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Plasma generation and processing with multiple radiation sources 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B23K-010/00
출원번호 US-0430415 (2003-05-07)
발명자 / 주소
  • Kumar,Satyendra
  • Kumar,Devendra
출원인 / 주소
  • BTU International, Inc.
대리인 / 주소
    Weingarten, Schurgin, Gagnebin & Lebovici LLP
인용정보 피인용 횟수 : 20  인용 특허 : 180

초록

초록이 없습니다.

대표청구항

대표청구항이 없습니다.

이 특허에 인용된 특허 (180)

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