초록 ▼

A cleanling apparatus for removing contaminants from the surface of a substrate includes two parts: one which produces an aerosol including frozen particles and directs the aerosol onto the surface of the substrate to remove contaminants from the surface by physical force, and another part in which

A cleanling apparatus for removing contaminants from the surface of a substrate includes two parts: one which produces an aerosol including frozen particles and directs the aerosol onto the surface of the substrate to remove contaminants from the surface by physical force, and another part in which a fluid including a gaseous reactant is directed onto the surface of the substrate while the surface is irradiated to cause a chemical reaction between the reactant and organic contaminants on the surface, to chemically removing the organic contaminants. In the method of cleaning the substrate, the physical and chemical cleaning processes are carried out in a separate manner from one another so that the frozen particles of the aerosol are not exposed to the effects of the light used in irradiating the surface of the substrate. Therefore, the effectiveness of the aerosol in cleaning the substrate is maximized.

대표청구항 ▼

What is claimed is: 1. A method of removing contaminants from the surface of a substrate, said method comprising: directing a fluid comprising a reactant, capable of chemically removing contaminants from, the surface of the substrate, onto the surface of the substrate, and irradiating the surface o

What is claimed is: 1. A method of removing contaminants from the surface of a substrate, said method comprising: directing a fluid comprising a reactant, capable of chemically removing contaminants from, the surface of the substrate, onto the surface of the substrate, and irradiating the surface of the substrate with light to supply activation energy that causes a chemical reaction of the reactant with contaminants on the surface of the substrate, thereby chemically cleaning the substrate; and jetting an aerosol comprising frozen gas particles onto the surface of the substrate to dislodge contaminants from the surface of the substrate, thereby physically cleaning the substrate, wherein over the entire course of said irradiating the surface of the substrate and said jetting of the aerosol onto the surface of the substrate, said irradiating and said jetting are carried out in a separate manner that prevents the frozen particles of the aerosol from being evaporated by said light, and wherein said chemical cleaning of the substrate and said physical cleaning of the substrate are performed in a common cleaning chamber, and said irradiating the surface of the substrate with light comprises directing a laser beam onto a region on the surface of the substrate separate from a region on the surface at which the aerosol is directed, whereby the laser beam and the aerosol impinge discrete areas of the substrate. 2. The cleaning method of claim 1, wherein the reactant comprises a gas selected from the group consisting of oxygen and ozone. 3. The cleaning method of claim 1, wherein said jetting an aerosol comprising frozen gas particles comprises freezing gaseous particles of argon, whereupon the frozen argon particles agglomerate, and jetting the frozen agglomerated particles towards the surface of the substrate. 4. The cleaning method of claim 1, wherein said jetting an aerosol comprises spraying the aerosol over a width at least as great as the maximum width of the substrate, and moving the substrate relative to the aerosol until the entire surface of the substrate has been impinged by the aerosol.