$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Process for the production of thin semiconductor material films 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/42
  • H01L-021/02
  • H01L-021/324
  • H01L-021/477
  • H01L-029/12
  • H01L-029/02
출원번호 US-0449786 (2003-05-30)
우선권정보 FR-91 11491(1991-09-18)
발명자 / 주소
  • Bruel,Michel
출원인 / 주소
  • Commissariat a l'energie Atomique
대리인 / 주소
    Brinks Hofer Gilson & Lione
인용정보 피인용 횟수 : 176  인용 특허 : 61

초록

초록이 없습니다.

대표청구항

대표청구항이 없습니다.

이 특허에 인용된 특허 (61)

  1. Pankove ; Jacques I., Apparatus and method for maskless ion implantation.
    상세보기
  2. Fournier Eugene (Garden City MI), Apparatus for microwave glow discharge deposition.
    상세보기
  3. Wallis ; George, Application of field-assisted bonding to the mass production of silicon type pressure transducers.
    상세보기
  4. Auton John P. (Huntingdon GB2), Blade shields.
    상세보기
  5. Parrillo Louis C. (Austin TX) Cosentino Stephen J. (Mesa AZ) Bergami Bridgette A. (Mesa AZ), CMOS process.
    상세보기
  6. Gorinas Guy (Annecy FR), Device for the rapid depositing of oxides in thin layers which adhere well to plastic supports.
    상세보기
  7. Moslehi Mehrdad M. (Dallas TX) Huang Steve S. (Dallas TX), Distributed ECR remote plasma processing and apparatus.
    상세보기
  8. Phillips Richard J. (Billerica MA) Glicksman Leon R. (Lynnfield MA) Larson Ralph (Bolton MA), Forced-convection, liquid-cooled, microchannel heat sinks.
    상세보기
  9. White Gerald W. (5835 Elm Lawn St. Dallas TX 75228), Gasless ion plating.
    상세보기
  10. White Gerald W. (Dallas TX) Volkers Jack C. (Elgin IL), Gasless ion plating process and apparatus.
    상세보기
  11. Pease Roger F. (Stanford CA) Tuckerman David B. (Stanford CA) Swanson Richard M. (Los Altos CA), Heat sink and method of attaching heat sink to a semiconductor integrated circuit and the like.
    상세보기
  12. Ellenberger Charles E. (Elko NV) Bower George L. (Elko NV) Snow William R. (Sunnyvale CA), Independently variably controlled pulsed R.F. plasma chemical vapor processing.
    상세보기
  13. King ; William J., Ion beam implantation-sputtering.
    상세보기
  14. Kanai Norio (Chofu JPX), Ion implanter.
    상세보기
  15. Cann Gordon L. (P.O. Box 279 Laguna Beach CA 92652), Magnetoplasmadynamic apparatus and process for the separation and deposition of materials.
    상세보기
  16. Gotou Hiroshi (Niiza JPX), Manufacturing method for semiconductor device.
    상세보기
  17. Rouse George V. (Indialantic FL) Reinecke Paul S. (Indialantic FL) McLachlan Craig J. (Melbourne Beach FL), Manufacturing ultra-thin wafer using a handle wafer.
    상세보기
  18. Conrad John R. (Madison WI), Method and apparatus for plasma source ion implantation.
    상세보기
  19. Ogle John S. (Milpitas CA), Method and apparatus for producing magnetically-coupled planar plasma.
    상세보기
  20. Wittmaack Klaus (Munich DEX), Method and apparatus for the quantitative, depth differential analysis of solid samples with the use of two ion beams.
    상세보기
  21. Berg ; Joseph E. ; Brown ; Jr. ; Randolph E., Method for depositing film on a substrate.
    상세보기
  22. Kamijo Hiroyuki (Yokohama JPX) Mikata Yuuichi (Kawasaki JPX), Method for manufacturing a semiconductor device and suppressing the generation of bulk microdefects near the substrate s.
    상세보기
  23. Hubler Graham K. (Alexandria VA) Donovan Edward P. (Annandale VA) Van Vechten Deborah (Baltimore MD), Method for producing substoichiometric silicon nitride of preselected proportions.
    상세보기
  24. Ito Tatsuo (Niigata JPX) Nakazato Yasuaki (Nagano JPX), Method for production of bonded wafer.
    상세보기
  25. Mizuno Bunji (Ikoma JPX) Kubota Masafumi (Osaka JPX), Method for removing impurities existing in semiconductor substrate.
    상세보기
  26. White Gerald W. (Dallas TX), Method for resisting galling.
    상세보기
  27. Kaufmann Helmut (Triesen LIX), Method of depositing hard wear-resistant coatings on substrates.
    상세보기
  28. Beitman Bruce A. (Palm Bay FL), Method of making dielectrically isolated integrated circuits using oxygen implantation and expitaxial growth.
    상세보기
  29. Brown Dale M. (Schenectady NY), Method of making integrated circuits.
    상세보기
  30. Brown Dale M. (Schenectady NY) Vosburgh Kirby G. (Schenectady NY), Method of making integrated circuits utilizing ion implantation and selective epitaxial growth.
    상세보기
  31. Li Jianming (Beijing CNX), Method of making silicon material with enhanced surface mobility by hydrogen ion implantation.
    상세보기
  32. Godbey David J. (Bethesda MD) Hughes Harold L. (West River MD) Kub Francis J. (Severna Park MD), Method of producing a thin silicon-on-insulator layer.
    상세보기
  33. Suzuki Yasuhiro (Fuchu JPX) Mori Sumio (Fuchu JPX) Fujiyama Eiji (Fuchu JPX) Sasaki Masami (Fuchu JPX), Microwave plasma treatment apparatus.
    상세보기
  34. Rough J. Kirkwood H. (264 S. 14th St. San Jose CA 95112) Rose Peter W. (1000 Almanor Ave. Menlo Park CA 94025), Multiple electrode plasma reactor power distribution system.
    상세보기
  35. Jackson Thomas M. (Bishops Stortford GB2) Heinecke Rudolf A. H. (Harlow GB2) Ojha Sureshchandra M. (Harlow GB2), Optical fibre manufacture.
    상세보기
  36. Popov Oleg A. (Franklin MA), Plasma generation in electron cyclotron resonance.
    상세보기
  37. Weiss Armin K. (Rochester NY) Clarke John R. (Rochester NY), Plasma plating.
    상세보기
  38. Barna Gabriel G. (Richardson TX) Ratliff Charles (Richardson TX), Process and apparatus for detecting aberrations in production process operations.
    상세보기
  39. Dolins Steven B. (Dallas TX) Srivastava Aditya (Richardson TX) Flinchbaugh Bruce E. (Dallas TX) Gunturi Sarma S. (Richardson TX) Lassiter Thomas W. (Garland TX) Love Robert L. (McKinney TX), Process and apparatus for detecting aberrations in production process operations.
    상세보기
  40. Bruel Michel (Veurey FRX) Soubie Alain (St. Egreve FRX) Spinelli Philippe (La Tronche FRX), Process and apparatus for implanting particles in a solid.
    상세보기
  41. Bruel, Michel, Process and apparatus for obtaining beams of particles with a spatially modulated density.
    상세보기
  42. Wilkes Donald F. (Albuquerque NM), Process for cleaving crystalline materials.
    상세보기
  43. Bruel Michel (Veurey FRX) Spinelli Philippe (La Tronche FRX), Process for doping semiconductors.
    상세보기
  44. Bruel Michel (Veurey-Voroize FRX) Floccari Michel (Grenoble FRX), Process for doping semiconductors.
    상세보기
  45. Kirkpatrick Allen R. (Lowell MA), Process for fabricating thin film and glass sheet laminate.
    상세보기
  46. Bruel Michel (Veurey FRX) du Port de Poncharra Jean (St. Martin-Le-Vinoux FRX), Process for producing an insulating layer buried in a semiconductor substrate by ion implantation.
    상세보기
  47. Kramler, Josef; Kuhn-Kuhnenfeld, Franz; Gerber, Hans-Adolf, Process for the manufacture of semiconductor wafers with a rear side having a gettering action.
    상세보기
  48. Margail Jacques (Grenoble FRX) Stoemenos John (Salonica GRX), Process for the production of an insulating layer embedded in a semiconductor substrate by ionic implantation and semico.
    상세보기
  49. Bruel Michel (Veurey FRX), Process for the production of thin semiconductor material films.
    상세보기
  50. Speri Roger (Conflans Sainte Honorine FRX), Process for thermochemical treatments of metals by ionic bombardment.
    상세보기
  51. Boulos Maher (Sherbrooke CAX) Jurewicz Jerzy (Sherbrooke CAX), Process of depositing particulate material on a substrate.
    상세보기
  52. Dautremont-Smith, William C.; Katz, Avishay; Koszi, Louis A.; Segner, Bryan P.; Thomas, Peter M., Rapid thermal processing method of making a semiconductor device.
    상세보기
  53. Parsons James D. (Newbury Park CA) Stafsudd Oscar (Los Angeles CA), Silicon carbide:metal carbide alloy semiconductor and method of making the same.
    상세보기
  54. Foerstner Juergen A. (Mesa AZ) Hughes Henry G. (Scottsdale AZ) D\Aragona Frank S. (Scottsdale AZ), Silicon film with improved thickness control.
    상세보기
  55. Drews Klaus (Halstenbek DT) Krumme Jens-Peter (Hamburg DT), Substrate holder for etching thin films.
    상세보기
  56. Heinecke Rudolf A. H. (Harlow GBX) Ojha Suresh M. (Harlow GBX) Llewellyn Ian P. (Harlow GBX), Surface treatment of plastics material.
    상세보기
  57. Bruel Michel (Veurey FRX) Escaron Jean (Sassenage FRX) Labartino Joseph (Voreppe FRX), Target holder with mechanical scanning.
    상세보기
  58. Altoz Frank E. (Baltimore MD) Porter Richard F. (Millersville MD), Thermal switch.
    상세보기
  59. Shyr Richard (Greenlawn NY), Wafer level process for fabricating passivated semiconductor devices.
    상세보기
  60. Yamaguchi Jun (Hyogo JPX) Shikatani Osamu (Hyogo JPX), Wafer of semiconductors.
    상세보기
  61. Ecer Gunes M. (Irvine CA) Wood Susan (Pittsburgh PA) Schreurs Jan J. (Plum Boro PA), Wear resistant steel articles with carbon, oxygen and nitrogen implanted in the surface thereof.
    상세보기

이 특허를 인용한 특허 (176)

  1. Matthews, Michael W.; Phatak, Sunil B., Asymmetrical wafer configurations and method for creating the same.
    상세보기
  2. Matthews, Michael W; Phatak, Sunil B., Asymmetrical wafer configurations and method for creating the same.
    상세보기
  3. Sadaka, Mariam; Radu, Ionut, Bonded processed semiconductor structures and carriers.
    상세보기
  4. Sadaka, Mariam; Radu, Ionut, Bonded processed semiconductor structures and carriers.
    상세보기
  5. Lee, Sang-Yun, Bonded semiconductor structure and method of making the same.
    상세보기
  6. Mazure, Carlos; Nguyen, Bich-Yen; Sadaka, Mariam, Bonded semiconductor structures and method of forming same.
    상세보기
  7. Sadaka, Mariam, Bonded semiconductor structures including two or more processed semiconductor structures carried by a common substrate.
    상세보기
  8. Zuniga, Steven M.; Tolles, Robert D.; Aqui, Derek G.; Nagengast, Andrew J.; Senn, Anthony J.; Guerrero, Keenan Leon, Bonding apparatus and method.
    상세보기
  9. Zuniga, Steven M.; Tolles, Robert D.; Aqui, Derek G.; Nagengast, Andrew J.; Senn, Anthony J.; Guerrero, Keenan Leon, Bonding apparatus and method.
    상세보기
  10. Zahurak, John K.; Tang, Sanh D.; Heineck, Lars P.; Roberts, Martin C.; Mueller, Wolfgang; Liu, Haitao, Circuit structures, memory circuitry, and methods.
    상세보기
  11. Blake, Julian G.; Murphy, Paul J., Cooled cleaving implant.
    상세보기
  12. Yamazaki, Shunpei, Display device and method for manufacturing the same.
    상세보기
  13. Yamazaki, Shunpei, Display device, method for manufacturing display device, and SOI substrate.
    상세보기
  14. Yamazaki, Shunpei, Display device, method for manufacturing display device, and SOI substrate.
    상세보기
  15. Tang, Sanh D.; Zahurak, John K.; Juengling, Werner, Floating body cell structures, devices including same, and methods for forming same.
    상세보기
  16. Tang, Sanh D.; Zahurak, John K.; Juengling, Werner, Floating body cell structures, devices including same, and methods for forming same.
    상세보기
  17. Tang, Sanh D.; Zahurak, John K.; Juengling, Werner, Floating body cell structures, devices including same, and methods for forming same.
    상세보기
  18. Tang, Sanh D.; Zahurak, John K.; Juengling, Werner, Floating body cell structures, devices including same, and methods for forming same.
    상세보기
  19. Joly, Jean-Pierre; Ulmer, Laurent; Parat, Guy, Integrated circuit on high performance chip.
    상세보기
  20. Sandhu, Gurtej S.; Parat, Krishna K., Integrated circuit structures, semiconductor structures, and semiconductor die.
    상세보기
  21. Sadaka, Mariam, Interposers including fluidic microchannels and related structures and methods.
    상세보기
  22. Sadaka, Mariam; Radu, Ionut, Low temperature layer transfer process using donor structure with material in recesses in transfer layer, semiconductor structures fabricated using such methods.
    상세보기
  23. Koyama, Masaki; Momo, Junpei; Higa, Eiji; Honda, Hiroaki; Moriwaka, Tamae; Shimomura, Akihisa, Manufacturing method of SOI semiconductor device.
    상세보기
  24. Moriwaka, Tomoaki, Manufacturing method of SOI substrate.
    상세보기
  25. Ohnuma, Hideto, Manufacturing method of SOI substrate.
    상세보기
  26. Sekiguchi, Keiichi; Hanaoka, Kazuya; Ito, Daigo, Manufacturing method of SOI substrate.
    상세보기
  27. Ohnuma, Hideto; Momo, Junpei; Yamazaki, Shunpei, Manufacturing method of SOI substrate and manufacturing method of semiconductor device.
    상세보기
  28. Yamazaki, Shunpei, Manufacturing method of SOI substrate provided with barrier layer.
    상세보기
  29. Tanaka, Koichiro, Manufacturing method of semiconductor substrate.
    상세보기
  30. Kato, Sho; Kuriki, Kazutaka, Manufacturing method of single crystal semiconductor film and manufacturing method of electrode.
    상세보기
  31. Yamazaki, Shunpei; Furuno, Makoto, Manufacturing method of substrate provided with semiconductor films.
    상세보기
  32. Yamazaki, Shunpei; Furuno, Makoto, Manufacturing method of substrate provided with semiconductor films.
    상세보기
  33. Tang, Sanh D., Memory cells, memory arrays, methods of forming memory cells, and methods of forming a shared doped semiconductor region of a vertically oriented thyristor and a vertically oriented access transistor.
    상세보기
  34. Tang, Sanh D., Memory cells, memory arrays, methods of forming memory cells, and methods of forming a shared doped semiconductor region of a vertically oriented thyristor and a vertically oriented access transistor.
    상세보기
  35. Werkhoven, Christiaan J.; Arena, Chantal, Metallic carrier for layer transfer and methods for forming the same.
    상세보기
  36. Werkhoven, Christiaan J.; Arena, Chantal, Metallic carrier for layer transfer and methods for forming the same.
    상세보기
  37. Bruel, Michel, Method and device for fabricating a layer in semiconductor material.
    상세보기
  38. Sandhu, Gurtej S., Method and structure for integrating capacitor-less memory cell with logic.
    상세보기
  39. Sandhu, Gurtej S., Method and structure for integrating capacitor-less memory cell with logic.
    상세보기
  40. Sandhu, Gurtej S., Method and structure for integrating capacitor-less memory cell with logic.
    상세보기
  41. Matthews, Michael W.; Phatak, Sunil B., Method for creating asymmetrical wafer.
    상세보기
  42. Nguyen, Bich-Yen; Schwarzenbach, Walter; Maleville, Christophe, Method for fabricating semiconductor layers including transistor channels having different strain states, and related semiconductor layers.
    상세보기
  43. Nguyen, Bich-Yen; Schwarzenbach, Walter; Maleville, Christophe, Method for fabricating semiconductor layers including transistor channels having different strain states, and related semiconductor layers.
    상세보기
  44. Nguyen, Bich-Yen; Sadaka, Mariam; Maleville, Christophe, Method for fabricating semiconductor structures including fin structures with different strain states, and related semiconductor structures.
    상세보기
  45. Nguyen, Bich-Yen; Sadaka, Mariam; Maleville, Christophe, Method for fabricating semiconductor structures including fin structures with different strain states, and related semiconductor structures.
    상세보기
  46. Nguyen, Bich-Yen; Sadaka, Mariam; Maleville, Christophe, Method for fabricating semiconductor structures including fin structures with different strain states, and related semiconductor structures.
    상세보기
  47. Sadaka, Mariam; Nguyen, Bich-Yen; Radu, Ionut, Method for fabricating semiconductor structures including transistor channels having different strain states, and related semiconductor structures.
    상세보기
  48. Komatsu, Yoshihiro; Moriwaka, Tomoaki; Takahashi, Kojiro, Method for forming SOI substrate and apparatus for forming the same.
    상세보기
  49. Fournel, Franck; Moriceau, Hubert; Lagahe, Christelle, Method for making a stressed structure designed to be dissociated.
    상세보기
  50. Deguet, Chrystel; Clavelier, Laurent, Method for making a thin-film element.
    상세보기
  51. Koezuka, Junichi; Ohnuma, Hideto, Method for manufacturing SOI substrate.
    상세보기
  52. Ohnuma, Hideto; Shingu, Takashi; Kakehata, Tetsuya; Kuriki, Kazutaka; Yamazaki, Shunpei, Method for manufacturing SOI substrate.
    상세보기
  53. Ohnuma, Hideto; Yamazaki, Shunpei, Method for manufacturing SOI substrate.
    상세보기
  54. Shimomura, Akihisa; Ohnuma, Hideto; Momo, Junpei; Yamazaki, Shunpei, Method for manufacturing SOI substrate.
    상세보기
  55. Shimomura, Akihisa; Tokunaga, Hajime, Method for manufacturing SOI substrate.
    상세보기
  56. Yamazaki, Shunpei; Nishida, Eriko, Method for manufacturing SOI substrate and method for manufacturing semiconductor device.
    상세보기
  57. Yamazaki, Shunpei; Nishida, Eriko; Shimazu, Takashi, Method for manufacturing SOI substrate and method for manufacturing semiconductor device.
    상세보기
  58. Shimomura, Akihisa; Isaka, Fumito; Kato, Sho; Hirose, Takashi, Method for manufacturing SOI substrate and method for manufacturing single crystal semiconductor layer.
    상세보기
  59. Yamazaki, Shunpei; Nishida, Eriko; Shimazu, Takashi, Method for manufacturing SOI substrate and semiconductor device.
    상세보기
  60. Yamazaki, Shunpei; Nishida, Eriko; Shimazu, Takashi, Method for manufacturing SOI substrate in which crystal defects of a single crystal semiconductor layer are reduced and method for manufacturing semiconductor device.
    상세보기
  61. Tanaka, Koichiro, Method for manufacturing a SOI with plurality of single crystal substrates.
    상세보기
  62. Shimomura, Akihisa; Tsukamoto, Naoki, Method for manufacturing a semiconductor substrate by laser irradiation.
    상세보기
  63. Akiyama, Shoji, Method for manufacturing bonded wafer.
    상세보기
  64. Yamazaki, Shunpei; Arai, Yasuyuki, Method for manufacturing semiconductor device.
    상세보기
  65. Yamazaki, Shunpei; Momo, Junpei; Isaka, Fumito; Higa, Eiji; Koyama, Masaki; Shimomura, Akihisa, Method for manufacturing semiconductor device.
    상세보기
  66. Yamazaki, Shunpei; Ohnuma, Hideto, Method for manufacturing semiconductor device.
    상세보기
  67. Yamazaki, Shunpei, Method for manufacturing semiconductor substrate.
    상세보기
  68. Isaka, Fumito; Kato, Sho; Arita, Yu; Shimomura, Akihisa, Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device.
    상세보기
  69. Tsukamoto, Naoki; Shimomura, Akihisa, Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device.
    상세보기
  70. Yamazaki, Shunpei, Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device.
    상세보기
  71. Yamazaki, Shunpei, Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device.
    상세보기
  72. Yamazaki, Shunpei, Method for manufacturing semiconductor substrate and semiconductor device.
    상세보기
  73. Yamazaki, Shunpei; Ohnuma, Hideto; Koyama, Jun, Method for manufacturing semiconductor substrate, display panel, and display device.
    상세보기
  74. Tauzin, Aurélie; Dechamp, Jérôme; Mazen, Frédéric; Madeira, Florence, Method for preparing thin GaN layers by implantation and recycling of a starting substrate.
    상세보기
  75. Nguyen, Nguyet-Phuong; Cayrefourcq, Ian; Lagahe-Blanchard, Christelle; Bourdelle, Konstantin; Tauzin, Aurélie; Fournel, Franck, Method for self-supported transfer of a fine layer by pulsation after implantation or co-implantation.
    상세보기
  76. Dross, Frederic; Van Kerschaver, Emmanuel; Beaucarne, Guy, Method for the production of thin layer of silicon by utilization of mismatch in coefficient of thermal expansion between screen printed metal layer and silicon mother substrate.
    상세보기
  77. Dross, Frédéric; Van Kerschaver, Emmanuel; Beaucarne, Guy, Method for the production of thin substrates.
    상세보기
  78. Yamazaki, Shunpei; Ohtani, Hisashi, Method of fabricating a semiconductor device.
    상세보기
  79. Yamazaki, Shunpei; Ohtani, Hisashi, Method of fabricating a semiconductor device.
    상세보기
  80. Yamazaki, Shunpei; Ohtani, Hisashi, Method of fabricating a semiconductor device.
    상세보기
  81. Yamazaki, Shunpei; Ohtani, Hisashi, Method of fabricating a semiconductor device.
    상세보기
  82. Yamazaki, Shunpei; Ohtani, Hisashi, Method of fabricating a semiconductor device.
    상세보기
  83. Yamazaki, Shunpei; Ohtani, Hisashi, Method of fabricating a semiconductor device.
    상세보기
  84. Yamazaki, Shunpei, Method of manufacturing a semiconductor device.
    상세보기
  85. Yamazaki, Shunpei, Method of manufacturing a semiconductor device.
    상세보기
  86. Yamazaki, Shunpei, Method of manufacturing a semiconductor device.
    상세보기
  87. Yamazaki, Shunpei, Method of manufacturing a semiconductor device.
    상세보기
  88. Yamazaki, Shunpei, Method of manufacturing a semiconductor device.
    상세보기
  89. Yamazaki, Shunpei, Method of manufacturing a semiconductor device having a gate electrode formed over a silicon oxide insulating layer.
    상세보기
  90. Yamazaki, Shunpei, Method of manufacturing a semiconductor device including thermal oxidation to form an insulating film.
    상세보기
  91. Yamazaki, Shunpei, Method of manufacturing semiconductor device having island-like single crystal semiconductor layer.
    상세보기
  92. Aspar, Bernard; Bruel, Michel; Poumeyrol, Thierry, Method of producing a thin layer of semiconductor material.
    상세보기
  93. Fournel, Franck, Method of transferring a thin layer onto a target substrate having a coefficient of thermal expansion different from that of the thin layer.
    상세보기
  94. Arena, Chantal, Methods and structures for altering strain in III-nitride materials.
    상세보기
  95. Sadaka, Mariam, Methods for fabrication of semiconductor structures including interposers with conductive vias, and related structures and devices.
    상세보기
  96. Sadaka, Mariam; Aspar, Bernard; Blanchard, Chrystelle Lagahe, Methods for fabrication of semiconductor structures using laser lift-off process, and related semiconductor structures.
    상세보기
  97. Sinha, Nishant; Parat, Krishna K., Methods for forming three-dimensional memory devices, and related structures.
    상세보기
  98. Sinha, Nishant; Parat, Krishna K., Methods for forming three-dimensional memory devices, and related structures.
    상세보기
  99. Letertre, Fabrice, Methods of fabricating semiconductor structures and devices using glass bonding layers, and semiconductor structures and devices formed by such methods.
    상세보기
  100. Arena, Chantal; McFelea, Heather, Methods of fabricating semiconductor structures and devices using quantum dot structures and related structures.
    상세보기
  101. Letertre, Fabrice, Methods of fabricating semiconductor structures and devices with strained semiconductor material.
    상세보기
  102. Arena, Chantal, Methods of fabricating semiconductor structures or devices using layers of semiconductor material having selected or controlled lattice parameters.
    상세보기
  103. Arena, Chantal, Methods of fabricating semiconductor structures or devices using layers of semiconductor material having selected or controlled lattice parameters.
    상세보기
  104. Werkhoven, Christiaan J.; Arena, Chantal, Methods of fabricating semiconductor structures using thermal spray processes, and semiconductor structures fabricated using such methods.
    상세보기
  105. Sadaka, Mariam, Methods of forming III-V semiconductor structures using multiple substrates, and semiconductor devices fabricated using such methods.
    상세보기
  106. Nguyen, Bich-Yen; Sadaka, Mariam, Methods of forming bonded semiconductor structures including interconnect layers having one or more of electrical, optical, and fluidic interconnects therein, and bonded semiconductor structures formed using such methods.
    상세보기
  107. Sadaka, Mariam, Methods of forming bonded semiconductor structures including two or more processed semiconductor structures carried by a common substrate, and semiconductor structures formed by such methods.
    상세보기
  108. Sadaka, Mariam; Radu, Ionut, Methods of forming bonded semiconductor structures using a temporary carrier having a weakened ion implant region for subsequent separation along the weakened region.
    상세보기
  109. Sandhu, Gurtej S.; Parat, Krishna K., Methods of forming integrated circuits using donor and acceptor substrates.
    상세보기
  110. Arena, Chantal, Methods of forming layers of semiconductor material having reduced lattice strain, semiconductor structures, devices and engineered substrates including same.
    상세보기
  111. Letertre, Fabrice; Faure, Bruce; Krames, Michael R.; Gardner, Nathan F., Methods of forming relaxed layers of semiconductor materials, semiconductor structures, devices and engineered substrates including same.
    상세보기
  112. Werkhoven, Christiaan J., Methods of forming semiconductor structures including III-V semiconductor material using substrates comprising molybdenum.
    상세보기
  113. Werkhoven, Christiaan J., Methods of forming semiconductor structures including III-V semiconductor material using substrates comprising molybdenum, and structures formed by such methods.
    상세보기
  114. Sadaka, Mariam; Aspar, Bernard; Blanchard, Chrystelle Lagahe, Methods of forming semiconductor structures including MEMS devices and integrated circuits on common sides of substrates, and related structures and devices.
    상세보기
  115. Sadaka, Mariam; Aspar, Bernard; Blanchard, Chrystelle Lagahe, Methods of forming semiconductor structures including MEMS devices and integrated circuits on opposing sides of substrates, and related structures and devices.
    상세보기
  116. Nguyen, Bich-Yen; Sadaka, Mariam, Methods of forming three dimensionally integrated semiconductor systems including photoactive devices and semiconductor-on-insulator substrates.
    상세보기
  117. Nguyen, Bich-Yen; Sadaka, Mariam, Methods of forming three-dimensionally integrated semiconductor systems including photoactive devices and semiconductor-on-insulator substrates.
    상세보기
  118. Sadaka, Mariam; Radu, Ionut, Methods of providing thin layers of crystalline semiconductor material, and related structures and devices.
    상세보기
  119. Sadaka, Mariam; Radu, Ionut, Methods of transferring layers of material in 3D integration processes and related structures and devices.
    상세보기
  120. Tang, Sanh D.; Zahurak, John K., Methods, structures and devices for increasing memory density.
    상세보기
  121. Tang, Sanh D.; Zahurak, John K., Methods, structures and devices for increasing memory density.
    상세보기
  122. Yamazaki, Shunpei; Ohtani, Hisashi; Koyama, Jun; Fukunaga, Takeshi, Nonvolatile memory and electronic apparatus.
    상세보기
  123. Newman, Fred, Photoactive devices having low bandgap active layers configured for improved efficiency and related methods.
    상세보기
  124. Fukunaga, Takeshi, Process for production of SOI substrate and process for production of semiconductor device.
    상세보기
  125. Fukunaga, Takeshi, Process for production of SOI substrate and process for production of semiconductor device including the selective forming of porous layer.
    상세보기
  126. Moriceau, Hubert; Bruel, Michel; Aspar, Bernard; Maleville, Christophe, Process for the transfer of a thin film comprising an inclusion creation step.
    상세보기
  127. Moriceau, Hubert; Bruel, Michel; Aspar, Bernard; Maleville, Christophe, Process for the transfer of a thin film comprising an inclusion creation step.
    상세보기
  128. Yamazaki, Shunpei; Ohnuma, Hideto, SOI substrate and method for manufacturing SOI substrate.
    상세보기
  129. Yamazaki, Shunpei; Togawa, Maki; Arai, Yasuyuki, SOI substrate and method for manufacturing SOI substrate.
    상세보기
  130. Yamazaki, Shunpei; Togawa, Maki; Arai, Yasuyuki, SOI substrate and method for manufacturing SOI substrate.
    상세보기
  131. Ohnuma, Hideto; Higa, Eiji, SOI substrate and method for manufacturing the same.
    상세보기
  132. Ohnuma, Hideto; Kakehata, Tetsuya; Iikubo, Yoichi, SOI substrate, method for manufacturing the same, and semiconductor device.
    상세보기
  133. Ohnuma, Hideto; Kakehata, Tetsuya; Iikubo, Yoichi, SOI substrate, method for manufacturing the same, and semiconductor device.
    상세보기
  134. Ohnuma, Hideto; Kakehata, Tetsuya; Iikubo, Yoichi, SOI substrate, method for manufacturing the same, and semiconductor device.
    상세보기
  135. Tang, Sanh D.; Zahurak, John K., Semiconductor cells, arrays, devices and systems having a buried conductive line and methods for forming the same.
    상세보기
  136. Tang, Sanh D.; Zahurak, John K., Semiconductor cells, arrays, devices and systems having a buried conductive line and methods for forming the same.
    상세보기
  137. Tang, Sanh D.; Zahurak, John K., Semiconductor cells, arrays, devices and systems having a buried conductive line and methods for forming the same.
    상세보기
  138. Tang, Sanh D.; Zahurak, John K., Semiconductor cells, arrays, devices and systems having a buried conductive line and methods for forming the same.
    상세보기
  139. Yamazaki, Shunpei, Semiconductor device.
    상세보기
  140. Takemura, Yasuhiko; Teramoto, Satoshi, Semiconductor device and a method for manufacturing the same.
    상세보기
  141. Takemura, Yasuhiko; Teramoto, Satoshi, Semiconductor device and a method for manufacturing the same.
    상세보기
  142. Takemura, Yasuhiko; Teramoto, Satoshi, Semiconductor device and a method for manufacturing the same.
    상세보기
  143. Yamazaki, Shunpei, Semiconductor device and method for manufacturing the same.
    상세보기
  144. Yamazaki, Shunpei; Koezuka, Junichi; Kakehata, Tetsuya, Semiconductor device and method for manufacturing the same.
    상세보기
  145. Yamazaki, Shunpei; Ohtani, Hisashi; Koyama, Jun; Fukunaga, Takeshi, Semiconductor device having buried oxide film.
    상세보기
  146. Tang, Sanh D.; Zhang, Ming, Semiconductor devices including a diode structure over a conductive strap and methods of forming such semiconductor devices.
    상세보기
  147. Tang, Sanh D.; Zhang, Ming, Semiconductor devices including a diode structure over a conductive strap and methods of forming such semiconductor devices.
    상세보기
  148. Werkhoven, Christiaan J.; Arena, Chantal, Semiconductor devices including substrate layers and overlying semiconductor layers having closely matching coefficients of thermal expansion, and related methods.
    상세보기
  149. Lee, Sang-Yun, Semiconductor memory device.
    상세보기
  150. Lee, Sang-Yun, Semiconductor memory device and method of fabricating the same.
    상세보기
  151. Letertre, Fabrice, Semiconductor structures and devices including semiconductor material on a non-glassy bonding layer.
    상세보기
  152. Debray, Jean-Philippe; Arena, Chantal; McFavilen, Heather, Semiconductor structures having active regions comprising InGaN and methods of forming such semiconductor structures.
    상세보기
  153. Arena, Chantal; Debray, Jean-Philippe; Kern, Richard Scott, Semiconductor structures having active regions comprising InGaN, methods of forming such semiconductor structures, and light emitting devices formed from such semiconductor structures.
    상세보기
  154. Debray, Jean-Philippe; Arena, Chantal; McFavilen, Heather, Semiconductor structures having active regions comprising InGaN, methods of forming such semiconductor structures, and light emitting devices formed from such semiconductor structures.
    상세보기
  155. Debray, Jean-Philippe; Arena, Chantal; McFavilen, Heather; Ding, Ding; Huang, Li, Semiconductor structures having active regions comprising InGaN, methods of forming such semiconductor structures, and light emitting devices formed from such semiconductor structures.
    상세보기
  156. Arena, Chantal; Debray, Jean-Philippe; Kern, Richard Scott, Semiconductor structures having active regions comprising ingan, methods of forming such semiconductor structures, and light emitting devices formed from such semiconductor structures.
    상세보기
  157. Debray, Jean-Philippe; Arena, Chantal; McFavilen, Heather; Ding, Ding; Huang, Li, Semiconductor structures having active regions including indium gallium nitride, methods of forming such semiconductor structures, and related light emitting devices.
    상세보기
  158. Sadaka, Mariam, Semiconductor structures including fluidic microchannels for cooling and related methods.
    상세보기
  159. Sadaka, Mariam, Semiconductor structures including fluidic microchannels for cooling and related methods.
    상세보기
  160. Arena, Chantal, Semiconductor structures, devices and engineered substrates including layers of semiconductor material having reduced lattice strain.
    상세보기
  161. Arena, Chantal, Semiconductor structures, devices and engineered substrates including layers of semiconductor material having reduced lattice strain.
    상세보기
  162. Yamazaki, Shunpei; Koyama, Jun; Miyanaga, Akiharu; Fukunaga, Takeshi, Semiconductor thin film and method of manufacturing the same and semiconductor device and method of manufacturing the same.
    상세보기
  163. Tang, Sanh D.; Zhang, Ming; Bayless, Andrew M.; Zahurak, John K., Semiconductor-metal-on-insulator structures, methods of forming such structures, and semiconductor devices including such structures.
    상세보기
  164. Takafuji,Yutaka; Itoga,Takashi, Single-crystal silicon substrate, SOI substrate, semiconductor device, display device, and manufacturing method of semiconductor device.
    상세보기
  165. Letertre, Fabrice; Bethoux, Jean-Marc; Boussagol, Alice, Strain engineered composite semiconductor substrates and methods of forming same.
    상세보기
  166. Werkhoven, Christiaan J., Strain relaxation using metal materials and related structures.
    상세보기
  167. Werkhoven, Christiaan J., Strain relaxation using metal materials and related structures.
    상세보기
  168. Yamazaki, Shunpei, Substrate provided with semiconductor films and manufacturing method thereof.
    상세보기
  169. Lee, Sang-Yun, Three-dimensional integrated circuit structure.
    상세보기
  170. Tang, Sanh D., Thyristor based memory cells, devices and systems including the same and methods for forming the same.
    상세보기
  171. Tang, Sanh D., Thyristor-based memory cells, devices and systems including the same and methods for forming the same.
    상세보기
  172. Tang, Sanh D., Thyristor-based memory cells, devices and systems including the same and methods for forming the same.
    상세보기
  173. Nemati, Farid; Robins, Scott T.; Gupta, Rajesh N., Thyristors.
    상세보기
  174. Nemati, Farid; Robins, Scott T.; Gupta, Rajesh N., Thyristors, methods of programming thyristors, and methods of forming thyristors.
    상세보기
  175. Ko, Donggeun, Ultra-flat, high throughput wafer lapping process.
    상세보기
  176. Ko, Donggeun, Ultra-flat, high throughput wafer lapping process.
    상세보기

관련 콘텐츠

섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로