Method and apparatus for preparing chemical solutions
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G01N-021/00
B01L-003/02
B01L-011/00
G05D-023/00
G05B-021/00
출원번호
US-0619768
(2000-07-19)
우선권정보
JP-11-366734(1999-12-24)
발명자
/ 주소
Fukuizumi,Masataka
Matoba,Toru
Osuda,Hiroshi
출원인 / 주소
Fujitsu Limited
대리인 / 주소
Armstrong, Kratz, Quintos, Hanson &
인용정보
피인용 횟수 :
7인용 특허 :
17
초록▼
A chemical solution preparation apparatus for preparing a chemical solution from chemical gas of an industrial chemical grade. A dissolution unit dissolves the chemical gas in pure water, which is contained in a tank. A gas discharge control unit controls the amount of chemical gas discharged from t
A chemical solution preparation apparatus for preparing a chemical solution from chemical gas of an industrial chemical grade. A dissolution unit dissolves the chemical gas in pure water, which is contained in a tank. A gas discharge control unit controls the amount of chemical gas discharged from the dissolution unit. A liquid discharge discharges a predetermined amount of the chemical solution from the tank. At least one of the gas discharge control unit and the liquid discharge control unit are operated at substantially the same time as the dissolution unit.
대표청구항▼
The invention claimed is: 1. A chemical solution preparation apparatus comprising a chemical solution refinement device, which dissolves a chemical gas into a liquid and prepares a refined chemical solution, wherein the liquid is one of pure water or a mixture having a predetermined composition, th
The invention claimed is: 1. A chemical solution preparation apparatus comprising a chemical solution refinement device, which dissolves a chemical gas into a liquid and prepares a refined chemical solution, wherein the liquid is one of pure water or a mixture having a predetermined composition, the chemical solution refinement device including: a preparation tank for storing the liquid; a first pipe for supplying the chemical gas into the preparation tank; a first valve arranged in the first pipe for opening and closing the first pipe; a second pipe for discharging the chemical gas that was not dissolved in the liquid during the gas dissolving from the preparation tank; a second valve arranged in the second pipe for opening and closing the second pipe; a third pipe connected to the preparation tank for draining a predetermined amount of the chemical solution out of the chemical solution preparation apparatus during the gas dissolving to increase the purity of the chemical solution; a third valve arranged in the third pipe for opening and closing the third pipe; and a controller for operating the first, second and third valves, wherein, when the controller is programmed to operate the first valve so as to supply the chemical gas to the preparation tank, the controller is programmed to operate the second valve and the third valve so as to simultaneously discharge an adjusted amount of the undissolved chemical gas and a predetermined amount of the chemical solution that is under preparation from the preparation tank. 2. The preparation apparatus according to claim 1, wherein the chemical solution refinement device further includes a bubbler element for forming bubbles of the chemical gas in the preparation tank to dissolve the chemical gas in the liquid. 3. The preparation apparatus according to claim 1, wherein the chemical solution refinement device further includes a flow controller arranged in the first pipe. 4. The preparation apparatus according to claim 2, further comprising a cooling unit for cooling the liquid in the preparation tank. 5. A chemical solution preparation apparatus comprising a chemical solution refinement device, which dissolves a chemical gas into a liquid and prepares a refined chemical solution, wherein the liquid is one of pure water or a mixture having a predetermined composition, the chemical solution refinement device including: a preparation tank for storing the liquid; a gas supply line for supplying the chemical gas to the preparation tank; a liquid supply line for supplying the liquid to the preparation tank; a first valve arranged in the gas supply line for opening and closing the gas supply line; a bubbler element connected to the gas supply line for forming bubbles of the chemical gas in the preparation tank to dissolve the chemical gas in the liquid; a second pipe for discharging an adjusted amount of the chemical gas that was not dissolved in the liquid from the preparation tank; a second valve arranged in the second pipe for opening and closing the second pipe; a third pipe for discharging a predetermined amount of the chemical solution from the preparation tank; a third valve arranged in the third pipe for opening and closing the third pipe; a controller for simultaneously operating the first, second and third valves; and a cooling unit for cooling the liquid in the preparation tank, wherein the cooling unit includes a pump for circulating the chemical solution between the preparation tank and a second pipe and a cooling element connected to the second pipe. 6. A chemical solution preparation apparatus comprising a chemical solution refinement device, which dissolves a chemical gas into a liquid and prepares a refined chemical solution, wherein the liquid is one of pure water or a mixture having a predetermined composition, the chemical solution refinement device including: a preparation tank for storing the liquid; a gas supply line for supplying the chemical gas to the preparation tank; a liquid supply line for supplying the liquid to the preparation tank; a first valve arranged in the gas supply line for opening and closing the gas supply line; a bubbler element connected to the gas supply line for forming bubbles of the chemical gas in the preparation tank to dissolve the chemical gas in the liquid; a gas discharge line for discharging an adjusted amount of the chemical gas that was not dissolved in the liquid from the preparation tank; a second valve arranged in the gas discharge line for opening and closing the gas discharge line; a chemical solution discharge line for discharging a predetermined amount of the chemical solution from the preparation tank; a third valve arranged in the chemical solution discharge line for opening and closing the chemical solution discharge line; a cooling unit for cooling the liquid in the preparation tank, wherein the cooling unit includes a cooling element connected to the preparation tank and a pump for circulating the chemical solution between the preparation tank and the cooling element. 7. A chemical solution preparation apparatus comprising a chemical solution refinement device, which dissolves a chemical gas into a liquid and prepares a refined chemical solution, wherein the liquid is one of pure water or a mixture having a predetermined composition, the chemical solution refinement device including: a preparation tank for storing the liquid; a gas supply line for supplying the chemical gas to the preparation tank; a liquid supply line for supplying the liquid to the preparation tank; a first valve arranged in the gas supply line for opening and closing the gas supply line; for forming bubbles of the chemical gas in the preparation tank to dissolve the chemical gas in the liquid; a gas discharge line for discharging an adjusted amount of the chemical gas that was not dissolved in the liquid from the preparation tank; a second valve arranged in the gas discharge line for opening and closing the gas discharge line; a chemical solution discharge line for discharging a predetermined amount of the chemical solution from the preparation tank; a third valve arranged in the chemical solution discharge line for opening and closing the chemical solution discharge line; a controller for simultaneously operating the first, second and third valves; a cooling unit for cooling the liquid in the preparation tank; and a gas cylinder containing liquefied chemical gas, wherein the cooling unit includes a heat exchanger for exchanging heat between the gas cylinder and the preparation tank. 8. The preparation apparatus according to claim 2, wherein the bubbler element has a nozzle for forming fine bubbles of the chemical gas. 9. The preparation apparatus according to claim 8, wherein the nozzle is inclined by a predetermined angle relative to a vertical direction. 10. The preparation apparatus according to claim 8, wherein the nozzle extends vertically, and the bubbler element further includes a deflection plate for guiding the bubbles in a predetermined direction. 11. The preparation apparatus according to claim 1, further comprising: a concentration measuring device for measuring the concentration of the chemical solution; and a concentration adjusting device for adjusting the concentration of the chemical solution in accordance with the measured result of the concentration measuring device. 12. A chemical solution preparation apparatus comprising a chemical solution refinement device, which dissolves a chemical gas into a liquid and prepares a refined chemical solution, wherein the liquid is one of pure water or a mixture having a predetermined composition, the chemical solution refinement device including: a preparation tank for storing the liquid; a gas supply line for supplying the chemical gas to the preparation tank; a liquid supply line for supplying the liquid to the preparation tank; a first valve arranged in the gas supply line for opening and closing the gas supply line; a gas discharge line for discharging an adjusted amount of the chemical gas that was not dissolved in the liquid from the preparation tank; a second valve arranged in the gas discharge line for opening and closing the gas discharge line; a chemical solution discharge line for discharging a predetermined amount of the chemical solution from the preparation tank; a third valve arranged in the chemical solution discharge line for opening and closing the chemical solution discharge line; a concentration measuring device for measuring the concentration of the chemical solution, wherein the concentration measuring device includes at least one of a viscosity meter, a specific gravity meter, an ultrasonic wave velocity meter, and a specific conductance meter; and a concentration adjusting device for adjusting the concentration of the chemical solution in accordance with the measured result of the concentration measuring device, wherein the concentration adjusting device includes a controller for calculating the concentration of the chemical solution from the measured result of the concentration measuring device and controlling the amount of the chemical gas supplied to the preparation tank from the gas supply line in accordance with the calculated concentration, and wherein when the controller operates the first valve to supply the chemical gas to the preparation tank, the controller operates the second valve and the third valve to discharge an adjusted amount of the undissolved chemical gas and a predetermined amount of the chemical solution that is under preparation from the preparation tank. 13. The preparation apparatus according to claim 12, wherein the concentration measuring device measures the heat of reaction during dissolution of the chemical gas with a thermometer and calculates the amount of dissolved chemical gas from the measured result to obtain the concentration of the chemical solution. 14. The preparation apparatus according to claim 12, wherein the gas supply line includes a container in which the chemical gas in contained, and wherein the concentration measuring device calculates the amount of the used chemical gas by measuring the change in the weight of the container and calculates the concentration of the chemical solution from the amount of the used chemical gas. 15. The preparation apparatus according to claim 1, further comprising an ice particle generator for generating ice particles, and wherein the dissolution unit causes contact between the ice particles and the chemical gas to dissolve the chemical gas in the liquid. 16. The preparation apparatus according to claim 1, further comprising a gas purification unit for purifying the chemical gas with pure water. 17. A chemical solution preparation apparatus comprising a chemical solution refinement device, which dissolves a chemical gas into a liquid and prepares a refined chemical solution, wherein the liquid is one of pure water or a mixture having a predetermined composition, the chemical solution refinement device including: a gas supply line for supplying the chemical gas; a first valve arranged in the gas supply line for opening and closing the gas supply line; a cooling unit connected to the gas supply line for storing and cooling the liquid during the preparation of the chemical solution; a tank for storing the chemical solution received from the cooling unit; a gas discharge line for discharging an adjusted amount of the chemical gas that was not dissolved in the liquid during the gas dissolving from the cooling unit; a second valve arranged in the gas discharge line for opening and closing the gas discharge line; a chemical solution discharge line connected to the tank for draining a predetermined amount of the chemical solution out of the chemical solution preparation apparatus during the gas dissolving; and a third valve arranged in the chemical solution discharge line for opening and closing the chemical solution discharge line; and a controller for operating the first, second and third valves, wherein, when the controller operates the first valve so as to supply the chemical gas to the preparation tank, the controller operates the second valve and the third valve so as to simultaneously discharge an adjusted amount of the undissolved chemical gas from the cooling unit, and to discharge a predetermined amount of the chemical solution from the tank. 18. The preparation apparatus according to claim 17, wherein the chemical solution refinement device is connected to a facility for fabricating electronic devices to dissolve used chemical gas disposed of by the fabrication facility in the liquid. 19. The preparation apparatus according to claim 18, further comprising a gas purification unit for purifying the chemical gas with pure water and providing the purified chemical gas to the fabrication facility. 20. The preparation apparatus according to claim 17, further comprising a flow controller arranged in the gas supply line. 21. The preparation apparatus according to claim 17, wherein the chemical gas is contained in a predetermined container, and wherein the chemical solution refinement device includes means for measuring the weight of the chemical gas in the container so as to calculate the amount of the chemical gas supplied to the preparation tank. 22. The preparation apparatus according to claim 17, wherein the chemical solution refinement device includes a hydrophobic filter for separating undissolved chemical gas from the chemical solution discharged from the cooling unit, the separated chemical gas being supplied to the cooling unit. 23. The preparation apparatus according to claim 17, further comprising a concentration measuring device for extracting some of the chemical solution during the preparation and measuring the concentration of the chemical solution, the concentration of the chemical solution being adjusted to a predetermined concentration by supplying the chemical gas to the chemical solution during preparation. 24. The preparation apparatus according to claim 17, further comprising a raw material supplying device for supplying a raw material that differs from the chemical gas to the prepared chemical solution. 25. The preparation apparatus according to claim 1, wherein when preparing the chemical solution, the controller is programmed to open the first, second, and third valves. 26. The preparation apparatus according to claim 11, wherein the controller is programmed to keep the second and third valves opened to continuously discharge the undissolved chemical gas and the chemical solution from the preparation tank until the concentration of the chemical solution contained in the preparation tank reaches a target value. 27. The preparation apparatus according to claim 11, wherein when the impurities are eliminated from the chemical solution and the concentration of the chemical solution contained in the preparation tank reaches a target value, the controller is programmed to simultaneously close the first valve, the second valve and the third valve to stop supplying the chemical gas and to stop discharging the undissolved chemical gas and the chemical solution from the preparation tank.
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