JPX) Kobayashi Shintaro (Tokyo JPX) Okamot, Railway carrier apparatus for semiconductor wafers.
  25. Greenlee, III, Fred S., Right angle transfer conveyor system and a method for transferring articles at a right angle.
  26. Iwasaki Junji,JPX ; Katsube Junichi,JPX ; Itami Yasushi,JPX, Semiconductor wafer cassette transportation apparatus and stocker used therein.
  27. Davis Cecil J. (Greenville TX) Matthews Robert (Plano TX) Hildenbrand Randall C. (Richardson TX), Semiconductor wafer transfer method and arm mechanism.
  28. Southworth, Peter R.; Baxter, Gregory R., Semiconductor wafer transport system.
  29. Wiesler Mordechai (Lexington MA) Weiss Mitchell (Haverford PA), Straight line wafer transfer system.
  30. Hofmeister Christopher A., Substrate transport apparatus.
  31. Tabrizi Farzad ; Kitazumi Barry ; Barker David A. ; Setton David A. ; Niewmierzycki Leszek ; Kuhlman Michael J., Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber.
  32. Stonestreet Paul (Cowfold GB2) Allum Clive (Crawley GB2) Webber Bert (Crawley GB2) Cooke Richard (West Worthing GB2) Robinson Frederick J. L. (Crawley GB2) Wauk ; II Michael T. (Haywards Heath GB2), Systems and methods for wafer handling in semiconductor process equipment.
  33. Gunti Rolf (Laufen CHX), Transfer conveyor for piece goods conveyors.
  34. Gunti Rolf (Laufen CHX), Transfer conveyor for the transfer of piece goods from a first roller track conveyor to a second roller track conveyor.
  35. Elliott David J. (147 Rice Rd. Wayland MA 01778), Transport containers for semiconductor wafers.
  36. Kawano Hitoshi,JPX ; Murata Masanao,JPX ; Tsuyoshi Tanaka,JPX ; Okuno Atsushi,JPX, Transport system.
  37. Bonora Anthony C. ; Gould Richard H., Transport system with integrated transport carrier and directors.
  38. Goodwin Dennis L. (Tempe AZ) Crabb Richard (Mesa AZ) Robinson McDonald (Paradise Valley AZ) Ferro Armand P. (Scottsdale AZ), Wafer handling system with bernoulli pick-up.
  39. Flint Alan G. (Los Gatos CA) Jacobs William G. (San Jose CA), Wafer loading apparatus.
  40. Zhang John Weiguo ; Anderson H. Alexander, Wafer shuttle system.
  41. Szasz Peter R. (Menlo Park CA) Schulte Harvey L. (Los Altos CA), Wafer transfer apparatus.
  42. Coad George L. (Lafayette CA) Shaw R. Howard (Palo Alto CA) Hutchinson Martin A. (Santa Clara CA), Wafer transfer system.
  43. Wiesler Mordechai (Lexington MA) Weiss Mitchell (Haverford PA), Wafer transfer system having rotational capability.
  44. Wiesler Mordechai ; Weiss Mitchell, Wafer transfer system having vertical lifting capability.
  45. Miller Kenneth C. (280 Easy St. ; #117 Mountain View CA 94043), Wafer transport device.
  46. Perlov Ilya ; Gantvarg Eugene, Washing transfer station in a system for chemical mechanical polishing.
  47. Hirata, Yasunari; Hirakawa, Takenori; Yamamoto, Akemichi, Work conveying system.

이 특허를 인용한 특허 (15)

  1. Rebstock, Lutz, Automatic handling buffer for bare stocker.
  2. Yamamoto, Makoto; Hoshino, Kenji, Carriage system.
  3. Kaveh, Farrokh, Equipment front end module.
  4. Safir, André, Method and installation for automatic processing of baggage.
  5. Aalund, Martin P.; Appelbaum, Ami, Quick swap load port.
  6. Bufano, Michael L.; Gilchrist, Ulysses; Fosnight, William; Hofmeister, Christopher; Babbs, Daniel; May, Robert C., Reduced capacity carrier, transport, load port, buffer system.
  7. Bufano, Michael L.; Gilchrist, Ulysses; Fosnight, William; Hofmeister, Christopher; Babbs, Daniel; May, Robert C., Reduced capacity carrier, transport, load port, buffer system.
  8. Bufano, Michael L.; Gilchrist, Ulysses; Fosnight, William; Hofmeister, Christopher; Babbs, Daniel; May, Robert C., Reduced capacity carrier, transport, load port, buffer system.
  9. Bufano, Michael L.; Gilchrist, Ulysses; Fosnight, William; Hofmeister, Christopher; Babbs, Daniel; May, Robert C., Reduced capacity carrier, transport, load port, buffer system.
  10. Bufano, Michael L.; Gilchrist, Ulysses; Fosnight, William; Hofmeister, Christopher; Babbs, Daniel; May, Robert C., Reduced capacity carrier, transport, load port, buffer system.
  11. Lee, Hyun-Woo; Son, Chang-Woo; Ahn, Yong-Jun; Jeon, Tai-Jo, Semiconductor wafer stocker apparatus and wafer transferring methods using the same.
  12. Sonon, James A.; Myers, Alex W.; Van Hoagland, Gary, Storage system having a dynamic support of moving elements and a pusher assembly carried by a frame.
  13. Sahoda, Tsutomu; Shimai, Futoshi; Sato, Akihiko, Substrate processing system, carrying device and coating device.
  14. Sahoda, Tsutomu; Shimai, Futoshi; Sato, Akihiko, Substrate processing system, carrying device, and coating device.
  15. Bell, Steven G., System and method for handling stocked items.
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