In a disclosed laser module, a usage amount of organic adhesive is set to no more than 1.0 g/ml. Thus, an equilibrium density of outgas components from the adhesive after an air removal treatment is less than 1000 ppm. In another laser module, a heat sink at which a semiconductor laser element is ad
In a disclosed laser module, a usage amount of organic adhesive is set to no more than 1.0 g/ml. Thus, an equilibrium density of outgas components from the adhesive after an air removal treatment is less than 1000 ppm. In another laser module, a heat sink at which a semiconductor laser element is adhered on a submount, an electrode terminal wire-connected with the laser element, a photodiode wire-connected with the electrode terminal, and a zeolite adsorbent are fixedly provided on a stem. These are ring-welded in a container in a dry air atmosphere (80% nitrogen, 20% oxygen). In still another laser module, sixteen multiplexed lasers are disposed in a container. The container is connected with an air circulation apparatus, which is provided with a filter for removing contaminants, a rotary pump for circulating inert gas, and a valve for controlling replenishment of the gas.
대표청구항▼
What is claimed is: 1. A laser module comprising: a semiconductor laser which emits laser light in a wavelength range of 350 to 450 nm; and a hermetic sealing member which forms a sealed space thereinside, the sealed space being charged with a sealed atmosphere in which density of an organic gas co
What is claimed is: 1. A laser module comprising: a semiconductor laser which emits laser light in a wavelength range of 350 to 450 nm; and a hermetic sealing member which forms a sealed space thereinside, the sealed space being charged with a sealed atmosphere in which density of an organic gas component generated from solid organic matter is less than 1000 ppm, and the semiconductor laser being hermetically sealed in the space. 2. The laser module of claim 1 further comprising: a hermetic container for accommodating the sealed space therein, and a material capable of adsorbing gas, the material being disposed in the hermetic container. 3. The laser module of claim 1, wherein an inclusion amount prior to hermetic sealing of the solid organic matter in the sealed atmosphere has been set to not more than 1 g/ml. 4. The laser module of claim 3, wherein the organic gas component generated from the solid organic matter comprises a molecular weight of at least 70 and a boiling point of at least 70째 C. 5. The laser module of claim 4, wherein the organic gas component generated from the solid organic matter comprises a compound which includes at least one of a silicon atom, a phosphorus atom and a sulfur atom. 6. The laser module of claim 5, wherein the sealed atmosphere comprises inactive gas including oxygen at a density of not less than 1 ppm and not more than 100 ppm. 7. A laser module comprising: (a) a multiplex laser including a plurality of semiconductor lasers which emit laser light in a wavelength range of 350 to 450 nm, one optical fiber, and a condensing optical system which condenses laser beams respectively emitted from the plurality of semiconductor lasers and focuses the laser beams at the optical fiber; and (b) a hermetic sealing member which forms a sealed space thereinside, the sealed space being charged with a sealed atmosphere in which density of an organic gas component generated from solid organic matter is less than 1000 ppm, and the semiconductor lasers, a focusing side portion of the optical fiber and the condensing optical system being hermetically sealed in the space. 8. The laser module of claim 7 further comprising: a hermetic container for accommodating the sealed space therein, and a material capable of adsorbing gas, the material being disposed in the hermetic container. 9. The laser module of claim 7, wherein an inclusion amount prior to hermetic sealing of the solid organic matter in the sealed atmosphere has been set to not more than 1 g/ml. 10. The laser module of claim 9, wherein the organic gas component generated from the solid organic matter comprises a molecular weight of at least 70 and a boiling point of at least 70째 C. 11. The laser module of claim 10, wherein the organic gas component generated from the solid organic matter comprises a compound which includes at least one of a silicon atom, a phosphorus atom and a sulfur atom. 12. The laser module of claim 11, wherein the sealed atmosphere comprises inactive gas including oxygen at a density of not less than 1 ppm and not more than 100 ppm. 13. A process for producing a laser module comprising the steps of: accommodating a semiconductor laser which emits laser light in a wavelength range of 350 to 450 nm in a sealed space inside a hermetic sealing member; setting an inclusion amount of solid organic matter in a volume to be sealed to be not more than 1 g/ml; air removal processing the space until density of an organic gas component generated from the solid organic matter is less than 1000 ppm; and after the air removal processing, hermetically sealing the semiconductor laser in the space.
Bartholomew Roger F. (Painted Post NY) Jakobson Paul A. (Corning NY) Hall Douglas W. (Corning NY) Sharps Julia A. (Corning NY), Packaging of high power semiconductor lasers.
Sukhman, Yefim P.; Risser, Christian J.; Schuknecht, Nathan H.; Rabideau, James W.; Hillman, Joseph T., Recirculating filtration systems for material processing systems and associated methods of use and manufacture.
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