초록 ▼

The present invention is an apparatus for containing and dispensing a high purity fluid comprising an outer vessel capable of containing a quantity of high purity fluid in its interior; an outlet associated with the outer vessel for dispensing the high purity fluid; a valve capable of controlling hi

The present invention is an apparatus for containing and dispensing a high purity fluid comprising an outer vessel capable of containing a quantity of high purity fluid in its interior; an outlet associated with the outer vessel for dispensing the high purity fluid; a valve capable of controlling high purity fluid flow out of the outer vessel through the outlet; an inner vessel at least partly situated in the outer vessel and communicating with the outlet and an inlet which communicates with the interior of the outer vessel; a purification media contained within the inner vessel for purifying the high purity fluid of undesired components; and fluid flow control device which prevents high purity fluid from flowing from the inner vessel to the interior of the outer vessel.

대표청구항 ▼

The invention claimed is: 1. An apparatus for containing and dispensing a high purity fluid comprising an outer vessel capable of containing a quantity of high purity fluid in its interior; an outlet associated with the outer vessel for dispensing the high purity fluid; a valve assembly capable of

The invention claimed is: 1. An apparatus for containing and dispensing a high purity fluid comprising an outer vessel capable of containing a quantity of high purity fluid in its interior; an outlet associated with the outer vessel for dispensing the high purity fluid; a valve assembly capable of controlling high purity fluid flow out of the outer vessel through the outlet; a separate fill path in the valve assembly with a second valve for controlling fluid flow through the separate fill path wherein an inlet for the separate fill path is the same as the outlet associated with the outer vessel; an inner vessel at least partly situated in the outer vessel and communicating with the outlet and having an inlet which communicates with the interior of the outer vessel; purification media contained within the inner vessel for purifying the high purity fluid of undesired components; and a fluid flow control device which prevents high purity fluid from flowing from the inner vessel to the interior of the outer vessel; wherein the purification media is selected from the group consisting of fluorisil, cross-linked microporous polymers, magnesium sulfate, barium on carbon, magnesium chloride on carbon, magnesium chloride on alumina, magnesium bromide on carbon, palladium on carbon, stainless steel mesh, sintered nickel, sintered stainless steel, and mixtures thereof. 2. The apparatus of claim 1 having a second fluid flow control device between the inner vessel and the outlet. 3. The apparatus of claim 1 wherein the fluid flow control device is a check valve. 4. The apparatus of claim 1 having a sintered metal cup,in the inner vessel near the outlet. 5. The apparatus of claim 1 wherein the inner vessel is connected to the valve assembly and the fluid flow control device is a spring biased poppet check valve. 6. The apparatus of claim 1 wherein the outer vessel contains a high purity fluid capable of interacting with the purification media to create contaminants. 7. The apparatus of claim 1 wherein the outer vessel contains a fill of a high purity fluid selected from the group consisting of: carbon monoxide, nitric oxide, silane, arsine, diborane, phosphine, dichlorosilane, trichlorosilane and mixtures thereof. 8. A method of dispensing an elevated-pressure high purity fluid from an outer vessel having an outlet controlled by a valve, comprising: providing the outer vessel and an elevated-pressure fluid contained therein, an inner vessel containing purification media, having an outlet connected to the outlet of the outer vessel, and having an inlet with a fluid flow control device adapted to allow fluid to flow from the interior of the outer vessel to the inner vessel and to prevent the flow of fluid from the inner vessel to the interior of the outer vessel; opening the valve to flow elevated-pressure fluid through the fluid flow control device and through the purification media; purifying the elevated-pressure fluid of contaminants contained therein by interaction with the purification media to provide the elevated-pressure high purity fluid; and dispensing the elevated-pressure high purity fluid through the outlet of the outer vessel; wherein a first portion of the elevated-pressure high purity fluid dispensed from the inner vessel is separated from the elevated-pressure high purity fluid dispensed after the first portion. 9. The method of claim 8 wherein the elevated pressure high purity fluid is lowered in pressure as it passes through the fluid flow control device. 10. The method of claim 8 wherein the elevated-pressure high purity fluid flows through a second fluid flow control device downstream of the purification media. 11. The method of claim 8 wherein the elevated-pressure high purity fluid is selected from the group consisting of: carbon monoxide, nitric oxide, silane, arsine, diborane, phosphine, dichiorosilane, trichlorosilane and mixtures thereof. 12. The method of claim 8 wherein the purification media is selected from the group consisting of: zeolites, carbons, aluminas, aluminosililcates, silica gels, magnesias, fluorisil, cross-linked microporous polymers, magnesium sulfate, lithium on carbon, barium on carbon, copper on alumina, magnesium chloride on carbon, magnesium chloride on alumina, magnesium bromide on carbon, nickel on alumina, palladium on carbon, porous polypropylene, porous poly(tetrafluorethylene) , stainless steel mesh, sintered nickel, sintered stainless steel, porous alumina and mixtures thereof. 13. A method of dispensing an elevated-pressure high purity fluid comprising: providing an outer vessel having an outlet, an outlet valve, and an interior containing an elevated-pressure fluid; providing an inner vessel disposed within the outer vessel, wherein the inner vessel contains purification media, has an inlet, and has an outlet connected to the outlet of the outer vessel, and wherein the inlet of the inner vessel has a fluid flow control device adapted to allow fluid to flow from the interior of the outer vessel to the inner vessel and to prevent the flow of fluid from the inner vessel to the interior of the outer vessel; opening the outlet valve to flow elevated-pressure fluid through the fluid flow control device and through the purification media; removing contaminants from the elevated-pressure fluid by interaction with the purification media to yield the elevated-pressure high purity fluid; dispensing the elevated-pressure high purity fluid through the outlet of the outer vessel to an end-use process; terminating the flow of elevated-pressure fluid through the fluid flow control device and through the purification media; re-starting the flow of elevated-pressure fluid through the fluid flow control device and through the purification media, and withdrawing an intermediate fluid from the outlet of the outer vessel; venting an amount of the intermediate fluid withdrawn from the outlet of the outer vessel to a waste handling system; and re-starting the dispensing of the elevated-pressure high purity fluid through the outlet of the outer vessel to the end-use process. 14. A method of shipping, storing, and dispensing an elevated-pressure high purity fluid comprising: providing an outer vessel having an outlet, an outlet valve, and an interior containing an elevated-pressure fluid; providing an inner vessel disposed within the outer vessel, wherein the inner vessel contains purification media, has an inlet, and has an outlet connected to the outlet of the outer vessel, and wherein the inlet of the inner vessel has a fluid flow control device adapted to allow fluid to flow from the interior of the outer vessel to the inner vessel and to prevent the flow of fluid from the inner vessel to the interior of the outer vessel; pressurizing the inner vessel with a pressurizing fluid that is different from the elevated-pressure fluid contained in the interior of the outer vessel; shipping and/or storing the inner vessel and the contents therein; opening the outlet valve and releasing the pressure of the pressurizing fluid; flowing the elevated-pressure fluid through the fluid flow control device and through the purification media; removing contaminants from the elevated-pressure fluid by interaction with the purification media to yield the elevated-pressure high purity fluid; and dispensing the elevated-pressure high purity fluid through the outlet of the outer vessel to an end-use process. 15. The method of claim 14 wherein the pressurizing fluid is vented to a waste system. 16. The method of claim 14 wherein the elevated-pressure high purity fluid is selected from the group consisting of: carbon monoxide, nitric oxide, silane, arsine, diborane, phosphine, dichlorosilane, trichiorosilane and mixtures thereof. 17. The method of claim 14 wherein the pressurizing fluid is selected from the group consisting of helium, argon, tetrafluoromethane, and nitrogen.