[특허]Assembly and method for containing, receiving and storing fluids and for dispensing gas from a fluid control and gas delivery assembly having an integrated fluid flow restrictor

Air Products and Chemicals, Inc.

검색어에 아래의 연산자를 사용하시면 더 정확한 검색결과를 얻을 수 있습니다.
검색연산자

검색도움말
검색연산자	기능	검색시 예
()	우선순위가 가장 높은 연산자	예1) (나노 (기계 \| machine))
공백	두 개의 검색어(식)을 모두 포함하고 있는 문서 검색	예1) (나노 기계) 예2) 나노 장영실
\|	두 개의 검색어(식) 중 하나 이상 포함하고 있는 문서 검색	예1) (줄기세포 \| 면역) 예2) 줄기세포 \| 장영실
!	NOT 이후에 있는 검색어가 포함된 문서는 제외	예1) (황금 !백금) 예2) !image
*	검색어의 *란에 0개 이상의 임의의 문자가 포함된 문서 검색	예) semi*
""	따옴표 내의 구문과 완전히 일치하는 문서만 검색	예) "Transform and Quantization"

과학기술 지식인프라 ScienceON

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

특허 상세정보

MyON담기

내보내기 페이스북 공유 트위터 공유 카카오톡 공유

Assembly and method for containing, receiving and storing fluids and for dispensing gas from a fluid control and gas delivery assembly having an integrated fluid flow restrictor

특허상세정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B65B-001/30
미국특허분류(USC)	141/094; 141/002; 141/018; 141/051; 141/302; 137/597
출원번호	US-0661267 (2003-09-12)
발명자 / 주소	Hertzler,Benjamin Lee Shay,Robert Harrison Botelho,Alexandre de Almeida
출원인 / 주소	Air Products and Chemicals, Inc.
대리인 / 주소	McAndrews, Held &
인용정보	피인용 횟수 : 32 인용 특허 : 125

초록
▼

A fluid control and gas delivery assembly and method for containing, receiving and storing hazardous fluids and for dispensing gas comprising a container, a fluid fill path, a gas dispensing path, a first shut-off valve, a pressure reducer, a fluid flow restrictor, a second shut-off valve and a fluid outlet connector. The first shut-off valve is positioned in said gas dispensing path upstream of a pressure reducer. A fluid flow restrictor downstream of the pressure reducer has a fluid flow restriction path configured to restrict the flow of the fluid delivered to the fluid flow restrictor at the delivery pressure to a maximum mass flow rate that is equal to or less than the allowable mass flow rate standard for the hazardous fluid. The second shut-off valve is positioned in said gas dispensing path downstream of said pressure reducer.

대표
청구항
▼

What is claimed: 1. A fluid control and gas delivery assembly for safely containing, receiving and storing hazardous fluids and for dispensing gas comprising: a. a container having a wall separating an interior volume from a region outside said container, wherein said container is adapted for containing a fluid at a first pressure; b. a fluid fill path extending through said wall from said region outside said container to said interior volume; c. a gas dispensing path extending through said wall from said interior volume to said region outside said container, said gas dispensing path being non-coextensive with said fluid fill path; d. a first shut-off valve positioned in said gas dispensing path; e. a pressure reducer positioned in said gas dispensing path downstream of the first shut-off valve to reduce the pressure of the fluid flowing upstream of the pressure reducer to a delivery pressure; f. a fluid flow restrictor positioned in said gas dispensing path downstream of the pressure reducer, said restrictor having a fluid flow restricting path configured to restrict the flow of the fluid delivered to the fluid flow restrictor at the delivery pressure to a maximum mass flow rate that is equal to or less than the allowable mass flow rate standard for the hazardous fluid; g. a second shut-off valve positioned in said gas dispensing path downstream of said pressure reducer; and h. a fluid outlet connector disposed in said gas dispensing path downstream of said first and second shut-off valves and adapted for making and breaking a low-pressure connection between said gas dispensing path and apparatus for utilizing gas. 2. The fluid control and gas delivery assembly of claim 1, wherein the fluid flow restricting path is configured to limit the flow of gas delivered to the fluid flow restrictor at the delivery pressure to a mass flow rate that exceeds a maximum allowable flow rate standard at the first pressure for said fluid. 3. The fluid control and gas delivery assembly of claim 1, wherein the fluid flow restrictor comprises one or more orifices, flow nozzles, venturis, filters, screens or capillary tubes. 4. The fluid control and gas delivery assembly of claim 1, wherein the fluid flow restrictor is located in said outlet connector. 5. The fluid control and gas delivery assembly of claim 1, further comprising a residual pressure valve located in the gas dispensing path, upstream of the first shut-off valve, to prevent back flow of air or foreign fluids. 6. The fluid control and gas delivery assembly of claim 1 further comprising a purge-gas flow path having a purge gas inlet that communicates with the gas dispensing path between the first shut-off valve and the pressure reducer. 7. The fluid control and gas delivery assembly of claim 6, wherein a purge-gas valve is positioned in the purge-gas flow path to selectively open and sealingly close said purge-gas flow path. 8. The fluid control and gas delivery assembly of claim 1, further comprising a flow switch for controlling the fluid flow along the gas dispensing path. 9. The fluid control and gas delivery assembly of claim 8, further comprising a processor coupled in controlling relationship with the flow switch. 10. The fluid control and gas delivery assembly of claim 1, further comprising a purifier disposed within the container and upstream of the first shut-off valve. 11. The fluid control and gas delivery assembly of claim 1, further comprising a high pressure safety relief device upstream of the pressure reducer. 12. The fluid control and gas delivery assembly of claim 1, wherein said fluid fill path, gas dispensing path, pressure reducer, shut-off valves, fluid flow restrictor and outlet connector are defined by a primary gas control module mounted on said container. 13. The fluid control and gas delivery assembly according to claim 1, further comprising an automatic controller for operating the first shut-off valve to control the discharge of gas deriving from the fluid container. 14. The fluid control and gas delivery assembly of claim 1, wherein said hazardous fluid is selected, as required by the user's application, from the fluids consisting of: corrosive, toxic, oxidant, pyrophoric fluids and mixtures of such fluids. 15. The fluid control and gas delivery of assembly claim 1, further comprising a fluid fill valve positioned to control the flow of gas along said fluid fill path. 16. A semiconductor manufacturing system comprising a semiconductor manufacturing apparatus utilizing a gas, and a source of said gas, wherein said source comprises a fluid control and gas delivery assembly according to claim 1. 17. A method of manufacturing a Semiconductor product, comprising: containing a fluid in a confined state In a fluid control and gas delivery assembly according to claim 1; selectively dispensing the confined fluid by actuating the first shut-off valve to discharge the gas from the fluid container; and using the discharged gas in the manufacture of a semiconductor product. 18. A method for storage and dispensing of a gas, comprising: containing a gas in a confined state in a fluid control and gas delivery assembly according to claim 1; and selectively dispensing the confined gas by actuating the first shut-off valve to discharge the gas from the container. 19. A method for replacing the source of gas, in an apparatus for utilizing the gas, without breaking a high pressure connection comprising: providing first and second Supplies of gas, each supply comprising a fluid container adapted for storing a fluid at a first pressure and having a wall separating an interior volume from a region outside said fluid container and a primary gas control module mounted on said fluid container, said module defining: a. a gas dispensing path extending through said wall from said interior volume to said region outside said container; b. a first shut-off valve positioned in said gas dispensing path; c. a pressure reducer positioned in said gas dispensing path downstream of the first shut-off valve to reduce the pressure of the fluid flowing upstream of the pressure reducer to a delivery pressure; d. a fluid flow restrictor positioned in said gas dispensing path downstream of the pressure reducer and upstream of an outlet, said restrictor having a fluid flow restricting path configured to restrict the flow of the fluid delivered to the fluid flow restrictor at the delivery pressure to a maximum mass flow rate that is equal to or less than the maximum allowable mass flow rate standard for the hazardous fluid; e. a second shut-off valve positioned in said gas dispensing path downstream of said pressure reducer; and f. an outlet connector disposed in said gas dispensing path downstream of said first and second shut-off valves and adapted for making and breaking a low-pressure connection between said gas dispensing path and apparatus for utilizing gas; providing apparatus for using the gas, said apparatus having a low-pressure inlet and an inlet connector, said inlet connector initially being coupled to the outlet connector of said first supply of gas to Supply gas from said first supply to said apparatus; closing the shut-off valve of said first supply of gas to isolate said first supply of gas from said apparatus for using the gas; breaking the low-pressure connection between the connectors of said first supply of gas and said apparatus for using the gas; replacing said first supply of gas with said second supply of gas; while the shut-off valve of said second supply of gas is closed, making a low-pressure connection between the connectors of said second supply of gas and said apparatus for using the gas; and opening the shut-off valve of said second supply of gas, allowing gas to flow from said second supply to Said apparatus for using the gas. 20. The method of claim 19, further comprising refilling said first supply of gas via said fluid fill path. 21. The method of claim 19 wherein said apparatus for using the gas comprises a tool for manufacturing an integrated circuit.

이 특허에 인용된 특허 (125)

이 특허를 인용한 특허 피인용횟수: 32

IPC 상위 출원인

내보내기

상세정보
내보내기 구분	파일저장 인쇄 메일전송
구성항목	관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 공고번호, 공고일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표출원인, 출원인국적, 출원인주소, 발명자, 발명자E, 발명자코드, 발명자주소, 발명자 우편번호, 발명자국적, 대표IPC, IPC코드, 요약, 미국특허분류, 대리인주소, 대리인코드, 대리인(한글), 대리인(영문), 국제공개일자, 국제공개번호, 국제출원일자, 국제출원번호, 우선권, 우선권주장일, 우선권국가, 우선권출원번호, 원출원일자, 원출원번호, 지정국, Citing Patents, Cited Patents
저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	> 총 건의 자료가 검색되었습니다. > 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) > 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. > 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) > 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오 > ~ > Text(ASCII format) Excel format

과학기술 지식인프라 ScienceON

ScienceON Chatbot

연합인증

특허 상세정보

Assembly and method for containing, receiving and storing fluids and for dispensing gas from a fluid control and gas delivery assembly having an integrated fluid flow restrictor

초록
▼

대표
청구항
▼

이 특허에 인용된 특허 (125)

이 특허를 인용한 특허 피인용횟수: 32

IPC 상위 출원인

과제정보

상세정보조회

원문조회

IPC 상세정보(version : 201201)

연구과제 성과물(0)

참여연구원의 다른 문헌(0)

처리중입니다.

잠시만 기다려주세요.

ScienceON Chatbot

연합인증

특허 상세정보

Assembly and method for containing, receiving and storing fluids and for dispensing gas from a fluid control and gas delivery assembly having an integrated fluid flow restrictor

초록 ▼

대표청구항 ▼

이 특허에 인용된 특허 (125)

이 특허를 인용한 특허 피인용횟수: 32

IPC 상위 출원인

과제정보

상세정보조회

원문조회

IPC 상세정보(version : 201201)

연구과제 성과물(0)

참여연구원의 다른 문헌(0)

처리중입니다.

잠시만 기다려주세요.

초록
▼

대표
청구항
▼