IPC분류정보
국가/구분 |
United States(US) Patent
등록
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국제특허분류(IPC7판) |
|
출원번호 |
US-0232302
(2005-09-20)
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발명자
/ 주소 |
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출원인 / 주소 |
|
대리인 / 주소 |
Lemaire Patent Law Firm, P.L.L. C.
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인용정보 |
피인용 횟수 :
47 인용 특허 :
156 |
초록
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A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material formi
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists in controlling the growth and stoichiometry of the film. The method allows for the fabrication of ultrathin films such as electrolyte films and dielectric films.
대표청구항
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The invention claimed is: 1. A thin-film, rechargeable battery device, comprising: a substrate; a seed layer of a first material adjacent to the substrate; a first film of a second material formed on the seed layer, wherein the second material is different from the first material, and wherein the
The invention claimed is: 1. A thin-film, rechargeable battery device, comprising: a substrate; a seed layer of a first material adjacent to the substrate; a first film of a second material formed on the seed layer, wherein the second material is different from the first material, and wherein the seed layer assists formation of desired crystal structures; an electrolyte second film adjacent to the first film; and a third film adjacent to the electrolyte second film. 2. The device of claim 1, wherein the first film and the third film include an intercalation material. 3. The device of claim 1, wherein the first film includes an intercalation material. 4. The device of claim 1, wherein the third film includes an intercalation material. 5. The device of claim 1, wherein the device includes a lithium battery. 6. The device of claim 1, wherein the device includes a thin-film lithium battery. 7. The device of claim 1, wherein the substrate has a thermal degradation temperature of less than about 700 degrees Celsius. 8. The device of claim 1, wherein the substrate has a thermal degradation temperature of less than about 250 degrees Celsius. 9. The device of claim 3, wherein the seed layer has a surface free energy that is higher than a surface free energy of the intercalation material of the first film. 10. The device of claim 3, wherein the seed layer is amorphous to diminish undesirable growth structures of the intercalation material of the first film. 11. The device of claim 3, wherein the seed layer is a fine-grained polycrystalline seed material to diminish undesirable growth structures of the intercalation material of the first film. 12. The device of claim 1, wherein the seed layer is an electrically conductive seed material. 13. The device of claim 1, wherein the substrate includes a contact layer, and the seed layer is on the contact layer. 14. The device of claim 1, wherein the seed layer includes chromium. 15. The device of claim 1, wherein the seed layer includes chromium nitride. 16. The device of claim 1, wherein the seed layer includes tantalum. 17. The device of claim 1, wherein the seed layer includes tantalum nitride. 18. The device of claim 1, wherein the seed layer includes tungsten. 19. The device of claim 1, wherein the seed layer includes tungsten nitride. 20. The device of claim 1, wherein the seed layer includes ruthenium. 21. The device of claim 1, wherein the seed layer includes ruthenium nitride. 22. A thin-film, rechargeable battery device, comprising: a substrate; a seed layer of a first material adjacent to the substrate; a first film of a second material formed on the seed layer, wherein the second material is different from the first material, and wherein the seed layer assists formation of desired crystal structures; an electrolyte second film adjacent to the first film; and a third film adjacent to the electrolyte second film, wherein both the first film and the second film are formed of lithium intercalation material such that the energy-storage device includes a lithium ion rechargeable battery. 23. A thin-film, rechargeable battery device, comprising: a substrate; means for seeding growth of a crystalline structure adjacent to the substrate; a first film formed on the means for seeding growth of the crystalline structure, wherein the first film has the crystalline structure and is of a material different from the means for seeding growth of the crystalline structure; an electrolyte second film adjacent to the first film; and a third film adjacent to the electrolyte second film. 24. The device of claim 23, wherein both the first film and the third film include an intercalation material. 25. The device of claim 23, wherein only the first film includes an intercalation material. 26. The device of claim 23, wherein only the third film includes an intercalation material. 27. The device of claim 23, wherein the device is a thin-film lithium battery. 28. The device of claim 23, wherein the means for seeding growth includes an electrically conductive seed material.
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