A package substrate includes signal pads provided on a main surface of the package substrate, footpads provided on a backside of the package substrate, and a sealing electrode provided on the main surface to surround the signal pads, the signal pads being electrically coupled to the footpads, the se
A package substrate includes signal pads provided on a main surface of the package substrate, footpads provided on a backside of the package substrate, and a sealing electrode provided on the main surface to surround the signal pads, the signal pads being electrically coupled to the footpads, the sealing electrode being insulated from the footpads.
대표청구항▼
What is claimed is: 1. A package substrate comprising: signal pads provided on a main surface of the package substrate; footpads provided on a backside of the package substrate; a sealing electrode provided on the main surface to surround the signal pads, the sealing electrode forming a hermetical
What is claimed is: 1. A package substrate comprising: signal pads provided on a main surface of the package substrate; footpads provided on a backside of the package substrate; a sealing electrode provided on the main surface to surround the signal pads, the sealing electrode forming a hermetical seal in touch with a corresponding sealing electrode of a device to be packaged in an assembled state, wherein the signal pads are electrically coupled to the footpads, and the sealing electrode is insulated from the footpads; and a plurality of extraction electrodes including at least a first extraction electrode and a second extraction electrode, wherein: the package substrate comprises a plurality of sets of the signal pads, the footpads, and the sealing electrodes, said plurality of sets being respectively provided in a plurality of regions arranged adjacently to each other, the plurality of extraction electrodes being arranged in a circumferential region of the main surface to surround said plurality of sets, the first extraction electrode electrically coupled to the signal pads and the second extraction electrode electrically coupled to the sealing electrode, the signal pads and the sealing electrodes being separately plated through the first and second extraction electrodes which are insulated from each other, respectively. 2. The package substrate as claimed in claim 1, wherein a surface of the sealing electrode is coated with a sealing material, which is electrolytically plated by passing a current to the second extraction electrode. 3. The package substrate as claimed in claim 2, wherein W1 is equal to or greater than 2.5 h and W2 is equal to or greater than 1.5, where the W1 denotes a distance between the sealing electrodes arranged adjacently to each other, the W2 denotes a closest distance between the sealing electrode and the signal pad, and the h denotes a difference between a top of the sealing material and upper surfaces of the signal pads. 4. An elastic wave device comprising: a device substrate on which excitation electrodes for exciting an elastic wave are mounted; and a package substrate comprising: signal pads provided on a main surface of the package substrate; footpads provided on a backside of the package substrate; and a first sealing electrode provided on the main surface to surround the package side signal pads, the signal pads being electrically coupled to the footpads, the first sealing electrode being insulated from the footpads, a main surface of the device substrate being arranged to face the main surface of the package substrate, a second sealing electrode provided on the main surface of the device substrate and the first sealing electrode being in touch to hermetically seal the elastic wave device, the signal pads and the first sealing electrode being separately plated through first and second extraction electrodes which are insulated from each other and connected to the signal pads and the first sealing electrode, respectively. 5. The elastic wave device as claimed in claim 4, further comprising: a plurality of signal pads connected to the excitation electrodes provided on the main surface of the device substrate; and a specific electrode for electrically coupling the sealing electrode and at least one of the plurality of signal pads. 6. The elastic wave device as claimed in claim 5, wherein the specific electrode is made of a material having a low wettability with the sealing electrode. 7. The elastic wave device as claimed in claim 6, wherein the specific electrode is partially coated with the material having the low wettability with the sealing electrode. 8. The elastic wave device as claimed in claim 5, further comprising a conductive portion for electrically coupling a backside of the device substrate and at least one of the plurality of signal pads through the specific electrode. 9. The elastic wave device as claimed in claim 8, wherein the conductive portion is a conductive resin for coating the backside and opposite sides of the device substrate. 10. The elastic wave device as claimed in claim 4, wherein the elastic wave device is one of a SAW device and an FBAR device.
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이 특허에 인용된 특허 (5)
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