초록
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There are provided an infrared gas analyzer of a simple configuration, capable of taking measurements with high precision when using an infrared light source excellent in thermal responsiveness, and capable of ON/OFF operations at high speed, and an infrared gas analysis method using the same. The infrared gas analyzer having a sample cell into which a sample gas is distributed, for detecting concentration of a measuring target component of the sample gas by taking advantage of variation in absorption amount of infrared rays having passed through the sam...
There are provided an infrared gas analyzer of a simple configuration, capable of taking measurements with high precision when using an infrared light source excellent in thermal responsiveness, and capable of ON/OFF operations at high speed, and an infrared gas analysis method using the same. The infrared gas analyzer having a sample cell into which a sample gas is distributed, for detecting concentration of a measuring target component of the sample gas by taking advantage of variation in absorption amount of infrared rays having passed through the sample cell, comprising a first infrared light source for irradiating the sample cell with first infrared rays, a second infrared light source having a response characteristic equal to that of the first infrared light source, a detector for detecting a difference between the first infrared rays emitted from the first infrared light source, and having passed through the sample cell, and second infrared rays emitted from the second infrared light source, a light source drive controller for synchronously driving the first and second infrared light sources, respectively, and a measurement controller for providing the light source drive controller with instructions for respective drive amounts of the first and second infrared light sources while receiving an output signal from the detector, thereby generating a measurement output corresponding to the concentration of the measuring target component of the sample gas.
대표
청구항
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What is claimed is: 1. An infrared gas analyzer having a sample cell into which a sample gas is distributed, for detecting the concentration of a measuring target component of the sample gas by taking advantage of a variation in an absorption amount of infrared rays having passed through the sample cell, said infrared gas analyzer comprising: a first infrared light source for irradiating the sample cell with infrared rays; a second infrared light source having a response characteristic equal to that of the first infrared light source; a detector for det...
What is claimed is: 1. An infrared gas analyzer having a sample cell into which a sample gas is distributed, for detecting the concentration of a measuring target component of the sample gas by taking advantage of a variation in an absorption amount of infrared rays having passed through the sample cell, said infrared gas analyzer comprising: a first infrared light source for irradiating the sample cell with infrared rays; a second infrared light source having a response characteristic equal to that of the first infrared light source; a detector for detecting a difference between the first infrared rays emitted from the first infrared light source and passed through the sample cell, and second infrared rays emitted from the second infrared light source and falling directly on the detector; a light source drive controller for synchronously driving the first and second infrared light sources, respectively; and a measurement controller for providing the light source drive controller with instructions for respective drive amounts of the first and second infrared light sources while receiving an output signal from the detector, thereby generating a measurement output corresponding to the concentration of the measuring target component of the sample gas. 2. An infrared gas analyzer according to claim 1, wherein the light source drive controller synchronously turns ON/OFF the first and second infrared light sources, respectively, in a predetermined cycle. 3. An infrared gas analyzer according to claim 1, wherein the detector comprises a sample side chamber with a gas containing the measuring target component encapsulated therein, for allowing the first infrared rays to fall thereon, a balance side chamber for allowing the second infrared rays to fall thereon, and a flow sensor provided in a gas distribution path linking the sample side chamber with the balance side chamber. 4. An infrared gas analyzer according to claim 1, wherein the detector comprises a plurality of detectors of which measuring targets are gas components differing from each other. 5. An infrared gas analyzer according to claim 1, wherein the first and second infrared light sources are added with first and second optical sensors, respectively, for detecting abnormality of the respective light sources. 6. An infrared gas analyzer according to claim 1, wherein the measurement controller adjusts respective drive amounts of the second infrared light source at the time of a zero adjustment operation such that respective output of the detector becomes zero, and obtains the measurement output corresponding to respective concentrations of the measuring target component on the basis of magnitudes of the respective output of the detector at the time of a measuring operation. 7. An infrared gas analyzer according to claim 1, wherein the measurement controller adjusts respective drive amounts of the second infrared light source at the time of a zero adjustment operation such that respective output of the detector becomes zero, and adjusts the respective drive amounts of the second infrared light source at the time of a measuring operation as well such that the respective output of the detector becomes zero, thereby obtaining the measurement output corresponding to respective concentrations of the measuring target component on the basis of respective drive amount differentials at that point in time. 8. An infrared gas analyzer having a sample cell into which a sample gas is distributed, for detecting the concentration of a measuring target component of the sample gas by taking advantage of a variation in an absorption amount of infrared rays having passed through the sample cell, said infrared gas analyzer comprising: a first infrared light source for irradiating the sample cell with infrared rays; a second infrared light source having a response characteristic equal to that of the first infrared light source; a detector for detecting a difference between the first infrared rays emitted from the first infrared light source and passed through the sample cell, and second infrared rays emitted from the second infrared light source and falling directly on the detector, the detector having a plurality of the detectors which are individually provided with the second infrared light source; a light source drive controller for synchronously driving the first and second infrared light sources, respectively; and a measurement controller for providing the light source drive controller with instructions for respective drive amounts of the first and second infrared light sources while receiving an output signal from the detector, thereby generating a measurement output corresponding to the concentration of the measuring target component of the sample gas. 9. An infrared gas analyzer having a sample cell into which a sample gas is distributed, for detecting the concentration of a measuring target component of the sample gas by taking advantage of a variation in an absorption amount of infrared rays having passed through the sample cell, said infrared gas analyzer comprising: a first infrared light source for irradiating the sample cell with infrared rays; a second infrared light source having a response characteristic equal to that of the first infrared light source; a detector for detecting a difference between the first infrared rays emitted from the first infrared light source and passed through the sample cell, and second infrared rays emitted from the second infrared light source and falling directly on the detector; a light source drive controller for synchronously driving, the first and second infrared light sources, respectively, the light source drive controller having a synchronous controller for generating a sync signal, first and second light source drivers, respectively, for turning ON/OFF drive signals to be supplied to the first and second infrared light sources, respectively, in response to the sync signal, and first and second drive signal detectors, respectively, for detecting magnitudes of the respective drive signals to be supplied to the first and second infrared light sources, respectively; and a measurement controller for providing the light source drive controller with instructions for respective drive amounts of the first and second infrared light sources while receiving an output signal from the detector, thereby generating a measurement output corresponding to the concentration of the measuring target component of the sample gas. 10. An infrared gas analyzer according to claim 9, wherein the light source drive controller has a synchronous controller for generating a sync signal, first and second light source drivers, respectively, for turning ON/OFF drive signals to be supplied to the first and second infrared light sources, respectively, in response to the sync signal, and first and second drive signal detectors, respectively, for detecting magnitudes of the respective drive signals to be supplied to the first and second infrared light sources, respectively, obtaining the measurement output corresponding to the respective concentrations of the measuring target component on the basis of a differential in output of the second drive signal detector at the time of the measuring operation. 11. An infrared gas analysis method of detecting the concentration of a measuring target component of a sample gas by taking advantage of a variation in an absorption amount of infrared rays having passed through a sample cell into which the sample gas is distributed, said method comprising the steps of: irradiating the sample cell with first infrared rays emitted from a first infrared light source; irradiating a balance side chamber with second infrared rays emitted from a second infrared light source having a response characteristic equal to that of the first infrared light source; synchronously driving the first and second infrared light sources while detecting a difference between the first infrared rays emitted from the first infrared light source and passed through the sample cell, and the second infrared rays emitted from the second infrared light source and falling directly on a detector; and generating a measurement output corresponding to the concentration of the measuring target component of the sample gas. 12. An infrared gas analysis method according to claim 11, further comprising the step of synchronously turning ON/OFF the first and second infrared light sources in a predetermined cycle. 13. An infrared gas analysis according to claim 11, wherein the first and second infrared rays are photo-detected by a detector comprised of a sample side chamber with a gas containing the measuring target component encapsulated therein, for allowing the first infrared rays to fall thereon, a balance side chamber for allowing the second infrared rays to fall thereon, and a flow sensor provided in a gas distribution path linking the sample side chamber with the balance side chamber. 14. An infrared gas analysis method according to claim 13, wherein the detector comprises a plurality of detectors of which measuring targets are gas components differing from each other. 15. An infrared gas analysis method according to claim 11, wherein the first and second infrared light sources are added with first and second optical sensors, respectively, for detecting abnormality of the respective light sources. 16. An infrared gas analysis method according to claim 11, further comprising the step of adjusting respective drive amounts of the second infrared light source at the time of a zero adjustment operation such that a difference between the first infrared rays having passed through the sample cell, and the second infrared rays become zero, and obtaining the measurement output corresponding to respective concentrations of the measuring target component on the basis of the difference between the first infrared rays having passed through the sample cell, and the second infrared rays at the time of a measuring operation. 17. An infrared gas analysis method according to claim 11, further comprising the step of adjusting respective drive amounts of the second infrared light source at the time of a zero adjustment operation such that a difference between the first infrared rays having passed through the sample cell, and the second infrared rays become zero, and adjusting the respective drive amounts of the second infrared light source at the time of a measuring operation as well such that the difference between the first infrared rays having passed through the sample cell, and the second infrared rays becomes zero, thereby obtaining the measurement output corresponding to respective concentrations of the measuring target component on the basis of respective drive amount differentials. 18. An infrared gas analysis method of detecting the concentration of a measuring target component of a sample gas by taking advantage of a variation in an absorption amount of infrared rays having passed through a sample cell into which the sample gas is distributed, said method comprising the steps of: irradiating the sample cell with first infrared rays emitted from a first infrared light source; irradiating a balance side chamber with second infrared rays emitted from a second infrared light source having a response characteristic equal to that of the first infrared light source; synchronously driving the first and second infrared light sources while detecting a difference between the first infrared rays emitted from the first infrared light source and passed through the sample cell, and second infrared rays emitted from the second infrared light source and falling directly on a detector comprises a plurality of detectors individually provided with the second infrared light source; and generating a measurement output corresponding to the concentration of the measuring target component of the sample gas. 19. An infrared gas analysis method of detecting the concentration of a measuring target component of a sample gas by taking advantage of a variation in an absorption amount of infrared rays having passed through a sample cell into which the sample gas is distributed, said method comprising the steps of: irradiating the sample cell with first infrared rays emitted from a first infrared light source; irradiating a balance side chamber with second infrared rays emitted from a second infrared light source having a response characteristic equal to that of the first infrared light source; synchronously driving the first and second infrared light sources while detecting a difference between the first infrared rays emitted from the first infrared light source and passed through the sample cell, and second infrared rays emitted from the second infrared light source and falling directly on a detector; generating a measurement output corresponding to the concentration of the measuring target component of the sample gas; detecting magnitudes of respective drive signals to be supplied to the first and second infrared light sources, respectively; and feeding back the respective drive signals as detected to first and second light source drivers, respectively. 20. An infrared gas analysis method of detecting the concentration of a measuring target component of a sample gas by taking advantage of a variation of an absorption amount of infrared rays having passed through a sample cell into which the sample gas is distributed, said method comprising the steps of: irradiating the sample cell with first infrared rays emitted from a first infrared light source; irradiating a balance side chamber with second infrared rays emitted from a second infrared light source having a response characteristic equal to that of the first infrared light source; synchronously driving the first and second infrared light sources while detecting a difference between the first infrared rays emitted from the first infrared light source and passed through the sample cell, and second infrared rays emitted from the second infrared light source and falling directly on a detector; generating a measurement output corresponding to the concentration of the measuring target component of the sample gas; detecting magnitudes of respective drive signals to be supplied to the first and second infrared light sources, respectively; and feeding back the respective drive signals as detected to first and second light source drivers, respectively, while obtaining the measurement output corresponding to the respective concentrations of the measuring target component on the basis of variation amounts of the respective drive signals at the second infrared light sources at the time of the measuring operation.
