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Method of forming mirrors by surface transformation of empty spaces in solid state materials and structures thereon 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01S-003/08
출원번호 US-0855532 (2001-05-16)
발명자 / 주소
  • Geusic,Joseph E.
  • Marsh,Eugene P.
출원인 / 주소
  • Micron Technology, Inc.
대리인 / 주소
    Dickstein Shapiro Morin &
인용정보 피인용 횟수 : 3  인용 특허 : 135

초록

A multi-layered reflective mirror formed of spaced-apart plate-shaped empty space patterns formed within a substrate is disclosed. The plurality of plate-shaped empty space patterns are formed by drilling holes in the substrate and annealing the substrate to form the spaced-apart plate-shaped empty

대표청구항

The invention claimed is: 1. A method of forming a reflective mirror within a substrate, comprising the act of forming a plurality of empty-spaced patterns beneath a surface of and within said substrate, said empty-spaced patterns being sequentially positioned along an optical path of said substrat

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이 특허를 인용한 특허 (3)

  1. Forbes, Leonard; Geusic, Joseph E.; Akram, Salman, Strained semiconductor by full wafer bonding.
  2. Forbes, Leonard; Geusic, Joseph E.; Akram, Salman, Strained semiconductor by full wafer bonding.
  3. Forbes, Leonard; Geusic, Joseph E.; Akram, Salman, Strained semiconductor by full wafer bonding.
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