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Surface modified stamper for imprint lithography 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B29C-033/60
  • B29C-033/56
출원번호 US-0972159 (2001-10-09)
등록번호 US-7294294 (2007-11-13)
발명자 / 주소
  • Wago,Koichi
  • Gauzner,Gennady
출원인 / 주소
  • Seagate Technology LLC
대리인 / 주소
    McDermott Will & Emery LLP
인용정보 피인용 횟수 : 28  인용 특허 : 27

초록 ▼

A method of performing imprint lithography of a surface substrate includes a stamper having a thin lubricant coating thereon to facilitate release of the stamper from the imprinted surface to reduce degradation of image replication. Embodiments of the invention include stampers suitable for use in p

대표청구항 ▼

What is claimed is: 1. A method of fabricating a coating on a stamper that is suitable for sub-micron imprint lithography, the method comprising: dipping a stamper suitable for thermal imprint lithography having an imprinting surface thereon and having submicron features in a solution containing a

이 특허에 인용된 특허 (27)

  1. Mueller William R., Dual-layer DVD disc, and method and apparatus for making same.
    상세보기
  2. Jacobson, Joseph M.; Bulthaup, Colin A.; Wilhelm, Eric J.; Hubert, Brian N., Fabrication of finely featured devices by liquid embossing.
    상세보기
  3. Michael J. Parent ; Jason M. Kehren ; Richard M. Minday, Fluorinated ketones as lubricant deposition solvents for magnetic media applications.
    상세보기
  4. Giordano Paul J. (Hudson OH) Prohaska George W. (Willoughby OH) Smierciak Richard C. (Streetsboro OH), Fluoropolymer thin film coatings and method of preparation by plasma polymerization.
    상세보기
  5. Lee Hong Hee,KRX ; Kang Dal Young,KRX, Method for compression molding.
    상세보기
  6. Yoshio Akira (Tokyo JPX), Method for producing a metal layer by plating.
    상세보기
  7. Suleski Thomas J., Method of making optical replicas by stamping in photoresist and replicas formed thereby.
    상세보기
  8. Komatsubara Shigemaru (Sagamihara JPX), Method of manufacturing a stamper for information storage discs.
    상세보기
  9. Kim Choul-Su,KRX ; Kim Woo-Sik,KRX ; Sim Sang-Beom,KRX ; Sukue Masaharu,KRX ; Woo Byung-Woo,KRX, Method of mounting an integrated circuit on a printed circuit board.
    상세보기
  10. Calveley Peter Braden,NZX, Method of patterning a metal layer.
    상세보기
  11. Meldrum Fritz, Method of treating metal working dies.
    상세보기
  12. van Hoof Peter ; Parette John Joseph ; Pierzga John F., Methods for providing artwork on plastic information discs.
    상세보기
  13. Wang Dapeng ; Hofmann James, Methods of forming semiconductor devices and methods of forming field emission displays.
    상세보기
  14. Nakayama Masatoshi (Saku JPX) Ueda Kunihiro (Saku JPX) Ishida Toshihiko (Komoro JPX) Tanabe Hiroshi (Saku JPX), Molds having wear resistant release coatings.
    상세보기
  15. Chou Stephen Y., Nanoimprint lithography.
    상세보기
  16. Fontana ; Jr. Robert Edward ; Hsiao Richard ; Marinero Ernesto Esteban ; Santini Hugo Alberto Emilio ; Terris Bruce David, Patterned magnetic media and method of making the same using selective oxidation.
    상세보기
  17. Datta Pabitra (Cranbury NJ) Kaganowicz Grzegorz (Princeton NJ), Perfluorinated polymer thin films.
    상세보기
  18. Flynn Richard M. (Mahtomedi MN) Owens John G. (Woodbury MN), Perfluoropolyether lubricating compositions.
    상세보기
  19. Napoli Louis S. (Hamilton Township ; Mercer County NJ) Russell John P. (Pennington NJ), Process for forming a lithographic mask.
    상세보기
  20. Kerfeld Donald J., Process for making multiple data storage disk stampers from one master.
    상세보기
  21. Bifano Thomas G. (Mansfield MA), Process for manufacturing optical data storage disk stamper.
    상세보기
  22. Horigome Shinkichi (Tachikawa JPX) Miyamura Yoshinori (Tokyo JPX) Anzai Yumiko (Tachikawa JPX) Kato Keizo (Hachioji JPX) Shiraishi Hiroshi (Hachioji JPX), Process for producing optical disks.
    상세보기
  23. Naito Katsuyuki,JPX ; Ishino Takashi,JPX ; Hieda Hiroyuki,JPX, Recording medium and method of manufacturing the same.
    상세보기
  24. Khan Raquib U., Reduced stiction for disc drive hydrodynamic spindle motors.
    상세보기
  25. Biebuyck Hans Andre,CHX ; Michel Bruno,CHX, Stamp for a lithographic process.
    상세보기
  26. Koyama, Osamu, Stamper for forming optical disk substrate and method of manufacturing the same.
    상세보기
  27. Hirata Hiroyuki,JPX ; Araki Tatsuo,JPX ; Ishizaki Osamu,JPX ; Daimon Hideo,JPX ; Kokufuda Yasuhiko,JPX ; Maro Tsuyoshi,JPX ; Aihara Makoto,JPX, Substrate for information recording disk, mold and stamper for injection molding substrate, and method for making stamper, and information recording disk.
    상세보기

이 특허를 인용한 특허 (28)

  1. Gouko, Takeshi; Echizen, Kenji; Sato, Mikio; Koshita, Akio, Disk forming method.
    상세보기
  2. Zhang, Wei; Tan, Hua; Hu, Lin; Chou, Stephen Y., Fast nanoimprinting methods using deformable mold.
    상세보기
  3. Tan, Hua; Hu, Lin; Zhang, Wei; Chou, Stephen Y., Imprint lithography system and method for manufacturing.
    상세보기
  4. DeSimone, Joseph M.; Denison Rothrock, Ginger; Maynor, Benjamin W.; Rolland, Jason P., Isolated and fixed micro and nano structures and methods thereof.
    상세보기
  5. DeSimone, Joseph M.; Rothrock, Ginger Denison; Maynor, Benjamin W.; Rolland, Jason P., Isolated and fixed micro and nano structures and methods thereof.
    상세보기
  6. Gouko, Takeshi; Echizen, Kenji; Sato, Mikio; Koshita, Akio, Lubricant composition and article, disk molding stamper, disk molding apparatus, disk forming method, method of forming lubrication coating.
    상세보기
  7. Rudmann, Hartmut; Rossi, Markus, Manufacturing micro-structured elements.
    상세보기
  8. Zhang, Wei; Hu, Lin; Tan, Hua; Gao, He; Kong, Linshu; Chou, Stephen Y., Method and apparatus to apply surface release coating for imprint mold.
    상세보기
  9. Gauzner, Gennady; Kurataka, Nobuo; Weller, Dieter Klaus; Formato, Christopher Joseph, Method of manufacturing a patterned media stamper.
    상세보기
  10. Rolland, Jason P.; Maynor, Benjamin; Henn, Robert L., Methods and materials for fabricating laminate nanomolds and nanoparticles therefrom.
    상세보기
  11. Rolland, Jason P.; Maynor, Benjamin; Henn, Robert Lyon, Methods and materials for fabricating laminate nanomolds and nanoparticles therefrom.
    상세보기
  12. Rolland, Jason P.; Maynor, Benjamin; Henn, Robert Lyon, Methods and materials for fabricating laminate nanomolds and nanoparticles therefrom.
    상세보기
  13. Rolland, Jason P.; Maynor, Benjamin; Henn, Robert Lyon, Methods and materials for fabricating laminate nanomolds and nanoparticles therefrom.
    상세보기
  14. Rolland, Jason P.; Maynor, Benjamin; Henn, Robert Lyon, Methods and materials for fabricating laminate nanomolds and nanoparticles therefrom.
    상세보기
  15. Rolland, Jason P.; Maynor, Benjamin; Henn, Robert Lyon, Methods and materials for fabricating laminate nanomolds and nanoparticles therefrom.
    상세보기
  16. DeSimone, Joseph M.; Rolland, Jason P.; Rothrock, Ginger M. Denison; Resnick, Paul, Methods and materials for fabricating microfluidic devices.
    상세보기
  17. DeSimone, Joseph M.; Rolland, Jason P.; Rothrock, Ginger M. Denison; Resnick, Paul, Methods and materials for fabricating microfluidic devices.
    상세보기
  18. DeSimone, Joseph M.; Rolland, Jason P.; Maynor, Benjamin W.; Euliss, Larkin E.; Rothrock, Ginger Denison; Dennis, Ansley E.; Samulski, Edward T.; Samulski, R. Jude, Methods for fabricating isolated micro- and nano-structures using soft or imprint lithography.
    상세보기
  19. DeSimone, Joseph M.; Rolland, Jason P.; Maynor, Benjamin W.; Euliss, Larken E.; Rothrock, Ginger Denison; Dennis, Ansley E.; Samulski, Edward T.; Samulski, R. Jude, Methods for fabricating isolated micro- or nano-structures using soft or imprint lithography.
    상세보기
  20. DeSimone, Joseph M.; Rolland, Jason P.; Maynor, Benjamin W.; Euliss, Larken E.; Rothrock, Ginger Denison; Dennis, Ansley E.; Samulski, Edward T.; Samulski, R. Jude, Methods for fabricating isolated micro- or nano-structures using soft or imprint lithography.
    상세보기
  21. DeSimone, Joseph M.; Rolland, Jason P.; Maynor, Benjamin W.; Euliss, Larken E.; Rothrock, Ginger Denison; Dennis, Ansley E; Samulski, Edward T.; Samulski, R. Jude, Methods for fabricating isolated micro-and nano-structures using soft or imprint lithography.
    상세보기
  22. Verhaverbeke, Steven; Nalamasu, Omkaram; Foad, Majeed A.; Venkatesan, Mahalingam; Krishna, Nety M., Patterning of magnetic thin film using energized ions.
    상세보기
  23. Verhaverbeke, Steven; Nalamasu, Omkaram; Foad, Majeed; Venkatesan, Mahalingam; Krishna, Nety M., Patterning of magnetic thin film using energized ions.
    상세보기
  24. Nalamasu, Omkaram; Verhaverbeke, Steven; Foad, Majeed; Venkatesan, Mahalingam; Krishna, Nety M., Patterning of magnetic thin film using energized ions and thermal excitation.
    상세보기
  25. DeSimone, Joseph M.; Rolland, Jason P.; Quake, Stephen R.; Schorzman, Derek A.; Yarbrough, Jason; Van Dam, Michael, Photocurable perfluoropolyethers for use as novel materials in microfluidic devices.
    상세보기
  26. Tan, Hua; Hu, Lin; Chou, Stephen Y., System and methods of mold/substrate separation for imprint lithography.
    상세보기
  27. Henderson, Clayton P.; Wu, Tsai-Wei; Guo, Xing-Cai; Karis, Thomas E.; Lille, Jeffrey S., System, method and apparatus for manufacturing magnetic recording media.
    상세보기
  28. Henderson, Clayton P.; Wu, Tsai-Wei; Guo, Xing-Cai; Karis, Thomas Edward; Lille, Jeffrey S., System, method and apparatus for manufacturing magnetic recording media.
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