A fluid actuator configured for achieving extended cycle life and reduced overall actuator height. The actuator may include a nesting arrangement between portions of the actuator to reduce overall height and provide stability. The actuator may also join movable members and include a guidance mechani
A fluid actuator configured for achieving extended cycle life and reduced overall actuator height. The actuator may include a nesting arrangement between portions of the actuator to reduce overall height and provide stability. The actuator may also join movable members and include a guidance mechanism to avoid undesired contact between actuator portions.
대표청구항▼
What is claimed is: 1. A fluid actuator for actuating a fluid component, comprising: a housing assembly defining a first compartment; a first movable actuator member disposed within the first compartment, the first movable actuator member comprising a radially extending fluid driven portion and a s
What is claimed is: 1. A fluid actuator for actuating a fluid component, comprising: a housing assembly defining a first compartment; a first movable actuator member disposed within the first compartment, the first movable actuator member comprising a radially extending fluid driven portion and a sidewall axially extending from an outer periphery of the fluid driven portion; a second movable actuator member disposed in a second compartment; a seal element disposed on the sidewall entirely above an axial midpoint of the sidewall, wherein the seal element provides a sliding seal between the movable actuator member and the housing assembly; and a biasing element acting between the housing assembly and the movable actuator member, at least a portion of the biasing element being nested with the movable actuator member; wherein the housing assembly comprises a first housing component joined to a second housing component to form the second compartment. 2. The fluid actuator of claim 1 wherein a majority of the biasing element nests with the first movable actuator member. 3. The fluid actuator of claim 1 wherein the movable actuator member includes a pocket adapted to receive at least a portion of the biasing element. 4. The fluid actuator of claim 1 further comprising a second biasing element acting between the housing assembly and the second movable actuator member, at least a portion of the second biasing element nesting with the second movable actuator member. 5. The fluid actuator of claim 1 wherein the second movable actuator member has a pocket. 6. The fluid actuator of claim 5 wherein the pocket of the second movable actuator member is adapted to nest with the housing assembly. 7. The fluid actuator of claim 1 wherein the first and second movable actuator members are closely joined to move as a one-piece member. 8. A fluid actuator for actuating a fluid component, comprising: a housing assembly comprising first and second compartments; a first movable actuator member at least partially disposed within the first compartment of the housing assembly, the first movable actuator member comprising a radially extending fluid driven portion and a stem portion axially extending directly from the fluid driven portion and away from the second compartment; and a second movable actuator member at least partially disposed within the second compartment of the housing assembly, the second movable actuator member comprising a radially extending fluid driven portion and a stem portion axially extending directly from the fluid driven portion, wherein the stem portion of the second movable actuator member extends into the first compartment and beyond the fluid driven portion of the first movable actuator member. 9. The fluid actuator of claim 8 further comprising at least one seal element supported by one or more guidance mechanisms positioned on at least one of the first and second movable actuator members for preventing contact between the housing assembly and the at least one of the first and second movable actuator members. 10. The fluid actuator of claim 9 wherein the one or more guidance mechanisms comprise one or more guide rings. 11. The fluid actuator of claim 9 wherein the guidance mechanisms are made of PTFE. 12. The fluid actuator of claim 8 wherein the first movable actuator member is closely joined with the second movable actuator member such that the first movable actuator member and second movable actuator member move as a one piece member. 13. The fluid actuator of claim 8, wherein the stem portion of the first movable actuator member comprises a counterbore, and the stem portion of the second movable actuator extends into the counterbore. 14. A fluid actuator for actuating a fluid component, comprising: a housing assembly comprising a first housing; a first movable actuator member at least partially disposed within the first housing, the first movable actuator member comprising an axially extending stem portion, a radially extending fluid driven portion surrounding the stem portion, and an annular sidewall axially extending from the fluid driven portion and surrounding the stem portion; a first seal element disposed between the stem portion and the housing assembly; and a second seal element disposed between the sidewall and the housing assembly, wherein the first and second seal elements provide a sliding seal between the first movable actuator member and the housing assembly. 15. The fluid actuator of 14 further comprising a biasing member that nests with the first movable actuator member between the stem portion and the sidewall. 16. The fluid actuator of 14 further comprising: a second housing assembled to the first housing; and a second movable actuator member at least partially disposed within the second housing, the second movable actuator member movable between a first position and a second position. 17. The fluid actuator of claim 16 further comprising a guidance mechanism for selectively preventing contact between the second housing and the second movable actuator member. 18. The fluid actuator of claim 16 wherein the second housing includes a guidance portion, the guidance portion closely fitting within the first housing to keep the concentricity of the first and second housings close. 19. The fluid actuator of 14 further comprising a guidance mechanism for selectively preventing contact between the first housing and the first movable actuator member. 20. The fluid actuator of 14 further comprising a cap nested with the first housing, the cap including a guidance portion, the guidance portion closely fitting within the first housing to keep the concentricity of the cap and first housing close. 21. The fluid actuator of 14, wherein the housing assembly comprises a cap, and the first seal element is disposed between the stem portion and the cap to provide a sliding seal between the first movable actuator member and the cap. 22. A fluid actuator for actuating a fluid component, the fluid actuator positioned along an axis, comprising: a first housing having an axially extending seal surface; a first movable actuator member disposed within the first housing, the first movable actuator member movable between a first position and a second position; a second housing assembled to the first housing; and a second movable actuator member disposed within the second housing, the second movable actuator member movable between a first position and a second position, wherein a portion of the first movable actuator member axially overlaps a portion of the seal surface when the first movable actuator member is in the first position, and wherein a portion of the second movable actuator member axially overlaps a portion of the seal surface when the second movable actuator member is in the second position. 23. A fluid actuator for actuating a fluid component, the fluid actuator positioned along an axis, comprising: a first housing having an axially extending seal surface; a first movable actuator member disposed within the first housing, the first movable actuator member movable between a first position and a second position; a second housing assembled to the first housing; and a second movable actuator member disposed within the second housing, the second movable actuator member movable between a first position and a second position, wherein a portion of the first movable actuator member axially overlaps a portion of the seal surface when the first movable actuator member is in the first position, and wherein the second movable actuator member nests with the first housing when the second movable actuator member is in the second position. 24. A movable actuator member for a fluid actuator, comprising: a radially extending fluid driven portion; a stem portion axially extending directly from the fluid driven portion and surrounded by the fluid driven portion; and an annular sidewall axially extending from an outer periphery of the fluid driven portion, the sidewall including an annular seal groove for receiving a seal element, the groove being disposed entirely above an axial midpoint of the sidewall; wherein the stem portion includes a counterbore for receiving a portion of a second movable actuator member. 25. The movable actuator member of claim 24, wherein an upper portion of the stem portion includes an annular seal groove for receiving a seal element. 26. The movable actuator member of 24, wherein the annular seal groove is defined by first and second flanges extending radially from the upper portion.
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이 특허에 인용된 특허 (7)
Ollivier Louis A., Apparatus for delivering process gas for making semiconductors and method of using same.
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