IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0274608
(2005-11-15)
|
등록번호 |
US-7335894
(2008-02-26)
|
우선권정보 |
EP-04027115(2004-11-15) |
발명자
/ 주소 |
- Frosien,Juergen
- Lanio,Stefan
- Schoenecker,Gerald
- Brodie,Alan D.
- Crewe,David A.
|
출원인 / 주소 |
- ICT Integrated Circuit Testing Gesselschaft
|
대리인 / 주소 |
Patterson & Sheridan L.L.P.
|
인용정보 |
피인용 횟수 :
19 인용 특허 :
4 |
초록
▼
The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charg
The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.
대표청구항
▼
The invention claimed is: 1. A charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam, comprising: a double-focusing sector unit for deflecting and focusing the charged particle beam; and an energy-filter forming a potential-saddle, wherein charged pa
The invention claimed is: 1. A charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam, comprising: a double-focusing sector unit for deflecting and focusing the charged particle beam; and an energy-filter forming a potential-saddle, wherein charged particles of the charged particle beam are redirected at the potential-saddle depending on the energy of the charged particles. 2. The charged particle unit of claim 1, wherein the double-focusing sector unit comprises a sector for focusing in a first dimension and a quadrupole unit, cylinder lens or side plates for focusing in a second direction. 3. The charged particle unit of claim 1, wherein the double focusing sector unit comprises a hemispherical sector. 4. The charged particle unit of claim 1, wherein the double-focusing sector unit is adapted to focus the charged particle beam within the energy-filter. 5. The charged particle unit of claim 1, wherein the double focusing sector unit comprises a further lens unit for focusing of the charged particle beam. 6. The charged particle unit of claim 5, wherein the further lens unit comprises an Einzel-lens. 7. The charged particle unit of claim 1, wherein the energy-filter has a biased electrode comprising one aperture for letting pass through the charged particle beam. 8. The charged particle unit of claim 1, wherein the energy-filter is provided in the form of a biased cylinder. 9. The charged particle unit of claim 8, wherein the biased cylinder has a length of at least 100 μm and an aperture diameter of between 100 μm and 20 mm. 10. The charged particle unit of claim 1, wherein the energy-filter is positioned along the direction of propagation approximately at the location of a focus of the charged particle beam. 11. A secondary charged particle detection device comprising: a charged particle unit for deflecting and energy-selecting charged particles of a beam of secondary charged particles released from a specimen on impingement of a primary charged particle beam, having a double-focusing sector unit for deflecting and focusing the beam of secondary charged particles and an energy-filter forming a potential-saddle, wherein the secondary charged particles are redirected at the potential-saddle depending on the energy of the charged particles; and a detector for producing a detection signal corresponding to the incidence of charged particles having passed through the energy-filter. 12. The device of claim 11, further comprising an acceleration unit for accelerating the secondary charged particle beam. 13. The device of claim 11, further comprising a separating unit for separating the secondary charged particle beam from the primary charged particle beam. 14. The device of claim 13, wherein the separating unit is provided in the form of a magnetic dipole element. 15. The device of claim 13, wherein the separating unit is provided in the form of a Wien filter. 16. An apparatus having one or more charged particle beam devices, each charged particle beam device comprising: a charged particle beam source for providing a primary charged particle beam; a first focusing element for focusing the primary charged particle beam on a specimen; and a secondary charged particle detection device comprising, a charged particle unit for deflecting and energy-selecting charged particles of a beam of secondary charged particles released from a specimen on impingement of the primary charged particle beam, having a double-focusing sector unit for deflecting and focusing the beam of secondary charged particles and an energy-filter forming a potential-saddle, wherein the secondary charged particles are redirected at the potential-saddle depending on the energy of the charged particles, and a detector for producing a detection signal corresponding to the incidence of charged particles having passed through the energy-filter. 17. The apparatus of claim 16, wherein the one or more charged particle devices comprise at least two charged particle devices. 18. The apparatus of claim 17, wherein the charged particle beams are focused by a plurality of first focusing elements integrated in one multi-beam objective lens. 19. The apparatus of claim 17, further comprising, for each primary charged particle beam: a multi-aperture unit with at least two aperture openings; and wherein an aperture opening of the at least two aperture openings can be selected. 20. The apparatus of claim 16, wherein the one or more charged particle devices comprise at least five charged particle devices. 21. The apparatus of claim 16, wherein the one or more charged particle devices are arranged such that a row of charged particle beams is provided. 22. The apparatus of claim 16, wherein the charged particle beam devices are arranged to provide an array of charged particle beams. 23. The apparatus of claim 16, wherein the charged particle beam source is one of a plurality of charged particle beam sources integrated in one emitter array. 24. A method of deflecting and filtering charged particles, comprising: deflecting a first beam of charged particles with a double-focusing sector unit such that the divergence of the charged particles is reduced; filtering a portion of the charged particles of the beam with an energy filter, wherein a potential-saddle is provided such that the beam interacts with the potential-saddle; and rejecting a portion of the charged particles below an energy threshold value. 25. The method of claim 24, wherein the first beam of charged particles comprises secondary charged particles and the method further comprises: separating the first beam of secondary charged particles from a beam of primary charged particles; and detecting a portion of the first beam of secondary charged particles above the energy threshold value. 26. The method of claim 25, further comprising: accelerating the secondary charged particles with an acceleration unit. 27. The method of claim 25, wherein the focusing is conducted such that a focus is provided in a biased tube of the filter.
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