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Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/00
  • G06F-019/00
출원번호 US-0393526 (2003-03-20)
발명자 / 주소
  • Doherty,Brian J.
  • Mariano,Thomas R.
  • Sullivan,Robert P.
출원인 / 주소
  • Brooks Automation, Inc.
대리인 / 주소
    Weingarten, Schurgin, Gagnebin & Lebovici LLP
인용정보 피인용 횟수 : 16  인용 특허 : 42

초록

An Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load/ unload parts directly to/from storage units included in the system. The AMHS includes an overhead hoist transport subsystem and a vertical carousel stocker having a plurality of storage bins. The s

대표청구항

What is claimed is: 1. An automated material handling system for transporting material between various locations within a product manufacturing facility, comprising: at least one housing unit configured to house a plurality of storage bins, each storage bin being configured to hold at least one uni

이 특허에 인용된 특허 (42)

  1. Prentakis Antonios E. (Cambridge MA), Apparatus and method for loading and unloading wafers.
  2. Chao, Albert, Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system.
  3. Friedman Daniel J., Apparatus for carrying semiconductor devices.
  4. Perlov Ilya ; Gantvarg Eugene, Apparatus for moving a cassette.
  5. Brown Paul D., Article transfer methods.
  6. Fenn Ronald L. (Hudson OH), Automated in-process pipe storage and retrieval system.
  7. Sicard Claude (Saint Nazaire FRX) Kroczynski Patrice (Vitry FRX) Gallard Herve (Sollies-Pont FRX) Mars Denis (Le Chesnay FRX) Devos Michel (Dunkerque FRX), Automated installation for processing large objects.
  8. Boje John F. ; Brown Samuel R. ; Markin Rodney S., Automated laboratory specimen organizer and storage unit.
  9. Conboy Michael R. ; Ryan Patrick J. ; Coss ; Jr. Elfido, Automated material handling system method and arrangement.
  10. Michael R. Conboy ; Patrick J. Ryan ; Elfido Coss, Jr., Automated material handling system method and arrangement.
  11. Iwasaki Junji,JPX ; Katsube Junichi,JPX ; Itami Yasushi,JPX, Automatic carrier control method in semiconductor wafer cassette transportation apparatus.
  12. Southworth Peter R. (Mission Viejo CA) Baxter Gregory R. (Orange CA), Conveyor system.
  13. Lin, Frank, Flexible dispatching system and method for coordinating between a manual automated dispatching mode.
  14. Asakawa Teruo (Yamanashi JPX) Ohsawa Tetsu (Kofu JPX), Handling apparatus for transferring carriers and a method of transferring carriers.
  15. Fosnight William J., Integrated intrabay buffer, delivery, and stocker system.
  16. Tau Lok L. ; Conboy Michael R. ; Jackson Thomas P., Material movement server.
  17. Christopher Hofmeister ; Glenn L Sindledecker, Material transport system.
  18. Gary Ettinger ; Greg Wiese ; Arulkumar Shanmugasundrum, Method and apparatus for transferring semiconductor substrates using an input module.
  19. Wooding Michael J. (Sunnyvale CA) Cardema Rudolfo S. (San Jose CA) Ramiller Charles L. (Santa Clara CA), Method and system for loading wafers.
  20. Goerigk Peter,DEX, Method and system of managing wafers in a semiconductor device production facility.
  21. Raymond Chen TW, Method for aligning a cassette pod to an overhead hoist transport system.
  22. Matsumoto Takashi (Ise JPX) Tanaka Shigeru (Ise JPX) Shinya Tsutomu (Ise JPX) Iwasawa Yoshiyuki (Tokyo JPX) Ishida Tsutomu (Tokyo JPX) Harada Hiroshi (Tokyo JPX) Kobayashi Shintaro (Tokyo JPX) Okamot, Railway carrier apparatus for semiconductor wafers.
  23. Iwasaki Junji,JPX ; Katsube Junichi,JPX ; Itami Yasushi,JPX, Semiconductor wafer cassette transportation apparatus and stocker used therein.
  24. Davis Cecil J. (Greenville TX) Matthews Robert (Plano TX) Hildenbrand Randall C. (Richardson TX), Semiconductor wafer transfer method and arm mechanism.
  25. Southworth, Peter R.; Baxter, Gregory R., Semiconductor wafer transport system.
  26. Wiesler Mordechai (Lexington MA) Weiss Mitchell (Haverford PA), Straight line wafer transfer system.
  27. Hofmeister Christopher A., Substrate transport apparatus.
  28. Tabrizi Farzad ; Kitazumi Barry ; Barker David A. ; Setton David A. ; Niewmierzycki Leszek ; Kuhlman Michael J., Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber.
  29. Stonestreet Paul (Cowfold GB2) Allum Clive (Crawley GB2) Webber Bert (Crawley GB2) Cooke Richard (West Worthing GB2) Robinson Frederick J. L. (Crawley GB2) Wauk ; II Michael T. (Haywards Heath GB2), Systems and methods for wafer handling in semiconductor process equipment.
  30. Kallmann Jurgen (Kaarst DEX) Fink Heinz (Krefeld DEX), Transport and handling system for multi-position textile machines.
  31. Elliott David J. (147 Rice Rd. Wayland MA 01778), Transport containers for semiconductor wafers.
  32. Kawano Hitoshi,JPX ; Murata Masanao,JPX ; Tsuyoshi Tanaka,JPX ; Okuno Atsushi,JPX, Transport system.
  33. Bonora Anthony C. ; Gould Richard H., Transport system with integrated transport carrier and directors.
  34. Robey Timothy J., Vertical stacking system using controlled access method.
  35. Goodwin Dennis L. (Tempe AZ) Crabb Richard (Mesa AZ) Robinson McDonald (Paradise Valley AZ) Ferro Armand P. (Scottsdale AZ), Wafer handling system with bernoulli pick-up.
  36. Flint Alan G. (Los Gatos CA) Jacobs William G. (San Jose CA), Wafer loading apparatus.
  37. Zhang John Weiguo ; Anderson H. Alexander, Wafer shuttle system.
  38. Coad George L. (Lafayette CA) Shaw R. Howard (Palo Alto CA) Hutchinson Martin A. (Santa Clara CA), Wafer transfer system.
  39. Wiesler Mordechai (Lexington MA) Weiss Mitchell (Haverford PA), Wafer transfer system having rotational capability.
  40. Wiesler Mordechai ; Weiss Mitchell, Wafer transfer system having vertical lifting capability.
  41. Miller Kenneth C. (280 Easy St. ; #117 Mountain View CA 94043), Wafer transport device.
  42. Perlov Ilya ; Gantvarg Eugene, Washing transfer station in a system for chemical mechanical polishing.

이 특허를 인용한 특허 (16)

  1. Yoshida, Mitsuru; Inui, Yoshitaka, Article storage facility.
  2. Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
  3. Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
  4. Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
  5. Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
  6. Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
  7. Fatula, Jr., Joseph John; Deyanov, Roumen Iliev; Tzou, Kevin; Gonzalez, Pablo; Carlson, Robert; Greene, John Brooks, Buffered storage and transport device for tool utilization.
  8. Yamamoto, Makoto; Hoshino, Kenji, Carriage system.
  9. Bachrach, Robert Z., Compact apparatus and method for storing and loading semiconductor wafer carriers.
  10. Bonora, Anthony C.; Gould, Richard H.; Krolak, Michael, Integrated systems for interfacing with substrate container storage systems.
  11. Hosek, Martin, Manipulator auto-teach and position correction system.
  12. Hosek, Martin, Manipulator auto-teach and position correction system.
  13. Lowrance, Robert B.; Englhardt, Eric Andrew; Rice, Michael R.; Shah, Vinay; Koshti, Sushant S.; Hudgens, Jeffrey C., Methods and apparatus for a band to band transfer module.
  14. Hoshino, Kenji, Overhead travelling carriage system.
  15. Hoshino, Kenji, Overhead travelling carriage system.
  16. Bonora, Anthony C.; Gould, Richard H.; Krolak, Michael, Substrate container storage system.
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