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Temperature compensation for silicon MEMS resonator 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H03H-009/02
  • H03H-009/46
  • H03H-009/00
출원번호 US-0405817 (2006-04-18)
발명자 / 주소
  • Lutz,Markus
  • Partridge,Aaron
출원인 / 주소
  • Robert Bosch GmbH
인용정보 피인용 횟수 : 45  인용 특허 : 25

초록

초록이 없습니다.

대표청구항

대표청구항이 없습니다.

이 특허에 인용된 특허 (25)

  1. MacDonald Noel C. (Ithaca NY) Bertsch Fred M. (Ithaca NY) Shaw Kevin A. (Ithaca NY) Adams Scott G. (Ithaca NY), Capacitance based tunable micromechanical resonators.
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  2. Chan, Edward; Gasparyan, Arman, Driver and method of operating a micro-electromechanical system device.
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  3. Ma, Qing, High-speed MEMS switch with high-resonance-frequency beam.
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  4. Chan Tsiu Chiu ; DeSilva Melvin Joseph ; Sunkara Syama Sundar, Integrated released beam oscillator and associated methods.
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  5. Ma, Qing; Cheng, Peng; Rao, Valluri, MEMS-switched stepped variable capacitor and method of making same.
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  6. Nguyen, Clark T.-C., Method and apparatus for filtering signals utilizing a vibrating micromechanical resonator.
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  7. Funk Karsten,DEX ; Kulcke Hans-Martin,DEX ; Laermer Franz,DEX ; Schilp Andrea,DEX, Method and device for measuring a physical variable.
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  8. Ishii Yorishige,JPX ; Inui Tetsuya,JPX ; Matoba Hirotsugu,JPX ; Hirata Susumu,JPX ; Kimura Masaharu,JPX ; Horinaka Hajime,JPX ; Abe Shingo,JPX ; Onda Hiroshi,JPX, Method of forming a microstructure.
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  9. Milligan, Donald J., Micro-electromechanical actuator and methods of use.
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  10. Qing Ma ; Peng Cheng, Micro-electromechanical structure resonator, method of making, and method of using.
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  11. Qing Ma ; Peng Cheng, Micro-electromechanical structure resonator, method of making, and method of using.
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  12. Ma, Qing, Microelectromechanical (MEMS) switch using stepped actuation electrodes.
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  13. Galvin Gregory J. ; Davis Timothy J. ; MacDonald Noel C., Microelectromechanical accelerometer for automotive applications.
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  14. Hsu, Tsung-Yuan; Loo, Robert Y.; Lam, Juan F., Microelectromechanical correlation device and method.
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  15. Muchow Joerg,DEX ; Muenzel Horst,DEX ; Offenberg Michael,DEX ; Waldvogel Winfried,DEX, Micromechanical sensor and method for the manufacture thereof.
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  16. Ma, Qing; Mu, Xiao-Chun; Vu, Quat; Towle, Steve, Process for forming microelectronic packages and intermediate structures formed therewith.
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  17. Offenberg Michael (Tubingen DEX), Process for producing surface micromechanical structures.
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  18. Ma, Qing; Cheng, Peng; Rao, Valluri R., Resonator frequency correction by modifying support structures.
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  19. Kano Kazuhiko,JPX ; Nara Kenichi,JPX ; Yamamoto Toshimasa,JPX ; Kato Nobuyuki,JPX ; Gotoh Yoshitaka,JPX ; Ohtsuka Yoshinori,JPX ; Ao Kenichi,JPX, Semiconductor sensor having suspended thin-film structure and method for fabricating thin-film structure body.
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  20. Ma, Qing; Cheng, Peng, Tapered structures for generating a set of resonators with systematic resonant frequencies.
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  21. Lutz,Markus; Partridge,Aaron, Temperature compensation for silicon MEMS resonator.
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  22. Lutz,Markus; Partridge,Aaron, Temperature controlled MEMS resonator and method for controlling resonator frequency.
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  23. Ma, Qing; Cheng, Peng; Rao, Valluri, Tunable inductor using microelectromechanical switches.
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  24. Peng Cheng ; Qing Ma, Variable tunable range MEMS capacitor.
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  25. Herb, William R.; Burns, David W.; Youngner, Daniel W., Zero TCF thin film resonator.
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  1. Su, Chung-Yuan; Huang, Chao-Ta; Lee, Tzung-Ching; Hsu, Yu-Wen, Composite micro-electro-mechanical-system apparatus and manufacturing method thereof.
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  2. Chen, David M.; Kuypers, Jan H.; Gaidarzhy, Alexei; Zolfagharkhani, Guiti; Goodelle, Jason, Integration of piezoelectric materials with substrates.
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  3. Winkler, Bernhard; Nawaz, Mohsin; Schoen, Florian, MEMS resonator devices with a plurality of mass elements formed thereon.
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  4. Winkler, Bernhard; Nawaz, Mohsin; Schoen, Florian, MEMS resonator devices with a plurality of mass elements formed thereon.
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  5. Bernstein, David H.; Howe, Roger T.; Quevy, Emmanuel P., MEMS structure having a compensated resonating member.
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  6. Seeger, Joseph; Yaralioglu, Goksen G.; Cagdaser, Baris, Method and system for using a MEMS structure as a timing source.
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  7. Seeger, Joseph; Yaralioglu, Goksen G.; Cagdaser, Baris, Method and system for using a MEMS structure as a timing source.
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  8. Hagelin, Paul Merritt; Grosjean, Charles, Method for fabricating a microelectromechanical system (MEMS) resonator.
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  9. Quevy, Emmanuel P.; Bernstein, David H., Method for temperature compensation in MEMS resonators with isolated regions of distinct material.
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  10. Quevy, Emmanuel P.; Bernstein, David H., Method for temperature compensation in MEMS resonators with isolated regions of distinct material.
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  11. Quevy, Emmanuel P.; Bernstein, David H., Method for temperature compensation in MEMS resonators with isolated regions of distinct material.
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  12. Quevy, Emmanuel P.; Bernstein, David H., Method for temperature compensation in MEMS resonators with isolated regions of distinct material.
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  13. Hagelin, Paul Merritt; Grosjean, Charles, Method of manufacturing a microelectromechanical system (MEMS) resonator.
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  14. Schoepf, Klaus Juergen; Rebel, Reimund, Methods and apparatus for temperature control of devices and mechanical resonating structures.
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  15. Gaidarzhy, Alexei; Schoepf, Klaus Juergen; Mohanty, Pritiraj, Methods and devices for compensating a signal using resonators.
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  16. Pan, Wanling, Methods of forming micro-electromechanical resonators having passive temperature compensation regions therein.
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  17. Pan, Wanling, Methods of forming micro-electromechanical resonators using passive compensation techniques.
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  18. Ayazi, Farrokh; Tabrizian, Roozbeh; Casinovi, Giorgio, Methods of forming micromechanical resonators having high density trench arrays therein that provide passive temperature compensation.
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  19. Doll, Joseph C.; Miller, Nicholas; Grosjean, Charles I.; Hagelin, Paul M.; Hill, Ginel C., Microelectromechanical resonator.
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  20. Doll, Joseph C.; Miller, Nicholas; Grosjean, Charles I.; Hagelin, Paul M.; Hill, Ginel C., Microelectromechanical resonator.
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  21. Wang, Ye; Bhugra, Harmeet; Lee, Seungbae, Microelectromechanical resonators having resistive heating elements therein configured to provide frequency tuning through convective heating of resonator bodies.
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  22. Chen, David M.; Kuypers, Jan H.; Mohanty, Pritiraj; Schoepf, Klaus Juergen; Zolfagharkhani, Guiti; Goodelle, Jason; Rebel, Reimund, Microelectromechanical systems (MEMS) resonators and related apparatus and methods.
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  23. Chen, David M.; Kuypers, Jan H.; Mohanty, Pritiraj; Schoepf, Klaus Juergen; Zolfagharkhani, Guiti; Goodelle, Jason; Rebel, Reimund, Microelectromechanical systems (MEMS) resonators and related apparatus and methods.
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  24. Chen, David M.; Kuypers, Jan H.; Mohanty, Pritiraj; Schoepf, Klaus Juergen; Zolfagharkhani, Guiti; Goodelle, Jason; Rebel, Reimund, Microelectromechanical systems (MEMS) resonators and related apparatus and methods.
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  25. Chen, David M.; Kuypers, Jan H.; Mohanty, Pritiraj; Schoepf, Klaus Juergen; Zolfagharkhani, Guiti; Goodelle, Jason; Rebel, Reimund, Microelectromechanical systems (MEMS) resonators and related apparatus and methods.
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  26. Gaidarzhy, Alexei; Mohanty, Pritiraj, Micromechanical resonating devices and related methods.
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  27. Gaidarzhy, Alexei; Mohanty, Pritiraj, Micromechanical resonating devices and related methods.
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  28. Ayazi, Farrokh; Abdolvand, Reza; Lavasani, Seyed Hossein Miri, Oscillator having micro-electromechanical resonators and driver circuits therein that support in-phase and out-of-phase signals.
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  29. Quevy, Emmanuel P.; Bernstein, David A.; Motiee, Mehrnaz, Out-of plane MEMS resonator with static out-of-plane deflection.
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  30. Quevy, Emmanuel P.; Bernstein, David H.; Motiee, Mehrnaz, Out-of plane MEMS resonator with static out-of-plane deflection.
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  31. Quevy, Emmanuel P.; Bernstein, David H.; Motiee, Mehrnaz, Out-of-plane MEMS resonator with static out-of-plane deflection.
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  32. Schoen, Florian; Gruenberger, Robert; Nawaz, Mohsin; Winkler, Bernhard, Passive temperature compensation of silicon MEMS devices.
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  33. van der Avoort, Casper; Van Beek, Jozef Thomas Martinus; van Wingerden, Johannes; Bontemps, Joep; Lander, Robert James Pascoe, Resonator.
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  34. Quevy, Emmanuel P.; Seth, Manu; Motiee, Mehrnaz, Switchable electrode for power handling.
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  35. Lutz,Markus; Partridge,Aaron, Temperature compensation for silicon MEMS resonator.
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  36. Berger, Renata Melamud; Hill, Ginel C.; Hagelin, Paul M.; Grosjean, Charles I.; Partridge, Aaron; Doll, Joseph C.; Lutz, Markus, Temperature insensitive resonant elements and oscillators and methods of designing and manufacturing same.
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  37. Hagelin, Paul M.; Grosjean, Charles I., Temperature stable MEMS resonator.
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  38. Hagelin, Paul M.; Grosjean, Charles I., Temperature stable MEMS resonator.
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  39. Hagelin, Paul M.; Grosjean, Charles I., Temperature stable MEMS resonator.
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  40. Doll, Joseph C.; Hagelin, Paul M.; Hill, Ginel C.; Miller, Nicholas; Grosjean, Charles I., Temperature-engineered MEMS resonator.
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  41. Doll, Joseph C.; Hagelin, Paul M.; Hill, Ginel C.; Miller, Nicholas; Grosjean, Charles I., Temperature-engineered MEMS resonator.
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  42. Wang, Ye; Lee, Seungbae; Bhugra, Harmeet, Thin-film bulk acoustic resonators having perforated resonator body supports that enhance quality factor.
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  43. Ayazi, Farrokh; Sorenson, Logan D., Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein.
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  44. Mohanty, Pritiraj; Schoepf, Klaus Juergen; Gaidarzhy, Alexei; Zolfagharkhani, Guiti; Chen, David M.; Crowley, Matthew J., Timing oscillators and related methods.
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  45. Mohanty, Pritiraj; Schoepf, Klaus Juergen; Gaidarzhy, Alexei; Zolfagharkhani, Guiti; Chen, David M.; Crowley, Matthew J., Timing oscillators and related methods.
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