초록 ▼

A thermal mass flow sensor is disclosed that includes a housing (16) having a first sensor region and a second sensor region, a first thin film temperature sensor (39) formed at the first sensor region and a second thin film temperature sensor (58) formed at the second sensor region. A heating eleme

A thermal mass flow sensor is disclosed that includes a housing (16) having a first sensor region and a second sensor region, a first thin film temperature sensor (39) formed at the first sensor region and a second thin film temperature sensor (58) formed at the second sensor region. A heating element (40) is arranged to heat the first temperature sensor (39) and a controller (46) is operably connected to the first temperature sensor (39), the second temperature sensor (58) and the heating element (40), and controls a power level to the heating element (40) to maintaining a temperature difference between the first temperature sensor (39) and the second temperature sensor (58). A thin film temperature sensor and a method of using the thermal mass flow sensor are also disclosed.

대표청구항 ▼

The invention claimed is: 1. A thermal mass flow sensor comprising: a housing comprising a first sensor region and a second sensor region; a first thin film temperature sensor is formed at said first sensor region; a second thin film temperature sensor formed at said second sensor region and mounte

The invention claimed is: 1. A thermal mass flow sensor comprising: a housing comprising a first sensor region and a second sensor region; a first thin film temperature sensor is formed at said first sensor region; a second thin film temperature sensor formed at said second sensor region and mounted at a first angle to said first thin film temperature sensor; a heating element arranged to heat said first temperature sensor; and a controller operably connected to said first temperature sensor, said second temperature sensor and said heating element, said controller controlling a power level to said heating element to maintain a temperature difference between said first temperature sensor and said second temperature sensor, wherein said first angle is from about 12 degrees to 70 degrees. 2. The sensor of claim 1 wherein said controller determines an airflow in a passageway from the power level. 3. The sensor of claim 1 wherein said first temperature sensor comprises a first RTD. 4. The sensor of claim 3 wherein said first temperature sensor comprises a periphery and said heating element comprises a strip disposed along said periphery. 5. The sensor of claim 4 wherein said strip at least partially surrounds said first RTD. 6. The sensor of claim 3 wherein said first temperature sensor is thermally insulated from said housing. 7. The sensor of claim 3 wherein said first temperature sensor is electrically insulated from said housing. 8. The sensor of claim 1 wherein said heating element is planar. 9. The sensor of claim 1 wherein said first angle is from about 20 to 40 degrees. 10. The sensor of claim 1 wherein said first angle is about 30 degrees. 11. The sensor of claim 1 further comprising a substrate, wherein said first temperature sensor comprises a first thin film deposited on said substrate and said heating element comprises a second thin film deposited on said substrate. 12. A thermal mass flow sensor comprising: a housing comprising a first sensor region and a second sensor region; a first thin film temperature sensor comprising an RTD formed at said first sensor region; a second thin film temperature sensor formed at said second sensor region; a heating element arranged to heat said first temperature sensor; a controller operably connected to said first temperature sensor, said second temperature sensor and said heating element, said controller controlling a power level to said heating element to maintain a temperature difference between said first temperature sensor and said second temperature sensor; and a mast connected to said housing and a mounting plate connected to said mast. 13. A thermal mass flow sensor comprising: a housing comprising a first sensor region and a second sensor region; a first thin film temperature sensor comprising an RTD formed at said first sensor region; a second thin film temperature sensor formed at said second sensor region; a heating element arranged to heat said first temperature sensor; a controller operably connected to said first temperature sensor, said second temperature sensor and said heating element said controller controlling a power level to said heating element to maintain a temperature difference between said first temperature sensor and said second temperature sensor; and a thermal choke between said first temperature sensor and said housing. 14. A flow sensing element for use in a thermal mass flow sensor comprising: a substrate; a planar RTD supported by said substrate and having a periphery; and a planar heating element comprising a strip of resistive material surrounding said RTD. 15. The flow sensing element of claim 14 wherein said planar RTD comprises a thin film RTD. 16. The flow sensing element of claim 15 wherein said planar heating element comprises a thin film heating element. 17. A method of measuring mass flow comprising the steps of: providing a first planar temperature sensor and a second planar temperature sensor; mounting a planar heating element along the first planar temperature sensor; mounting the first planar temperature sensor in a mass flow passageway defining a mass flow direction at a first angle to the mass flow direction; mounting the second planar temperature sensor in the mass flow passageway at a second angle to the mass flow direction such that said first sensor is not parallel to said second sensor; maintaining a predetermined temperature difference between the first temperature sensor and the second temperature sensor; and determining a mass flow from an amount of power required to maintain the predetermined temperature difference. 18. The method of claim 17 wherein the first angle is equal to the second angle. 19. The method of claim 17 wherein said step of mounting the first and second planar temperature sensors in a mass flow passageway comprises the step of mounting the first and second planar temperature sensors at an angle of about 6 to 35 degrees to the mass flow direction. 20. The method of claim 17 wherein said step of mounting the first and second planar temperature sensors in a mass flow passageway comprises the step of mounting the first and second planar temperature sensors at an angle of about 10 to 20 degrees to the mass flow direction. 21. The method of claim 17 wherein said step of mounting the first and second planar temperature sensors in a mass flow passageway comprises the step of mounting the first and second planar temperature sensors at an angle of about 15 degrees to the mass flow direction. 22. The method of claim 17 wherein said step of mounting the first and second planar temperature sensors in a mass flow passageway comprises the steps of providing a housing, mounting the first and second planar temperature sensors on the housing and mounting the housing in the mass flow passageway. 23. The method of claim 22 including the additional step of providing a thermal choke between the first and second planar temperature sensors. 24. The method of claim 17 wherein said step of maintaining a predetermined temperature difference between the first temperature sensor and the second temperature sensor comprises the steps of sensing a temperature of the first RTD; sensing a temperature of the second RTD; and applying heat near the periphery of the first RTD to maintain the predetermined temperature difference. 25. A thermal mass flow sensor comprising: a housing comprising a first support region and a second support region; a first substrate at the first support region and a second substrate at the second support region, said first substrate being mounted at an angle of about 12 to 70 degrees to said second substrate; a first planar temperature sensor formed on said first substrate; a second planar temperature sensor formed on said second substrate; a heating element arranged to heat said first temperature sensor; and a controller operably connected to said first temperature sensor, said second temperature sensor and said heating element, said controller controlling a power level to said heating element to maintain a temperature difference between said first temperature sensor and said second temperature sensor. 26. The sensor of claim 25 wherein said first support region comprises a first recess. 27. The sensor of claim 25 wherein said first substrate is mounted at an angle of about 20 to 40 degrees to said second substrate. 28. The sensor of claim 25 wherein said first substrate is mounted at an angle of about 30 degrees to said second substrate. 29. A method of measuring mass flow comprising the steps of: providing a first thin film RTD and a second thin film RTD; forming a thin film heating element around the first thin film RTD; mounting the first thin film RTD in a mass flow passageway defining a mass flow direction at a first angle to the mass flow direction; mounting the second thin film RTD in the mass flow passageway at a second angle to the mass flow direction; maintaining a predetermined temperature difference between the first RTD and second RTD; and determining a mass flow from an amount of power required to maintain the predetermined temperature difference. 30. The method of claim 29 wherein said step of mounting the second thin film RTD comprises the step of mounting the second thin film RTD in the mass flow passageway at a second angle equal to the first angle. 31. The method of claim 30 wherein said step of mounting the first thin film RTD in a mass flow passageway comprises the step of mounting the first RTD at an angle of about 6 to 35 degrees to the mass flow direction. 32. The method of claim 30 wherein said step of mounting the first RTD in a mass flow passageway comprises the step of mounting the first RTD at an angle of about 10 to 20 degrees to the mass flow direction. 33. The method of claim 30 wherein said step of mounting the first RTD in a mass flow passageway comprises the step of mounting the first RTD at an angle of about 15 degrees to the mass flow direction. 34. The method of claim 29 wherein said step of mounting the first thin film RTD in a mass flow passageway comprises the step of mounting the first RTD at an angle of about 6 to 35 degrees to the mass flow direction. 35. The method of claim 29 wherein said step of mounting the first RTD in a mass flow passageway comprises the step of mounting the first RTD at an angle of about 10 to 20 degrees to the mass flow direction. 36. The method of claim 29 wherein said step of mounting the first RTD in a mass flow passageway comprises the step of mounting the first RTD at an angle of about 15 degrees to the mass flow direction.