초록 ▼

Frequency-scanning interferometry is applied to common-path interferometers for measuring topographical features of test objects. A reference element located adjacent to a test object functions as both a beamsplitter and a reference surface. A first portion of a measuring beam reflects from the refe

Frequency-scanning interferometry is applied to common-path interferometers for measuring topographical features of test objects. A reference element located adjacent to a test object functions as both a beamsplitter and a reference surface. A first portion of a measuring beam reflects from the reference surface of the reference element as a reference beam, and a second portion of the measuring beam transmits through the reference element to and from a surface of the test object as an object beam. Both beams are conveyed along a common path to a detector that records a plurality of intensity variations produced by constructive and destructive interference between localized portions of the object and reference beams associated with different transverse coordinates on the test object surface. An illumination frequency of the measuring beam is incrementally modified through a range of different frequencies sufficient to alternate the intensity variations between conditions of constructive and destructive interference, which occur at modulation frequencies sensitive to path length differences between corresponding points on the surfaces of the test object and reference element.

대표청구항 ▼

I claim: 1. A frequency-scanning interferometric measuring system for measuring topographical features of a test object comprising: a directional system for routing a measuring beam along a measurement path toward the test object; a reference element positioned along the measurement path adjacent t

I claim: 1. A frequency-scanning interferometric measuring system for measuring topographical features of a test object comprising: a directional system for routing a measuring beam along a measurement path toward the test object; a reference element positioned along the measurement path adjacent to the test object in a fixed position with respect to the test object for distinguishing a reference beam portion of the measuring beam that acquires information concerning a surface of the reference element from an object beam portion of the measuring beam that acquires information concerning a diffuse surface of the test object; the directional system also providing for routing the information-laden object and reference beams along a common path toward a detector; the detector providing for detecting combined intensity variations of the information-laden object and reference beams as a comparison between the surfaces of the test object and the reference element; an imager that images interference patterns between the information-laden object and reference beams, wherein the information patterns are apparent as speckle patterns based at least in part on variations of the diffuse test object surface that exceed fringe intervals of the interference patterns; a frequency modifier that varies an effective frequency content of the object and reference beams detected by the detector; a processor that converts detected intensity variations induced by variations in the effective frequency content of the information-laden object and reference beams into measures of path length differences between the object and reference beams for measuring topographical features of the test object surface with respect to the reference element surface; and the processor being arranged for extracting from the effective frequency content of the information-laden object and reference beams relative modulation frequency measurements that distinguish profile variations between different transverse coordinates of the test object surface. 2. The system of claim 1 further comprising a radiation source, and the frequency modifier provides for tuning the radiation source for varying the frequency content of the measuring beam. 3. The system of claim 1 in which both the measurement path toward the test object and the common path toward the detector overlap in opposite directions between the directional system and the reference element surface. 4. The system of claim 1 in which the reference element surface participates in mounting the test object at a fixed spacing between the test object and reference element surfaces. 5. The system of claim 1 in which the detector includes a detector array of individual detectors for separately measuring intensity variations associated with different locations of the test object surface, and the intensity variations of the individual detectors provide measures of surface profile features at the different locations independently of the intensity variations of adjacent individual detectors. 6. The system of claim 5 further comprising an imaging system for imaging both the test object surface and the reference element surface onto the detector array using the information-laden object and reference beams. 7. A frequency-scanning method of measuring topographical features of a test object comprising the steps of: mounting a test object in a fixed position adjacent to a reference element of an interferometer; propagating a measuring beam through the interferometer toward the reference element and the test object; distinguishing a reference beam portion of the measuring beam that acquires information from a surface of the reference element from an object beam portion of the measuring beam that acquires information from a diffuse surface of the test object; detecting combined intensity variations of the information-laden object and reference beams as a comparison between the surfaces of the test object and the reference element in the form of an interference pattern apparent as a speckle pattern based at least in part on variations of the diffuse test object surface that exceed fringe intervals of the interference pattern; varying an effective frequency content of the object and reference beams received at the detector; and convening detected intensity variations induced by variations in the effective frequency content of the information-laden object and reference beams into measures of path length differences between the object and reference beams for measuring topographical features of the test object surface with respect to the reference element surface, wherein the step of converting includes extracting from the effective frequency content of the information-laden object and reference beams relative modulation frequency measurements that distinguish profile variations between different transverse coordinates of the test object surface. 8. The method of claim 7 in which the step of distinguishing includes reflecting the reference beam from the reference element surface and reflecting the object beam from the test object surface. 9. The method of claim 8 comprising a further step of propagating the reflected reference beam and the reflected object beam along a common path to the detector. 10. The method of claim 7 in which the step of varying an effective frequency includes varying the effective frequency by increments that produce detected intensity variations that can be fit by sinusoidal curves having transform frequencies that vary as a function of path length differences between the reference beam and the object beam. 11. The method of claim 10 in which a resolution of the locations of the surface features is dependent upon a nominal frequency of the object and reference beams, and a resolution of the measures of the topographical features is independent of the nominal frequency of the object and reference beams. 12. The method of claim 7 in which the step of detecting includes separately measuring detected intensity variations associated with different locations of the test object surface. 13. The method of claim 12 in which the step of converting includes converting the detected intensity variations associated with the different locations of the test object surface to provide measures of surface features at the different locations independently of the intensity variations of adjacent locations of the test object surface. 14. A Fizeau interferometer for measuring profile variations of a test object using frequency scanning comprising: a radiation source for producing a measuring beam; a reference element having a reference surface that reflects a first portion of the measuring beam as a reference beam and that transmits a second portion of the measuring beam as an object beam to and from a diffuse surface of the test object; a detection system that detects a plurality of intensity variations produced by constructive and destructive interference between localized portions of the object and reference beams traceable to different transverse coordinates on the diffuse test object surface in the form of an interference pattern apparent as a speckle pattern based at least in part on variations of the diffuse test object surface that exceed fringe intervals of the interference pattern; a pathway that conveys the measuring beam to the reference element surface and including a common pathway that conveys both the object beam as returned from the test object surface and the reference beam as returned from the reference element surface to the detection system; a frequency modifier that modifies an effective frequency of the measuring beam producing an alternation of the intensity variations between conditions of constructive and destructive interference at modulation frequencies corresponding to path length variations between the test object surface and the reference element surface at the different transverse coordinates of the test object surface; and a processor that identifies the modulation frequencies from the alternating intensity variations for referencing the path length variations between the test object surface and the reference element surface as relative measures of profile variations of the test object surface at the different transverse coordinates of the test object surface. 15. The interferometer of claim 14 in which the frequency modifier includes a frequency tuner for the radiation source for varying: a frequency of the measuring beam. 16. The interferometer of claim 14 in which the frequency modifier modifies the effective frequency of the measuring beam by increments that are fine enough to unambiguously distinguish profile variations between the different transverse coordinates of the test object surface having a range of magnitudes of at least ten times a nominal wavelength of the measuring beam. 17. The interferometer of claim 16 in which the frequency modifier modifies the frequency of the measuring beam by increments that are fine enough to unambiguously distinguish profile variations between the different transverse coordinates of the test object surface having a range of magnitudes of at least 100 times the nominal wavelength of the measuring beam. 18. The interferometer of claim 17 in which the frequency modeler modifies the frequency of the measuring beam by increments that are fine enough to unambiguously distinguish profile variations between the different transverse coordinates of the test object surface having a range of magnitudes of at least 1000 times the nominal wavelength of the measuring beam. 19. The interferometer of claim 16 in which the frequency modifier modifies the frequency of the measuring beam throughout a band of frequencies sufficient in breadth to distinguish profile variations between the different transverse coordinates of the test object surface having magnitudes that differ by less than ten times a nominal wavelength of the measuring beam. 20. The interferometer of claim 19 in which the frequency modifier modifies the frequency of the measuring beam throughout a band of frequencies sufficient in breadth to distinguish profile variations between the different transverse coordinates of the test object surface having magnitudes that differ by less than the nominal wavelength of the measuring beam. 21. The interferometer of claim 14 in which the reference element is a window of the interferometer that transmit radiation to the test object surface and that admits radiation reflected from the test object surface. 22. The interferometer of claim 21 in which the reference element surface participates in mounting the test object at a fixed spacing between the test object surface and the reference element surface. 23. The interferometer of claim 14 in which the detection system includes a detector array of individual detectors for separately measuring intensity variations associated with the different transverse coordinates of the test object surface, and the intensity variations of the individual detectors provide measures of surface profile features at the different transverse coordinates independently of the intensity variations of adjacent individual detectors. 24. The interferometer of claim 23 further comprising an imaging system for imaging both the test object surface and the reference element surface onto the detector array using the object and reference beams. 25. A frequency-scanning method of operating a Fizeau interferometer for measuring profile variations of a test object comprising the steps of: illuminating a reference element with a measuring beam; reflecting a first portion of the measuring beam from a surface of a reference element as a reference beam; transmitting a second portion of the measuring beam through the reference element to and from a diffuse reflective surface of the test object as an object beam; conveying the reference beam and the object beam along a common path to a detector; imaging the surfaces of the reference element and the test object onto the detector using the reference and object beams in the form of an interference pattern apparent as a speckle pattern based at least in part on variations of the diffuse test surface that exceed fringe intervals of the interference pattern for relating transverse coordinates of the test object surface to transverse coordinates of the detector; detecting a plurality of intensity variations within the interference patterns produced by constructive and destructive interference between localized portions of the object and reference beams associated with different transverse coordinates on the test object surface; modifying an effective frequency of the measuring beam alternating the intensity variations between conditions of constructive and destructive interference at modulation frequencies sensitive to path length differences between corresponding points on the surfaces of the test object and reference element; and identifying the modulation frequencies from the alternating intensity variations for referencing the path length variations between the test object surface and the reference element surface as relative measures of profile variations of the test object surface at the different transverse coordinates of the test object surface. 26. The method of claim 25 in which the step of imaging includes imaging a succession of the interference patterns between the object and reference beams corresponding to different effective frequencies of the measuring beam, wherein each of the interference patterns is apparent as a speckle pattern representing profile variations with step sizes that exceed fringe intervals of interference patterns. 27. The method of claim 26 in which the step of identifying the modulation frequencies includes separately evaluating the intensity variations associated with the different transverse coordinates of the test object surface to provide measures of surface profile variations at the different transverse coordinates independently of the intensity variations at adjacent transverse coordinates of the test object surface. 28. The method of claim 25 in which the step of modifying the effective frequency includes modifying the effective frequency of the measuring beam by increments that are fine enough to unambiguously distinguish profile variations between the different transverse coordinates of the test object surface having a range of magnitudes of at least ten times a nominal wavelength of the measuring beam. 29. The method of claim 28 in which the step of modifying the effective frequency includes modifying the effective frequency of the measuring beam by increments that are fine enough to unambiguously distinguish profile variations between the different transverse coordinates of the test object surface having a range of magnitudes of at least 100 times the nominal wavelength of the measuring beam. 30. The method of clam 29 in which the step of modifying the effective frequency includes modifying the effective frequency of the measuring beam by increments that are fine enough to unambiguously distinguish profile variations between the different transverse coordinates of the test object surface having a range of magnitudes of at least 1000 times the nominal wavelength of the measuring beam. 31. The method of claim 28 in which the step of modifying the effective frequency includes modifying the frequency of the measuring beam throughout a band of frequencies sufficient in breadth to distinguish profile variations between the different transverse coordinates of the test object surface having magnitudes that differ by less than ten times the nominal wavelength of the measuring beam. 32. The method of claim 31 in which the step of modifying the effective frequency includes modifying the frequency of the measuring beam throughout a band of frequencies sufficient in breadth to distinguish profile variations between the different transverse coordinates of the test object surface having magnitudes that differ by less than the nominal wavelength of the measuring beam.