[특허]System and method for gettering gas-phase contaminants within a sealed enclosure

EM4, Inc.

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특허 상세정보

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내보내기 페이스북 공유 트위터 공유 카카오톡 공유

System and method for gettering gas-phase contaminants within a sealed enclosure

특허상세정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H01L-029/76 H01L-029/66
미국특허분류(USC)	096/132; 257/099
출원번호	US-0424006 (2003-04-25)
발명자 / 주소	Wakelin,Suzanne
출원인 / 주소	EM4, Inc.
대리인 / 주소	Wilmer Cutler Pickering Hale and Dorr LLP
인용정보	피인용 횟수 : 12 인용 특허 : 12

초록
▼

A getter and method for making is provided for removing unwanted impurities from the main body of a sealed hermetic enclosure or package containing one or more devices or objects that have sensitivity to contact with the impurity. The getter may be formulated from granular or powdered materials that react with gas-phase impurities through a combination of chemisorption and absorption mechanisms to form one or more stable species. A porous receptacle is included that contains the getter material such that it cannot penetrate into the main body of the seal...

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What is claimed is: 1. A gettering system, comprising a sealed enclosure defining a first volume; a receptacle enclosing a second volume, said second volume communicating with said first volume through a partition through which one or more contaminants may diffuse from said first volume to said second volume; and a gettering material comprising calcium oxide (CaO) and palladium oxide (PdO) that acts to immobilize said contaminants, said gettering material being contained in said second volume and said gettering material having a physical form that precludes said gettering material from passing through said partition to said first volume. 2. The gettering system of claim 1 wherein said gettering material comprises one or more powdered and/or granular materials. 3. The gettering system of claim 1 wherein said gettering material comprises one or more solid materials. 4. The gettering system of claim 1 wherein said contaminants are airborne. 5. The gettering system of claim 4 wherein said contaminants comprise one or more of hydrogen, water, carbon dioxide, and trace organic vapors. 6. The gettering system of claim 1 wherein said contaminant is liquid water. 7. The gettering system of claim 1 wherein said partition includes a porous cup that partially defines said second volume. 8. The gettering system of claim 7 wherein said gettering material comprises one or more powdered and/or granular materials, said one or more powdered and/or granular materials having an average particle size that is substantially larger than an average pore size of said porous cup. 9. The gettering system of claim 1 wherein said porous cup is formed of a sintered powdered material selected from the group consisting of metal, metal alloy, ceramic, and glass. 10. The gettering system of claim 9 wherein the average pore size of said porous cup is in the range of approximately 0.1 to 200 microns. 11. The gettering system of claim 7 wherein said sealed enclosure further comprises a base, one or more walls, and a sealing member that define said first volume; and said porous cup has an open end, said open end being closed by attachment of said porous sintered cup to said sealing member. 12. The gettering system of claim 11 wherein said gettering material expands as it immobilizes said contaminants; said second volume defined by said porous cup is substantially filled with said gettering material; and said porous sintered cup affixes to said sealing member at an area on said sealing member wherein the material allows said area to be outwardly deformed under pressure from said gettering material as said gettering material expands in a way that it provides a visual indication of the deformation. 13. A gettering system comprising: a sealed package enclosing a volume, said sealed package containing an atmosphere; a porous partition within said sealed package that divides said volume into a device subvolume and a getter subvolume, said partition having a porosity sufficient to allow gas-phase molecules to diffuse from said device subvolume to said getter subvolume; and a gettering material comprising CaO and PdO that acts to immobilize one or more contaminants from said atmosphere, said gettering material being contained in said getter subvolume by said partition. 14. A gettering system for removing one or more contaminants from the atmosphere of a sealed enclosure, comprising: a getter material comprising CaO and PdO in proportions suitable for immobilization of said contaminants; and a porous cup that contains said getter material; said porous cup comprising a porous surface area through which said airborne impurities may pass from said sealed enclosure to the interior of said receptacle, said porous surface area restricting movement of said getter material out of said receptacle. 15. The gettering system of claim 14 wherein said receptacle is located inside said sealed enclosure. 16. The gettering system of claim 14 wherein said getter material is granular and/or powdered and further characterized by a particle size that is substantially larger than the average pore size of said porous surface area. 17. A gettering system for removing a gas-phase contaminant compound from the atmosphere of a sealed enclosure containing a device, comprising: a powdered and/or granular getter composition comprising a chemical that reacts with a gas-phase contaminant to form an immobile compound, thereby removing said contaminant from the gas phase, wherein said getter material comprises CaO and PdO; and a partition separating the volume of said sealed enclosure into a getter volume and a main volume, said main volume housing said device, said partition comprising a porous cup having a porous surface through which said one or more contaminants may diffuse but through which said getter composition may not pass, said getter volume housing a measured quantity of said getter composition. 18. The gettering system of claim 1, further comprising an optoelectronic device within the sealed enclosure. 19. The gettering system of claim 1, wherein a portion of the enclosure near the porous cup is deformable in response to the gettering of impurities to provide a visual indication of gettering activity. 20. A gettering system, comprising a sealed enclosure defining a first volume; a receptacle enclosing a second volume, the second volume communicating with the first volume through a partition through which one or more contaminants may diffuse from said first volume to the second volume; and a gettering material comprising CaO and PdO contained in the second volume, the gettering material acting to immobilize the contaminants and expanding as it immobilizes the contaminants; the enclosure having a portion that is designed to deform outwardly as the gettering material expands to provide a visual indication of the expansion. 21. The system of claim 20, wherein the portion is thinner than adjacent portions. 22. The system of claim 20, wherein the portion is made of a material that is different from that at adjacent portions. 23. The system of claim 20, further comprising an optoelectronic component in the first volume. 24. The gettering system of claim 1, 13, 14, 17, or 20, wherein said gettering material consists essentially of CaO and PdO. 25. The gettering system of claim 24, wherein said gettering material comprises approximately 98% CaO and 2% PdO by weight. 26. The gettering system of claim 11, wherein said open end of said cup is welded to said sealing member.

이 특허에 인용된 특허 (12)

이 특허를 인용한 특허 피인용횟수: 12

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특허 상세정보

System and method for gettering gas-phase contaminants within a sealed enclosure

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이 특허에 인용된 특허 (12)

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System and method for gettering gas-phase contaminants within a sealed enclosure

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이 특허에 인용된 특허 (12)

이 특허를 인용한 특허 피인용횟수: 12

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IPC 상세정보(version : 201201)

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