$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Wafer bonded virtual substrate and method for forming the same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/302
  • H01L-021/02
  • H01L-021/461
출원번호 US-0761918 (2004-01-20)
발명자 / 주소
  • Atwater, Jr.,Harry A.
  • Zahler,James M.
  • Morral,Anna Fontcuberta i
출원인 / 주소
  • California Institute of Technology
대리인 / 주소
    Foley & Lardner LLP
인용정보 피인용 횟수 : 7  인용 특허 : 41

초록

초록이 없습니다.

대표청구항

대표청구항이 없습니다.

이 특허에 인용된 특허 (41)

  1. Anna Lena Thilderkvist ; Paul Comita ; Lance Scudder ; Norma Riley, Apparatus and method for surface finishing a silicon film.
  2. Streicher Christian (Rueil Malmaison FRX) Asselineau Lionel (Paris FRX), Combined distillation and permeation process for the separation of oxygenated compounds from hydrocarbons and use thereo.
  3. Minkkinen Ari,FRX ; Burzynski Jean-Pierre,FRX ; Larue Joseph,FRX, Device for catalytic dehydrogenation of a C.sub.2+ paraffinic charge comprising means for inhibiting the freezing of wat.
  4. Francis J. Kub ; Karl D. Hobart, Electronic device with composite substrate.
  5. Kub Francis J. ; Hobart Karl D., Fabrication ultra-thin bonded semiconductor layers.
  6. Ovshinsky Stanford R. (Bloomfield Hills MI) Deng Xunming (Farmington MI) Young Rosa (Troy MI), High quality photovoltaic semiconductor material and laser ablation method of fabrication same.
  7. Takasu Hiroaki (Tokyo JPX) Kojima Yoshikazu (Tokyo JPX) Kamiya Masaaki (Tokyo JPX) Yamazaki Tsuneo (Tokyo JPX) Suzuki Hiroshi (Tokyo JPX) Taguchi Masaaki (Tokyo JPX) Takano Ryuichi (Tokyo JPX) Yabe S, Light valve device making.
  8. Kub Francis J. ; Hobart Karl D., Method for fabricating singe crystal materials over CMOS devices.
  9. Andre-Jacques Auberton-Herve FR, Method for forming cavities in a semiconductor substrate by implanting atoms.
  10. Bernard Aspar FR; Michel Bruel FR; Claude Jaussaud FR; Chrystelle Lagahe FR, Method for producing a thin membrane and resulting structure with membrane.
  11. Goesele Ulrich M. ; Tong Qin-Yi, Method for the transfer of thin layers monocrystalline material onto a desirable substrate.
  12. Goesele Ulrich M. ; Tong Q.-Y., Method for the transfer of thin layers of monocrystalline material to a desirable substrate.
  13. Namba Akihiko,JPX ; Ogura Tetsuyoshi,JPX ; Tomita Yoshihiro,JPX ; Eda Kazuo,JPX, Method of manufacturing a composite substrate and a piezoelectric device using the substrate.
  14. Aspar Bernard,FRX ; Biasse Beatrice,FRX ; Bruel Michel,FRX, Method of obtaining a thin film of semiconductor material.
  15. Aspar Bernard,FRX ; Bruel Michel,FRX ; Poumeyrol Thierry,FRX, Method of producing a thin layer of semiconductor material.
  16. Godbey David J. (Bethesda MD) Hughes Harold L. (West River MD) Kub Francis J. (Severna Park MD), Method of producing a thin silicon-on-insulator layer.
  17. Abe Takao (Annaka JPX) Nakazato Yasuaki (Koshoku JPX) Uchiyama Atsuo (Koshoku JPX), Method of producing semiconductor substrate.
  18. Bozler Carl O. (Sudbury MA) Fan John C. C. (Chestnut Hill MA) McClelland Robert W. (Wevmouth MA), Method of producing sheets of crystalline material and devices made therefrom.
  19. Sullivan Gerard J. (Thousand Oaks CA) Szwed Mary K. (Huntington Beach CA) Chang Mau-Chung F. (Thousand Oaks CA), Method of transferring a thin film to an alternate substrate.
  20. Atwater, Jr.,Harry A.; Zahler,James M., Method of using a germanium layer transfer to Si for photovoltaic applications and heterostructure made thereby.
  21. Letertre, Fabrice; Ghyselen, Bruno, Methods for fabricating a substrate.
  22. Ghyselen, Bruno; Letertre, Fabrice, Methods for fabricating final substrates.
  23. Adams John R. (Pasadena TX), Oxygenate removal in MTBE process.
  24. Hisamatsu, Tadashi; Nakamura, Kazuyo; Komatsu, Yuji; Shimizu, Masafumi, Photoelectric converting device.
  25. Bailey Sheila G. (Lakewood OH) Wilt David M. (Bay Village OH) DeAngelo Frank L. (Parma OH), Preferentially etched epitaxial liftoff of InP material.
  26. Kuechler Keith H. ; Lattner James R., Process for converting oxygenates to olefins with direct product quenching for heat recovery.
  27. Marker Terry L., Process for producing polymer grade olefins.
  28. Asselineau Lionel (Paris FRX) Leonard Jacques (Montigny FRX) Chodorge Jean (Antony FRX) Gaillard Jean (Lyons FRX), Process for purifying a C4 and/or C5 hydrocarbon cut containing water and dimethyl ether as.
  29. Bruel Michel (Veurey FRX), Process for the production of thin semiconductor material films.
  30. Kaiser Steven W. (South Charleston WV), Production of light olefins.
  31. Kenney Donald M., SOI fabrication method.
  32. Ohshima Hisayoshi,JPX ; Matsui Masaki,JPX ; Onoda Kunihiro,JPX ; Yamauchi Shoichi,JPX, Semiconductor substrate manufacturing method.
  33. Strack Robert D. (Houston TX) Vebeliunas Rimas V. (Houston TX) Bamford David A. (Houston TX) Halle Roy T. (Clear Lake TX), Sequence for separating propylene from cracked gases.
  34. Kub Francis J. ; Hobart Karl D., Single-crystal material on non-single-crystalline substrate.
  35. Srikrishnan Kris V., Smart-cut process for the production of thin semiconductor material films.
  36. Hecht James Burr, Stability and enhanced gain of amplifiers using inductive coupling.
  37. Sakaguchi Kiyofumi,JPX ; Sato Nobuhiko,JPX, Substrate and production method thereof.
  38. Letertre, Fabrice; Maurice, Thibaut, Support-integrated donor wafers for repeated thin donor layer separation.
  39. Letertre, Fabrice; Maurice, Thibaut, Support-integrated donor wafers for repeated thin donor layer separation.
  40. Peterson Ronald V. (Thousand Oaks CA) Krone-Schmidt Wilfried (Fullerton CA), System for precision cleaning by jet spray.
  41. Robert W. Bower, Transposed split of ion cut materials.

이 특허를 인용한 특허 (7)

  1. Hiliali, Mohamed M.; Herner, S. Brad, Creation and translation of low-relief texture for a photovoltaic cell.
  2. Li, Zhiyong; Tanner, David; Prabhu, Gopalakrishna; Hilali, Mohamed H., Creation of low-relief texture for a photovoltaic cell.
  3. Sivaram, Srinivasan; Agarwal, Aditya; Herner, S. Brad; Petti, Christopher J., Method to form a photovoltaic cell comprising a thin lamina.
  4. Sivaram, Srinivasan; Agarwal, Aditya; Herner, S. Brad; Petti, Christopher J., Method to form a photovoltaic cell comprising a thin lamina.
  5. Sivaram, Srinivasan; Agarwal, Aditya; Herner, S. Brad; Petti, Christopher J., Method to form a photovoltaic cell comprising a thin lamina.
  6. Hilali, Mohamed M.; Petti, Christopher J., Photovoltaic cell comprising a thin lamina having low base resistivity and method of making.
  7. Yamazaki, Shunpei; Arai, Yasuyuki, Photovoltaic device and method for manufacturing the same.

문의처: helpdesk@kisti.re.kr전화: 080-969-4114

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로