초록 ▼

A chemical storage and dispensing vessel having associated therewith a colorimetric member that is effective to change color in exposure to leakage of a gas contained in the vessel. The colorimetric member may be constituted by a film, e.g., of a shrink-wrap character, that contains or is otherwise

A chemical storage and dispensing vessel having associated therewith a colorimetric member that is effective to change color in exposure to leakage of a gas contained in the vessel. The colorimetric member may be constituted by a film, e.g., of a shrink-wrap character, that contains or is otherwise associated with a colorimetric agent undergoing color change in exposure to fluid leaking from the vessel. Such shrink-wrap film may be applied to a portion of the vessel susceptible to leakage, or alternatively to the entire vessel, so that the film is colorimetric effective to indicate the occurrence of a leakage event by visually perceptible change of color.

대표청구항 ▼

What is claimed is: 1. A fluid storage and dispensing apparatus comprising a fluid storage and dispensing vessel including a neck portion and a valve head assembly attached to said vessel at said neck portion, and a shrink-wrapped colorimetric film effective in the presence of leaking gas from said

What is claimed is: 1. A fluid storage and dispensing apparatus comprising a fluid storage and dispensing vessel including a neck portion and a valve head assembly attached to said vessel at said neck portion, and a shrink-wrapped colorimetric film effective in the presence of leaking gas from said vessel to undergo a color change indicative of said leaking gas, said shrink-wrapped colorimetric film being sealed to an exterior surface of the vessel and overlying the neck portion of the vessel and the valve head assembly to define an interior void volume enclosed by the shrink-wrapped film, wherein said enclosed interior void volume surrounds the neck portion and valve head assembly, whereby gas leakage at said neck portion or at said valve head assembly can enter the enclosed interior void volume and distribute throughout said enclosed interior void volume to effect a color change in the shrink-wrapped film surrounding the neck portion and valve head assembly, thereby providing a visually perceptible response to a leakage event. 2. The fluid storage and dispensing apparatus of claim 1, wherein said film comprises a poly(vinylpyridine) film. 3. The fluid storage and dispensing apparatus of claim 2, wherein said fluid storage and dispensing apparatus contains tris(trifluoromethyl)stibine. 4. The fluid storage and dispensing apparatus of claim 1, wherein said film comprises a polyvinylalcohol film having copper sulfate incorporated therein. 5. The fluid storage and dispensing apparatus of claim 1, wherein the fluid storage and dispensing vessel comprises a valve head and said valve head is shrink-wrapped in said film. 6. The fluid storage and dispensing apparatus of claim 1, wherein the entire fluid storage and dispensing vessel is shrink-wrapped in said film. 7. The fluid storage and dispensing apparatus of claim 1, wherein the fluid storage and dispensing vessel contains tris(trifluoromethyl)stibine. 8. The fluid storage and dispensing apparatus of claim 1, wherein the fluid storage and dispensing vessel contains an organometallic compound. 9. The fluid storage and dispensing apparatus of claim 1, wherein said film contains iron oxide. 10. The fluid storage and dispensing apparatus of claim 1, wherein an upper portion of the fluid storage and dispensing vessel is shrink-wrapped in said film. 11. The fluid storage and dispensing apparatus of claim 1, wherein said film contains copper sulfate. 12. The fluid storage and dispensing apparatus of claim 1, wherein said film contains copper hydroxide. 13. The fluid storage and dispensing apparatus of claim 1, wherein said film comprises a material selected from the group consisting of polyethylene, polyolefin, polyvinyl chloride and polyester. 14. The fluid storage and dispensing apparatus of claim 1, wherein said film comprises a polyvinyl chloride film. 15. The fluid storage and dispensing apparatus of claim 1, wherein the fluid storage and dispensing vessel contains a semiconductor manufacturing reagent. 16. The fluid storage and dispensing apparatus of claim 1, wherein said film has a getter associated therewith. 17. The fluid storage and dispensing apparatus of claim 16, wherein the getter is on an interior surface of said film. 18. The fluid storage and dispensing apparatus of claim 16, wherein the getter is disposed on an exterior surface of the fluid storage and dispensing vessel, in an interior volume enclosed by said film. 19. A method of visually detecting a leakage event associated with a fluid storage and dispensing vessel including a neck portion and a valve head assembly attached to said vessel at said neck portion, said method comprising shrink-wrapping at least a portion of said vessel with a colorimetric film effective in the presence of leaking gas from said vessel to undergo a color change indicative of said leaking gas, and sealing the colorimetric film to an exterior surface of the vessel so that the colorimetric film overlies the neck portion of the vessel and the valve head assembly to define an interior void volume enclosed by the colorimetric film, with the colorimetric film surrounding the neck portion and valve head assembly, whereby gas leakage at said neck portion or at said valve head assembly can enter the enclosed interior void volume and distribute throughout said enclosed interior void volume to effect a color change in the colorimetric film surrounding the neck portion and valve head assembly, thereby providing a visually perceptible response to a leakage event. 20. The method of claim 19, wherein said shrink-wrapping comprises heat-shrinking said film against said vessel. 21. The method of claim 19, wherein said film comprises a poly(vinylpyridine) film. 22. The method of claim 19, wherein said fluid storage and dispensing apparatus contains tris(trifluoromethyl) stibine. 23. The method of claim 19, wherein said film comprises a polyvinylalcohol film having copper sulfate incorporated therein. 24. The method of claim 19, wherein said fluid storage and dispensing vessel comprises a valve head and said valve head is shrink-wrapped in said film. 25. The method of claim 19, wherein the entire fluid storage and dispensing vessel is shrink-wrapped in said film. 26. The method of claim 19, wherein the fluid storage and dispensing vessel contains tris(trifluoromethyl) stibine, and said film comprises a poly(vinvlpyridine) film. 27. The method of claim 19, wherein the fluid storage and dispensing vessel contains an organometallic compound. 28. The method of claim 19, wherein said film contains iron oxide. 29. The method of claim 19, wherein an upper portion of the fluid storage and dispensing vessel is shrink-wrapped in said film. 30. The method of claim 19, wherein said film contains one of copper sulfate and copper hydroxide. 31. The method of claim 19, wherein said film comprises a material selected from the group consisting of polyethylene, polyolefin, polyvinyl chloride and polyester. 32. The method of claim 19, wherein said film comprises a polyvinyl chloride film. 33. The method of claim 19, wherein said storage and dispensing vessel contains a semiconductor manufacturing reagent fluid. 34. The method of claim 19, wherein said film has a getter associated therewith. 35. The method of claim 34, wherein the getter is on an interior surface of said film. 36. The method of claim 34, wherein the getter is disposed on an exterior surface of the fluid storage and dispensing vessel, in an interior volume enclosed by said film. 37. A fluid storage and dispensing apparatus, comprising a fluid storage and dispensing vessel having at least a portion thereof shrink-wrapped in a film in a compressive state against adjacent exterior surface of the vessel, wherein said shrink-wrapped film encloses or constitutes a colorimetric member effective in exposure to fluid leaking from the vessel to change color, thereby providing a visually perceptible response to a leakage event, wherein said fluid storage and dispensing apparatus comprises at least one of the features (a)-(c): (a) said fluid storage and dispensing vessel containing tris(trifluoromethyl)stibine; (b) said shrink-wrapped film containing copper sulfate; and (c) said shrink-wrapped film containing copper hydroxide. 38. A method of visually detecting a leakage event associated with a fluid storage and dispensing vessel, said method comprising shrink-wrapping at least a portion of said vessel in a film so that said film is in a compressive state against adjacent exterior surface of the vessel, wherein said shrink-wrapped film encloses or constitutes a colorimetric member effective in exposure to fluid leaking from the vessel to change color, thereby providing a visually perceptible response to a leakage event, wherein said method is characterized by at least one of the features (a)-(c): (a) said fluid storage and dispensing vessel containing tris(trifluoromethyl)stibine; (b) said shrink-wrapped film containing copper sulfate; and (c) said shrink-wrapped film containing copper hydroxide.