$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Methods and apparatus for material control system interface 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G06F-019/00
  • B65H-001/00
출원번호 US-0067311 (2005-02-25)
발명자 / 주소
  • Duffin,David C.
  • Jessop,Daniel R.
  • Teferra,Michael
  • Puri,Amitabh
  • Warner,Glade L.
출원인 / 주소
  • Applied Materials, Inc.
대리인 / 주소
    Dugan & Dugan
인용정보 피인용 횟수 : 15  인용 특허 : 38

초록

초록이 없습니다.

대표청구항

대표청구항이 없습니다.

이 특허에 인용된 특허 (38)

  1. Caccoma George Anthony (Poughkeepsie NY) Castrucci Paul Philip (Poughkeepsie NY) Druschel William Otto (Granite Springs NY), Automated integrated circuit manufacturing system.
    상세보기
  2. Lafond Andre,FRX, Automatic assembler/disassembler apparatus adapted to pressurized sealable transportable containers.
    상세보기
  3. Lafond Andre,FRX, Automatic assembler/disassembler apparatus adapted to pressurized sealable transportable containers.
    상세보기
  4. Iwasaki Junji,JPX ; Katsube Junichi,JPX ; Itami Yasushi,JPX, Automatic carrier control method in semiconductor wafer cassette transportation apparatus.
    상세보기
  5. Dangat Geetaram S. ; Gokhale Anand R. ; Li Shuchen ; Milne Robert J. ; Orzell Robert A. ; Reid Robert L. ; Tang Xueqing ; Yen Chih-Kuan, Best can do matching of assets with demand in microelectronics manufacturing.
    상세보기
  6. Bachrach, Robert Z., Compact apparatus and method for storing and loading semiconductor wafer carriers.
    상세보기
  7. Fishkin Boris ; Sato Seiji ; Lowrance Robert B., Controlled environment enclosure and mechanical interface.
    상세보기
  8. Beezer Earl F. (Hillsdale NJ), Device for picking up and placing articles on movable conveyors and assembly lines and to an endless construction and to.
    상세보기
  9. Okumura Toshihiro (Nukata-gun JPX) Ikeda Junji (Kariya JPX), Dispatch and conveyer control system for a production control system of a semiconductor substrate.
    상세보기
  10. Garric George (Perthes FRX) Lafond Andr (Nemours FRX), Dispatching apparatus with a gas supply distribution system for handling and storing pressurized sealable transportable.
    상세보기
  11. Wehrung Brian ; Holden Clifford, Distributed control system architecture and method for a material transport system.
    상세보기
  12. Tseng-Hsiang Yang TW; Hsueh-Cheng Wu TW, Dynamic capacity demand forecast system.
    상세보기
  13. Chin Wen-Cheng,TWX ; Wang Jiann-Kwang,TWX ; Lin Kuo-Chen,TWX ; Huang Sheng-Rong,TWX, Dynamic lot dispatching required turn rate factory control system and method of operation thereof.
    상세보기
  14. Tannous Adel G. ; Lewis Paul E., Environment controlled WIP cart.
    상세보기
  15. Bachrach Robert Z., Factory automation apparatus and method for handling, moving and storing semiconductor wafer carriers.
    상세보기
  16. Garric George (Perthes FRX) Lafond Andr (Nemours FRX), Fully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transpo.
    상세보기
  17. Chacon Guillermo Rudolfo, Integrated wafer fab time standard (machine tact) database.
    상세보기
  18. Eric Christensen ; Russel Shirley ; Michael R. Conboy ; Elfido Coss, Jr., Integrated wafer stocker and sorter with integrity verification system.
    상세보기
  19. Hasegawa Kazuhiko (Toyota JA) Shima Yoshio (Obu JA) Noda Shigeo (Nagoya JA), Machine tool apparatus.
    상세보기
  20. Conboy, Michael R.; Shirley, Russel; Grover, Jason, Management of move requests from a factory system to an automated material handling system.
    상세보기
  21. Cheng David, Method and apparatus for loading and unloading wafers from a wafer carrier.
    상세보기
  22. Bendik, Joseph J.; Hankinson, Matt, Method and apparatus for the production of process sensitive lithographic features.
    상세보기
  23. Weng Yi-Cherng (Tainan TWX), Method and system for dynamic dispatching in semiconductor manufacturing plants.
    상세보기
  24. Schedel, Thorsten; Schumacher, Karl; Fischer, Thomas; Hommen, Heiko; Otto, Ralf; Schmidt, Sebastian, Method for controlling a processing device for a sequential processing of semiconductor wafers.
    상세보기
  25. Wang Tza-Huei,TWX, Method for determining standard cycle time of a stage dynamically.
    상세보기
  26. Tanaka Shouji,JPX ; Nakajima Masao,JPX ; Toma Toshichika,JPX, Peripheral edge exposure method.
    상세보기
  27. Garric George (Perthes FRX) Lafond Andr (Nemours FRX), Pressurized interface apparatus for transferring a semiconductor wafer between a pressurized sealable transportable cont.
    상세보기
  28. Garric George (Perthes FRX) Lafond Andr (Nemours FRX), Pressurized sealable transportable containers for storing a semiconductor wafer in a protective gaseous environment.
    상세보기
  29. Hung Chin-Hui (Hsin-Chu TWX) Chen Chen-Chin (Moa-Li Hsin TWX), Ratio of running work in progress.
    상세보기
  30. Stoddard, Kevin D.; Schulze, Bradley D.; Tsakalis, Konstantinos, Run-to-run controller for use in microelectronic fabrication.
    상세보기
  31. Karasawa, Wataru, Semiconductor manufacturing system and control method thereof.
    상세보기
  32. Oda Tatehumi,JPX, Semiconductor wafer transporter.
    상세보기
  33. Wu Hong J. (Hsin-chu TWX), Single semiconductor wafer transfer method and manufacturing system.
    상세보기
  34. Wu Hong Jen (Hsin chu TWX) Chen Taylor (Hsin chu TWX) Lai Jack (Hsin chu TWX) Chen I. I. (Hsin chu TWX), Single semiconductor wafer transfer method and manufacturing system.
    상세보기
  35. Wu Hong-Jen,TWX ; Chen Taylor,TWX ; Lai Jack,TWX ; Chen I. I.,TWX, Single semiconductor wafer transfer method and manufacturing system.
    상세보기
  36. Wu Hong J. (Hsin TWX), Single semiconductor water transfer method and manufacturing system.
    상세보기
  37. Asano Takanobu (Yokohama JPX) Ishii Katsumi (Kanagawa JPX), Wafer counter having device for aligning wafers.
    상세보기
  38. Asai Toru,JPX, Wafer loading and unloading mechanism for loading robot.
    상세보기

이 특허를 인용한 특허 (15)

  1. Huang,Chih Wei; Chen,Hui Yi; Yu,Ren Chyi; Yu,Chuh Yuan, Method and system for smart vehicle route selection.
    상세보기
  2. Wong, Keith Kwong Hon; Ouyang, Xu; Song, Yunsheng, Method for compensating for tool processing variation in the routing of wafers/lots.
    상세보기
  3. Ouyang, Xu; Gluschenkov, Oleg; Song, Yunsheng; Wong, Keith Kwong Hon, Method for optimizing the routing of wafers/lots based on yield.
    상세보기
  4. Teferra, Michael; Puri, Amitabh; Englhardt, Eric, Methods and apparatus for enhanced operation of substrate carrier handlers.
    상세보기
  5. Teferra, Michael; Puri, Amitabh; Englhardt, Eric, Methods and apparatus for enhanced operation of substrate carrier handlers.
    상세보기
  6. Puri, Amitabh; Duffin, David; Englhardt, Eric A., Methods and apparatus for integrating large and small lot electronic device fabrication facilities.
    상세보기
  7. Duffin, David C.; Jessop, Daniel R.; Teferra, Michael; Puri, Amitabh; Warner, Glade L., Methods and apparatus for material control system interface.
    상세보기
  8. Duffin, David C.; Jessop, Daniel R.; Teferra, Michael; Puri, Amitabh; Warner, Glade L., Methods and apparatus for material control system interface.
    상세보기
  9. Brill, Todd J.; Teferra, Michael; Puri, Amitabh; Jessop, Daniel R.; Warner, Glade L.; Duffin, David C., Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility.
    상세보기
  10. Lei, Lawrence Chung-Lai; Mak, Alfred; Liu, Rex; Park, Kon; Wu, Tzy-Chung Terry; Zhu, Simon; Shin, Gene; Wang, Xiaoming, Methods and systems of transferring a substrate to minimize heat loss.
    상세보기
  11. Lei, Lawrence Chung-Lai; Mak, Alfred; Liu, Rex; Park, Kon; Pak, Samuel S.; Wu, Tzy-Chung Terry; Zhu, Simon; Rose, Ronald L.; Shin, Gene; Wang, Xiaoming, Methods and systems of transferring, docking and processing substrates.
    상세보기
  12. Lei, Lawrence Chung-Lai; Mak, Alfred; Liu, Rex; Park, Kon; Pak, Samuel S.; Wu, Tzy-Chung Terry; Zhu, Simon; Rose, Ronald L.; Shin, Gene; Wang, Xiaoming, Methods and systems of transferring, docking and processing substrates.
    상세보기
  13. Chen, Tsan I; Chen, Yu-Kun, Object carrier transport system and method of transporting object carriers.
    상세보기
  14. Yamagishi,Takashi; Kato,Kazufumi; Miura,Takuma; Ozawa,Katsutoshi, Transportation state notification system and method, and information storage medium.
    상세보기
  15. Yamagishi, Takashi; Kato, Kazufumi; Miura, Takuma; Ozawa, Katsutoshi, Transportation state notification system and method, program, and information storage medium.
    상세보기

관련 콘텐츠

섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로