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Semiconductor workpiece processing methods, a method of preparing semiconductor workpiece process fluid, and a method of delivering semiconductor workpiece process fluid to a semiconductor processor

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B24B-049/00
  • B24B-051/00
  • B24B-001/00
출원번호 US-0814260 (2001-03-21)
발명자 / 주소
  • Moore,Scott E.
  • Meikle,Scott G.
  • Crum,Magdel
출원인 / 주소
  • Micron Technology, Inc.
대리인 / 주소
    Wells St. John, P.S.
인용정보 피인용 횟수 : 5  인용 특허 : 46

초록

Semiconductor processor systems, systems configured to provide a semiconductor workpiece process fluid, semiconductor workpiece processing methods, methods of preparing semiconductor workpiece process fluid, and methods of delivering semiconductor workpiece process fluid to a semiconductor processor

대표청구항

The invention claimed is: 1. A semiconductor workpiece processing method comprising: providing a semiconductor processor system having a process chamber adapted to process a semiconductor workpiece; processing the semiconductor workpiece within the process chamber using a process fluid; monitoring

이 특허에 인용된 특허 (46)

  1. Bach David T. (Wilmington DE) Robertson ; Jr. Charles W. (Rockland DE), Absorbance, turbidimetric, fluorescence and nephelometric photometer.
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  8. Yang Ming-Sheng,TWX ; Chen Hsueh-Chung,TWX ; Lin Tsang-Jung,TWX ; Wu Juan-Yuan,TWX, Chemical-mechanical polishing station with end-point monitoring device.
  9. Russ Richard D. ; Thomas Daniel, Chemical-mechanical-polishing system with continuous filtration.
  10. Karl M. Robinson ; Whonchee Lee, Composition and method of formation and use therefor in chemical-mechanical polishing.
  11. Tsai Pei-Wei,TWX ; Tseng Huan-Jen,TWX ; Chang Chih-Hsien,TWX ; Chin Yi-Hua,TWX, Control device for maintaining a chemical mechanical polishing machine in a wet mode.
  12. Mian Alec ; Kieffer-Higgins Stephen G. ; Corey George D., Devices and methods for using centripetal acceleration to drive fluid movement in a microfluidics system.
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  20. Ackerson Bruce J., Method and apparatus for fiber optic multiple scattering suppression.
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  25. Obeng Yaw Samuel, Method of forming planarized layers in an integrated circuit.
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  32. Moore Scott E. ; Meikle Scott G. ; Crum Magdel, Semiconductor processors, sensors, and semiconductor processing systems.
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  36. Adams John A. (Escondido CA) Krulik Gerald A. (San Clemente CA) Harwood C. Randall (Tempe AZ), Slurry recycling in CMP apparatus.
  37. Yueh William, Slurry recycling system for chemical-mechanical polishing apparatus.
  38. Goldberg Marvin C. (Englewood CO) Cunningham Kirk M. (Lakewood CO), Suspended sediment sensor.
  39. Bannerjee Ashim K. ; Stream Robert D., System for verifying the calibration of a turbidimeter.
  40. Kushner Jack (Lindenhurst NY) Zwirblis Henry G. (Nesconset NY), Turbidimeter.
  41. Banerjee Ashim K., Turbidimeter array system.
  42. King Karl L. (Brown Deer WI) Weiss Bruce W. (Whitefish Bay WI) Endl Robert W. (Johnson Creek WI), Turbidimeter having a baffle assembly for removing entrained gas.
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  46. Maeda Susumu (Wako JPX) Mutoh Eiji (Wako JPX) Kubota Shinichi (Wako JPX), Vehicle anti-theft system.

이 특허를 인용한 특허 (5)

  1. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; DiMeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
  2. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; Dimeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
  3. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; Dimeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
  4. McManus, James V.; Dietz, James; Lurcott, Steven M., Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
  5. Liu, Hsu-Shui; Pai, Jiun-Rong; Wang, Yeh-Chieh, Method and apparatus for wireless transmission of diagnostic information.
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