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Apparatus and method for detecting photon emissions from transistors

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01R-031/28
출원번호 US-0380044 (2006-04-25)
등록번호 US-7323862 (2008-01-29)
발명자 / 주소
  • Desplats,Romain
  • Le Coupanec,Patricia
  • Lo,William K.
  • Perdu,Philippe
  • Kasapi,Steven
출원인 / 주소
  • Credence Systems Corporation
대리인 / 주소
    Sughrue Mion PLLC
인용정보 피인용 횟수 : 3  인용 특허 : 61

초록

A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obta

대표청구항

We claim: 1. A method for analyzing and displaying collected photon emissions data of a plurality of photons to discriminate between photons emitted from a transistor and photons emitted from other sources, the collected photon emissions data of each photon comprising a spatial component and a temp

이 특허에 인용된 특허 (61)

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이 특허를 인용한 특허 (3)

  1. Rozen, Anton; Fleshel, Leonid; Priel, Michael; Weizman, Yoav, Method of detecting irregular current flow in an integrated circuit device and apparatus therefor.
  2. Deslandes, Herve; Reverdy, Antoine; Parrassin, Thierry, Spectral mapping of photo emission.
  3. Deslandes, Herve; Sabbineni, Prasad; Freed, Regina, System and method for fault isolation by emission spectra analysis.
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