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In a fan filter unit for filtering and continuously supplying clean air into a clean room, the fan filter unit includes a chemical filter for removing chemical contaminants contained in the air, a fan for sucking and blowing out the air, and a particle filter for removing particles such as dusts and

In a fan filter unit for filtering and continuously supplying clean air into a clean room, the fan filter unit includes a chemical filter for removing chemical contaminants contained in the air, a fan for sucking and blowing out the air, and a particle filter for removing particles such as dusts and moisture contained in the air. A filter medium of the chemical filter has a circular tube shape and is disposed between an inner circular tube and an outer circular tube. A cover is detachably combined with top portions of the inner and the outer circular tubes, and prevents air flow through the top portions of the inner and outer circular tubes. The air is sucked only through the outer circular tube, the chemical filter and the inner circular tube by a suction force of the fan. Accordingly, velocity distribution of the air passing through the chemical filter may be improved and lifetime of the chemical filter may be increased.

대표청구항 ▼

What is claimed is: 1. A chemical filter comprising: an inner circular tube having an air-permeability; an outer circular tube disposed around the inner circular tube, the outer circular tube having an air-permeability; a filter medium disposed between the inner and the outer circular tubes to remo

What is claimed is: 1. A chemical filter comprising: an inner circular tube having an air-permeability; an outer circular tube disposed around the inner circular tube, the outer circular tube having an air-permeability; a filter medium disposed between the inner and the outer circular tubes to remove contaminants contained in an air flow through the inner and the outer circular tubes; and a first cover detachably attached to top portions of the inner and the outer circular tubes to prevent an air flow through a top portion of the chemical filter; and a second cover detachably attached to bottom portions of the inner and the outer circular tubes, wherein an inner space of the inner circular tube and an inter-space between the inner and the outer circular tubes are defined by the first and the second covers, and wherein the second cover has a circular flat ring shape, an outer diameter of the second cover is substantially larger than that of the outer circular tube, outer edge portions of the second cover having an attachment means for coupling the chemical filter. 2. The chemical filter of claim 1, wherein the first cover has a disc shape and the second cover including an opening in communication with the inner space of the inner circular tube. 3. The chemical filter of claim 1, wherein the inner circular tube is coaxially arranged within the outer circular tube. 4. The chemical filter of claim 1, wherein the inner and the outer circular tubes comprise perforated metal sheets, respectively. 5. The chemical filter of claim 1, wherein the inner and the outer circular tubes comprises metal meshes, respectively. 6. A fan filter unit comprising: a chemical filter including an inner circular tube having an air-permeability, an outer circular tube disposed around the inner circular tube, the outer circular tube having an air-permeability, and a filter medium disposed between the inner and the outer circular tubes to remove contaminants contained in an air flow through the inner and the outer circular tubes; a fan disposed in communication with an inner space of the inner circular tube to suck the air passing through the outer circular tube, the filter medium and the inner circular tube; a particle filter connected to the fan to remove particles contained in the air blown out by the fan, and a second cover disposed between the chemical filter and the fan to surround an upper inlet of the fan, wherein the inner space of the inner circular tube, and an inter-space between the inner and the outer circular tubes are defined by the first and the second covers, wherein the second cover has a circular flat ring shape, an outer diameter of the second cover is substantially larger than that of the outer circular tube, and the chemical filter is connected onto the upper portion of the fan by a plurality of fasteners secured to the upper portion of the fan through edge portions of the second cover. 7. The fan filter unit of claim 6, further comprising a first cover detachably attached to top portions of the inner and the outer circular tubes to prevent an air flow through the top portions of the inner and the outer circular tubes. 8. The fan filter unit of claim 6, wherein the first cover has a disc shape and the second cover including an opening in communication with the inner space of the inner circular tube. 9. The fan filter unit of claim 6, wherein the inner circular tube is coaxially arranged within the outer circular tube. 10. The fan filter unit of claim 6, wherein the chemical filter is coaxially arranged with the fan. 11. The fan filter unit of claim 6, wherein the inner and the outer circular tubes comprise perforated metal sheets, respectively. 12. The fan filter unit of claim 6, wherein the inner and the outer circular tubes comprise metal meshes, respectively. 13. A fan filter unit comprising: a fan for sucking an air from an interior of a ceiling chamber defining an upper boundary of an interior of a clean chamber and blowing out the air into the interior of the clean room, the fan having an upper inlet for sucking the air and a lower outlet for blowing out the air; a chemical filter disposed on a top portion of the fan, the chemical filter including a filter medium for removing chemical contaminants contained in the air being flown into the interior of the clean room, the filter medium having a circular tube shape as a whole, an inner circular tube disposed in the filter medium, the inner circular tube having an air-permeability, and an outer circular tube disposed around the filter medium, the outer circular tube having an air-permeability, and a first cover detachably coupled to top portions of the inner and the outer circular tubes to prevent an air flow through the top portions of the inner and the outer circular tubes into spaces defined by the inner and the outer circular tubes, wherein an inner space of the inner circular tube is in communication with the upper inlet of the fan, and the air is flown through the outer circular tube, the filter medium and the inner circular tube into the inner space of the inner circular tube; a particle filter connected to a lower portion of the fan to remove particles contained in the air blown out by the fan, and a second cover disposed between the chemical filter and the fan to surround the upper inlet of the fan, wherein the inner space of the inner circular tube, and an inter-space between the inner and the outer circular tubes are defined by the first and the second covers, wherein the second cover has a circular flat ring shape, an outer diameter of the second cover is substantially larger than that of the outer circular tube, and the chemical filter is connected onto the upper portion of the fan by a plurality of fasteners secured to the upper portion of the fan through edge portions of the second cover. 14. The fan filter unit of claim 13, wherein the chemical filter is coaxially arranged with the fan. 15. The fan filter unit of claim 13, wherein the inner and the outer circular tubes comprise perforated metal sheets, respectively. 16. The fan filter unit of claim 13, wherein the inner and the outer circular tubes comprise metal meshes, respectively.