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Tuning control parameters of vibration reduction and motion control systems for fabrication equipment and robotic systems 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G05B-013/02
출원번호 US-0896689 (2001-06-29)
발명자 / 주소
  • Jacques,Robert
출원인 / 주소
  • Cymer, Inc.
인용정보 피인용 횟수 : 10  인용 특허 : 31

초록

A method and apparatus is disclosed for acquiring and processing parameters used to adjust and tune a controller used, for example, to govern and compensate for motion, including vibrations and disturbances, in a physical system, such as a piece of manufacturing equipment. The method and apparatus m

대표청구항

What is claimed is: 1. A system for controlling the physical behavior of an apparatus, the behavior of the apparatus estimated by an initial behavioral model, the system comprising: a sensor element located in proximity to the apparatus for acquiring data that accurately characterizes the physical

이 특허에 인용된 특허 (31)

  1. Okada Tsuyoshi (Yokosuka JPX) Kobayashi Toshiaki (Shiki JPX) Ozawa Hidetaka (Urawa JPX), Adapative control device.
  2. Boiquaye William J. N-O., Adaptive control process and system.
  3. Plummer Andrew R. (Crawley GB2), Adaptive control servosystems.
  4. Calise, Anthony J.; Hovakimyan, Naira; Idan, Moshe, Adaptive control system having direct output feedback and related apparatuses and methods.
  5. Wojsznis, Wilhelm K.; Blevins, Terrence L., Adaptive feedback/feedforward PID controller.
  6. Graham Marcus L. (North Kingstown RI) O\Brien Francis J. (Newport RI), Adaptive statistical filter providing improved performance for target motion analysis noise discrimination.
  7. Benning Roger David ; Browning Douglas Roy ; Zipfel ; Jr. George Gustave, Apparatus and method for adaptive suppression of vibrations in mechanical systems.
  8. Khorrami Farshad (Brooklyn NY) Rastegar Jahangir (Stony Brook NY), Apparatus for improving operational performance of a machine or device.
  9. Fridhandler Robert M. (2 Sylvanus Ct. Blauvelt NY 10913), Electric motor driver control.
  10. Zou Hehong (Plymouth MN) Hedstrom Kale P. (St. Paul MN) Warrior Jogesh (Chanhassen MN) Hays Coy L. (Chanhassen MN), Field based process control system with auto-tuning.
  11. Wang Qing Guo,SGX ; Hang Chang Chieh,SGX, Frequency-domain adaptive controller.
  12. Jolly Mark R. ; Rossetti Dino J. ; Norris Mark A. ; Miller Lane R., Hybrid active-passive noise and vibration control system for aircraft.
  13. Eismann Paul H. (Florence KY) Thompson ; Jr. Jack M. (Milford OH), Industrial robot with servo.
  14. Karlen James P. (Bethel OH) Thompson ; Jr. Jack M. (Milford OH) Kowalski Keith A. (Cincinnati OH) Damico David A. (Lebanon OH) Eismann Paul H. (Florence KY), Industrial robot with servo.
  15. Habisohn Chris Xavier, Method for damping load oscillations on a crane.
  16. Habisohn Chris Xavier, Method for damping load oscillations on a crane.
  17. Shah Sunil C. ; Pandey Pradeep, Method for real-time nonlinear system state estimation and control.
  18. Shah Sunil C. ; Pandey Pradeep, Method for real-time nonlinear system state estimation and control.
  19. de Waard Henk,JPX ; Donald James J. ; Lu Zhimin ; de Keyser Robin M.,BEX, Model-based predictive control of thermal processing.
  20. Bozich Daniel J. (San Diego CA) MacKay H. Bruce (San Diego CA) Eggert Jay A. (San Diego CA) Muenchau Ernest E. (Vista CA), Neurocontrolled adaptive process control system.
  21. Bozich Daniel J. (San Diego CA) MacKay H. Bruce (San Diego CA) Eggert Jay A. (San Diego CA) Muenchau Ernest E. (Vista CA), Neurocontrolled adaptive process control system.
  22. Magee David Patrick ; Book Wayne J., Optimal arbitrary time-delay (OAT) filter and method to minimize unwanted system dynamics.
  23. Junk Kenneth W., Optimal auto-tuner for use in a process control network.
  24. Dickerson Stephen Lang ; Book Wayne J. ; Sadegh Nader, Precision apparatus with non-rigid, imprecise structure, and method for operating same.
  25. McConnell Kenneth G. (Ames IA) Jang Wan-Shik (Kwang-Ju KRX), Robot control scheme.
  26. Fowell Richard A. (Culver City CA), Robust resonance reduction using staggered posicast filters.
  27. McConnell Kenneth G. ; Bouton Chad E., Robust vibration suppression methods and systems.
  28. McConnell Kenneth G. ; Bouton Chad E., Robust vibration suppression methods and systems.
  29. Singer Neil C. (Brookline MA) Seering Warren P. (Sherborn MA) Pasch Kenneth A. (Brookline MA), Shaping command inputs to minimize unwanted dynamics.
  30. Kobayashi Toshiaki (Wako JPX) Ozawa Hidetaka (Wako JPX), Vibration/noise control system.
  31. Kobayashi Toshiaki (Wako JPX) Ueyama Masaki (Wako JPX) Yokoyama Toshio (Wako JPX) Nozawa Yasuji (Wako JPX) Ozawa Hidetaka (Wako JPX), Vibration/noise control system for vehicles.

이 특허를 인용한 특허 (10)

  1. Gahinet, Pascal; Chen, Rong; Eryilmaz, Bora, Automated PID controller design.
  2. Gahinet, Pascal; Chen, Rong; Eryilmaz, Bora; Singh, Baljeet, Automated PID controller design, using parameters that satisfy a merit function.
  3. Gahinet, Pascal, Automatic H-infinity optimization for multivariable control systems.
  4. Yang, Pai-Hsueh; Koo, Shiang-Lung, Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the like.
  5. Yamamoto, Takuo; Kataoka, Yuki, Correction value computation device, correction value computation method, and computer program.
  6. Cheng,George Shu Xing; Mulkey,Steven L., Model-free adaptive (MFA) optimization.
  7. Kumar,Aditya, Multivariable controller design method for multiple input/outputs systems with multiple input/output constraints.
  8. Asahara, Yasuyuki; Toi, Takeshi; Yokoyama, Kazuki, Operating noise control device and operating noise control method for vehicle.
  9. Case, Clark L.; Kline, Robert, Procedure classification for industrial automation.
  10. Nagasaka, Kenichiro, Robot device and control method of robot device.
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