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Thermal process for creation of an in-situ junction layer in CIGS 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-031/00
출원번호 US-0272386 (2005-11-10)
등록번호 US-7319190 (2008-01-15)
발명자 / 주소
  • Tuttle,John R.
출원인 / 주소
  • Daystar Technologies, Inc.
대리인 / 주소
    Hiscock & Barclay, LLP.
인용정보 피인용 횟수 : 83  인용 특허 : 13

초록

The present invention relates generally to the field of photovoltaics and more specifically to manufacturing thin-film solar cells using a thermal process. Specifically, a method is disclosed to manufacture a CIGS solar cell by an in-situ junction formation process.

대표청구항

What is claimed is: 1. A process for preparing a photovolatiac device comprising the steps of: a. providing a p-type semiconductor layer of CIGS on a substrate; b. exposing said p-type semiconductor layer to In+Se+Ga vapor while concurrently decreasing the temperature from a first temperature withi

이 특허에 인용된 특허 (13)

  1. Ovshinsky Stanford R. (Bloomfield Hills MI) Ovshinsky Herbert (Oak Park MI) Young Rosa (Troy MI), Apparatus for deposition of thin-film, solid state batteries.
  2. Mickelsen Reid A. (Bellevue WA) Chen Wen S. (Seattle WA), Apparatus for forming thin-film heterojunction solar cells employing materials selected from the class of I-III-VI2.
  3. Kiss Zoltan (Belle Mead NJ), Deposition of materials.
  4. Hardy Walter N. (The University of British Columbia Office of Research Services and Industry Liaison ; 2194 Health Sciences Mall ; Room 331 ; I.R.C. Building Vancouver ; British Columbia CAX) Ma Qiyu, Differentially pumped temperature controller for low pressure thin film fabrication process.
  5. Mashburn Douglas N., Individually controlled environments for pulsed addition and crystallization.
  6. Scobey Michael A. (Santa Rosa CA) Seddon Richard I. (Santa Rosa CA) Seeser James W. (Santa Rosa CA) Austin R. Russel (Santa Rosa CA) LeFebvre Paul M. (Santa Rosa CA) Manley Barry W. (Boulder CO), Magnetron sputtering apparatus and process.
  7. van Mast, Bart Scholte, Method and apparatus for removal of surface contaminants from substrates in vacuum applications.
  8. Coleman John H. (Locust Valley NY), Method of forming semiconducting materials and barriers using a multiple chamber arrangement.
  9. Gillespie Timothy J. ; Marshall Craig H. ; Lanning Bruce R., Method of making I-III-VI semiconductor materials for use in photovoltaic cells.
  10. Hartman Robert A. (Chagrin Falls OH) Koch Paul E. (Chagrin Falls OH), Process and apparatus for continuous production of lightweight arrays of photovoltaic cells.
  11. Jansen Kai W. ; Maley Nagi, Producing thin film photovoltaic modules with high integrity interconnects and dual layer contacts.
  12. Bartolomei Leroy Albert ; Read Thomas ; Shevlin Craig, Sputtering device and method for reactive for reactive sputtering.
  13. Stanbery, Billy J., Synthesis of layers, coatings or films using templates.

이 특허를 인용한 특허 (83)

  1. Alexander, Paul; Aragon, Steven, Apparatus and method utilizing forced convection for uniform thermal treatment of thin film devices.
  2. Doering, Kenneth B.; Wieting, Robert D., Apparatus for manufacturing thin film photovoltaic devices.
  3. Farris, III, Chester A.; Brown, Albert S., Application specific solar cell and method for manufacture using thin film photovoltaic materials.
  4. Juliano, Daniel R.; Mathias, Deborah; Mackie, Neil M., Barrier for doped molybdenum targets.
  5. Juliano, Daniel R.; Mathias, Deborah; Mackie, Neil M., Barrier for doped molybdenum targets.
  6. Alexander, Paul, Bell jar extraction tool method and apparatus for thin film photovoltaic materials.
  7. Lee, Howard W. H., Bulk chloride species treatment of thin film photovoltaic cell and manufacturing method.
  8. Lee, Howard W. H., Bulk metal species treatment of thin film photovoltaic cell and manufacturing method.
  9. Lee, Howard W. H., Bulk sodium species treatment of thin film photovoltaic cell and manufacturing method.
  10. Lee, Howard W. H., Bulk sulfide species treatment of thin film photovoltaic cell and manufacturing method.
  11. Lee, Howard W. H., Chloride species surface treatment of thin film photovoltaic cell and manufacturing method.
  12. Buquing, Miljon T., Consumable adhesive layer for thin film photovoltaic material.
  13. Lee, Howard W. H., Copper species surface treatment of thin film photovoltaic cell and manufacturing method.
  14. Priddy, Scott Wayne; Conroy, Chad Michael, Deposition of high vapor pressure materials.
  15. Krasnov, Alexey, Electrode structure for use in electronic device and method of making same.
  16. Lee, Howard W. H., High efficiency photovoltaic cell and manufacturing method free of metal disulfide barrier material.
  17. Wieting, Robert D., Humidity control and method for thin film photovoltaic materials.
  18. Wieting, Robert D., In chamber sodium doping process and system for large scale cigs based thin film photovoltaic materials.
  19. Wieting, Robert D.; Doering, Kenneth B.; Schmitzburger, Jurg, Large scale MOCVD system for thin film photovoltaic devices.
  20. Wieting, Robert D., Large scale chemical bath system and method for cadmium sulfide processing of thin film photovoltaic materials.
  21. Wieting, Robert D., Manufacturing method for patterning CIGS/CIS solar cells.
  22. Lee, Howard W. H., Metal species surface treatment of thin film photovoltaic cell and manufacturing method.
  23. Mackie, Neil M.; Corson, John, Method and apparatus for controllable sodium delivery for thin film photovoltaic materials.
  24. Mackie, Neil M.; Corson, John, Method and apparatus for controllable sodium delivery for thin film photovoltaic materials.
  25. Ramanathan, Kannan; Wieting, Robert D., Method and device for cadmium-free solar cells.
  26. Lee, Howard W. H.; Mikulec, Frederic Victor; Gao, Bing Shen; Huang, Jinman, Method and material for processing iron disilicide for photovoltaic application.
  27. Mikulec, Frederic Victor; Gao, Bing Shen; Lee, Howard W. H., Method and material for purifying iron disilicide for photovoltaic application.
  28. Tandon, Ashish; Wieting, Robert D.; Schmizberger, Jurg; Alexander, Paul, Method and structure for processing thin film PV cells with improved temperature uniformity.
  29. Lee, Howard W. H., Method and structure for thin film photovoltaic cell using similar material junction.
  30. Lee, Howard W. H., Method and structure for thin film photovoltaic materials using bulk semiconductor materials.
  31. Lee, Howard W. H., Method and structure for thin film photovoltaic materials using bulk semiconductor materials.
  32. Lee, Howard W. H., Method and structure for thin film photovoltaic materials using semiconductor materials.
  33. Wieting, Robert D., Method and structure for tiling industrial thin-film solar devices.
  34. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
  35. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
  36. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
  37. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
  38. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
  39. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using single-chamber configuration.
  40. Weiting, Robert D., Method and system for recycling processing gas for selenization of thin film photovoltaic materials.
  41. Wieting, Robert D.; Aragon, Steven; Farris, III, Chester A., Method and system for selenization in fabricating CIGS/CIS solar cells.
  42. Juliano, Daniel R., Method for alkali doping of thin film photovoltaic materials.
  43. Mackie, Neil M.; Juliano, Daniel R.; Zubeck, Robert B., Method for alkali doping of thin film photovoltaic materials.
  44. Patterson, Frank, Method for improved patterning accuracy for thin film photovoltaic panels.
  45. Lee, Howard W. H.; Farris, III, Chester A., Method for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
  46. Huang, Jinman; Lee, Howard W. H., Method for manufacture of semiconductor bearing thin film material.
  47. Chen, Shih-Wei, Method of forming a buffer layer in a solar cell, and a solar cell formed by the method.
  48. Juliano, Daniel R.; Mathias, Deborah; Mackie, Neil M., Method of forming a sputtering target.
  49. Vlcek, Johannes; Juliano, Daniel R., Method of making a CIG target by cold spraying.
  50. Vlcek, Johannes; Juliano, Daniel R., Method of making a CIG target by cold spraying.
  51. Newbery, A. Piers; Kueper, Timothy; Juliano, Daniel R., Method of making a CIG target by spray forming.
  52. Wieting, Robert D., Method of manufacture of sodium doped CIGS/CIGSS absorber layers for high efficiency photovoltaic devices.
  53. Lee, Howard W. H., Methods for infusing one or more materials into nano-voids of nanoporous or nanostructured materials.
  54. Wieting, Robert D., Patterned thin film photovoltaic module.
  55. Wieting, Robert D., Patterning electrode materials free from berm structures for thin film photovoltaic cells.
  56. Corson, John; Austin, Alex; Rulkens, Ron; Titus, Jochen; Tas, Robert; Shufflebotham, Paul; Juliano, Daniel R.; Mackie, Neil, Photovoltaic cell with copper poor CIGS absorber layer and method of making thereof.
  57. Corson, John; Austin, Alex; Tas, Robert; Mackie, Neil; Larsson, Mats; Demirkan, Korhan; Zhang, Weijie; Titus, Jochen; Sevanna, Swati; Zubeck, Robert; Dorn, Randy; Rairkar, Asit; Rulkens, Ron; Saproo, Ajay; Vitkavage, Dan, Photovoltaic cell with high efficiency CIGS absorber layer with low minority carrier lifetime and method of making thereof.
  58. Corson, John; Austin, Alex; Tas, Robert; Mackie, Neil; Larsson, Mats; Demirkan, Korhan; Zhang, Weijie; Titus, Jochen; Sevanna, Swati; Zubeck, Robert; Dorn, Randy; Rairkar, Asit; Rulkens, Ron; Saproo, Ajay; Vitkavage, Dan, Photovoltaic cell with high efficiency cigs absorber layer with low minority carrier lifetime and method of making thereof.
  59. Yang, Frank; Wieting, Robert, Pin striped thin film solar module for cluster lamp.
  60. Yang, Frank; Wieting, Robert, Pin striped thin film solar module for cooler.
  61. Yang, Frank; Wieting, Robert, Pin striped thin film solar module for garden lamp.
  62. Yang, Frank; Wieting, Robert, Pin striped thin film solar module for laptop personal computer.
  63. Yang, Frank; Wieting, Robert, Pin striped thin film solar module for recreational vehicle.
  64. Yang, Frank; Wieting, Robert, Pin striped thin film solar module for street lamp.
  65. Lee, Howard W. H., Processing method for cleaning sulfur entities of contact regions.
  66. Schmidt, Chris; Corson, John, Protective layer for large-scale production of thin-film solar cells.
  67. Schmidt, Chris; Corson, John, Protective layer for large-scale production of thin-film solar cells.
  68. Schmidt, Chris; Corson, John, Protective layer for large-scale production of thin-film solar cells.
  69. Alexander, Paul; Schmitzberger, Jurg; Tandon, Ashish; Wieting, Robert D., Quartz boat method and apparatus for thin film thermal treatment.
  70. Wieting, Robert D.; Aragon, Steven; Farris, III, Chester A., Sodium doping method and system for shaped CIGS/CIS based thin film solar cells.
  71. Juliano, Daniel R.; Tas, Robert; Mackie, Neil; Ziani, Abdelouahab, Sodium salt containing CIG targets, methods of making and methods of use thereof.
  72. Lee, Howard W. H., Sodium species surface treatment of thin film photovoltaic cell and manufacturing method.
  73. Lee, Howard W. H., Sulfide species treatment of thin film photovoltaic cell and manufacturing method.
  74. Shufflebotham, Paul; Juliano, Daniel R.; Tas, Robert; Mackie, Neil, Sulfur salt containing CIG targets, methods of making and methods of use thereof.
  75. Wieting, Robert D., System and method for transferring substrates in large scale processing of CIGS and/or CIS devices.
  76. Wieting, Robert D., Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates.
  77. Wieting, Robert D., Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates.
  78. Wieting, Robert D., Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates.
  79. Wieting, Robert D., Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates.
  80. Wieting, Robert D., Thermal pre-treatment process for soda lime glass substrate for thin film photovoltaic materials.
  81. Lee, Howard W. H., Thin film metal oxide bearing semiconductor material for single junction solar cell devices.
  82. Wieting, Robert D., Zinc oxide film method and structure for CIGS cell.
  83. Wieting, Robert D., Zinc oxide film method and structure for cigs cell.
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