초록

An optical device including: a glass substrate; a crystalline silicon layer bonded to the glass substrate; and a thermally tunable thin-film optical filter fabricated on top of the crystalline silicon layer.

대표청구항 ▼

What is claimed is: 1. An optical device comprising: a glass substrate; a doped single-crystal silicon sheet-resistive heater layer bonded to the glass substrate; and a thermally tunable thin-film optical filter fabricated on top of the doped single-crystal silicon sheet-resistive heater layer, the

What is claimed is: 1. An optical device comprising: a glass substrate; a doped single-crystal silicon sheet-resistive heater layer bonded to the glass substrate; and a thermally tunable thin-film optical filter fabricated on top of the doped single-crystal silicon sheet-resistive heater layer, the thermally tunable thin-film optical filter comprising at least one amorphous semiconductor layer, and having a coefficient of thermal expansion approximately matched to a coefficient of thermal expansion of the glass substrate. 2. The optical device of claim 1, wherein the optical filter is designed to operate on an optical signal of wavelength λ and wherein the glass substrate is transparent to light of wavelength λ. 3. The optical device of claim 2, wherein the thermally tunable optical filter is a thermo-optically tunable thin film optical filter. 4. The optical device of claim 1 further comprising electrical contacts formed on the doped single-crystal silicon sheet-resistive heater layer for supplying electrical current to the doped single-crystal silicon sheet-resistive heater layer. 5. The optical device of claim 1, wherein the glass substrate is made of a borosilicate glass. 6. The optical device of claim 1, wherein the amorphous semiconductor is amorphous silicon. 7. The optical device of claim 1, wherein the thermally tunable thin film optical filter comprises a plurality of thin film interference layers. 8. The optical device of claim 7, wherein the optical filter is designed to operate on an optical signal of wavelength λ and wherein each of the layers among the plurality of thin film layers has an optical thickness that is roughly an integer multiple of λ/4. 9. The optical device of claim 1, wherein the thermally tunable thin film optical filter comprises a stack of multiple Fabry-Perot cavities. 10. A method of making an optical device, the method comprising: providing a glass substrate; bonding a doped single-crystal silicon sheet-resistive heater layer to the glass substrate; and fabricating a thermally tunable thin-film optical filter comprising at least one amorphous semiconductor layer on top of the doped single-crystal silicon sheet-resistive heater layer, the thermally tunable thin-film optical filter having a coefficient of thermal expansion approximately matched to a coefficient of thermal expansion of the class substrate. 11. The method of claim 10, further comprising fabricating electrical contacts on the doped single-crystal silicon sheet-resistive heater layer for supplying electrical current to the heater layer. 12. The method of claim 10 further comprising, prior to fabricating the optical filter, patterning the doped single-crystal silicon sheet-resistive heater layer to form an island on which the optical filter is fabricated. 13. The method of claim 10, wherein the doped single-crystal silicon sheet-resistive heater layer is anodically bonded to the glass substrate. 14. The method of claim 10, wherein the fabricating the thermally tunable thin-film optical filter on top of the doped single-crystal silicon sheet-resistive heater layer involves fabricating a thermo-optically tunable thin film, optical filter.