초록 ▼

A carbon nanotube-based device (40) includes a substrate (10), a number of catalytic nano-sized particles ( 131) formed on the substrate, and an aligned carbon nanotube array (15) extending from the alloy catalytic nano-sized particles. The aligned carbon nanotube array progressively bends in a pred

A carbon nanotube-based device (40) includes a substrate (10), a number of catalytic nano-sized particles ( 131) formed on the substrate, and an aligned carbon nanotube array (15) extending from the alloy catalytic nano-sized particles. The aligned carbon nanotube array progressively bends in a predetermined direction. A method for making the carbon nanotube-based device includes the steps of: providing a substrate; depositing a layer of catalyst on the substrate; depositing a layer of catalyst dopant material on the catalyst layer, for varying a reaction rate of synthesis of the aligned carbon nanotube array; annealing the catalyst and the catalyst dopant material in an oxygen-containing gas at a low temperature; and exposing the nano-sized particles and catalyst dopant material to a carbon-containing source gas at a predetermined temperature such that the aligned carbon nanotube array grows from the substrate.

대표청구항 ▼

What is claimed is: 1. A carbon nanotube-based device comprising: a substrate; a plurality of alloy catalytic nano-sized particles formed on the substrate, said alloy catalytic nano-sized particles each comprising a catalyst material and a catalyst dopant material, a content of said catalyst dopant

What is claimed is: 1. A carbon nanotube-based device comprising: a substrate; a plurality of alloy catalytic nano-sized particles formed on the substrate, said alloy catalytic nano-sized particles each comprising a catalyst material and a catalyst dopant material, a content of said catalyst dopant material gradually one of increasing and decreasing along a predetermined direction on said substrate; and an aligned carbon nanotube array extending from the alloy catalytic nano-sized particles and progressively bending in another predetermined direction on said substrate. 2. The carbon nanotube-based device as claimed in claim 1, wherein the substrate comprises silicon, quartz or glass. 3. The carbon nanotube-based device as claimed in claim 1, wherein the catalyst material is selected from the group consisting of iron, cobalt, nickel, molybdenum, ruthenium, manganese, and any suitable combination alloy thereof. 4. The carbon nanotube-based device as claimed in claim 1, wherein the catalyst dopant material comprises copper, molybdenum, or a combination of copper and molybdenum. 5. A carbon nanotube-based device comprising: a substrate; a plurality of alloy catalytic nano-sized particles formed on the substrate, said alloy catalytic nano-sized particles each comprise a catalyst material and a catalyst dopant material, a content of said catalyst dopant material one of increasing and decreasing along a direction on said substrate; and an aligned carbon nanotube array respectively extending from the alloy catalytic nano-sized particles with gradually respective one of increasing lengths and decreasing Lengths of said carbon nanotubes of the carbon nanotube array arranged along said direction on said substrate. 6. A carbon nanotube-based device comprising: a substrate; a plurality of alloy catalytic nano-sized particles formed on the substrate, said alloy catalytic nano-sized particles each comprising a catalyst material and a catalyst dopant material, said catalyst dopant material being in a form of a layer, said layer one of thickening and thinning along a predetermined direction on said substrate; and an aligned carbon nanotube array extending from the alloy catalytic nano-sized particles and progressively bending in another direction on said substrate. 7. The carbon nanotube-based device as claimed in claim 6, wherein the catalyst material is comprised of at least one material selected from the group consisting of iron, cobalt, nickel, molybdenum, ruthenium, and manganese. 8. The carbon nanotube-based device as claimed in claim 6, wherein the catalyst dopant material comprises at least one of copper and molybdenum.