A micro-electro-mechanical, micro-fluidic flow sensor (14) includes a flow separating element (15) for separating a first portion (24) of a fluid flow (25) from a second portion (26) of the fluid flow. The flow sensor also includes a flow obstructing member (17) disposed in the first portion of the
A micro-electro-mechanical, micro-fluidic flow sensor (14) includes a flow separating element (15) for separating a first portion (24) of a fluid flow (25) from a second portion (26) of the fluid flow. The flow sensor also includes a flow obstructing member (17) disposed in the first portion of the flow for at least partially obstructing the first portion of the flow. The flow obstructing member deflects in response to the first portion of the flow so that a degree of partial obstruction of the first portion of the flow by the flow obstructing member varies in response to the first portion of the fluid flow.
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What is claimed is: 1. A micro-electro-mechanical, micro-fluidic flow sensor comprising: a flow separating element for separating a first portion of a fluid flow from a second portion of the fluid flow, wherein the flow separating element includes a plurality of spaced apart walls; and a flow obstr
What is claimed is: 1. A micro-electro-mechanical, micro-fluidic flow sensor comprising: a flow separating element for separating a first portion of a fluid flow from a second portion of the fluid flow, wherein the flow separating element includes a plurality of spaced apart walls; and a flow obstructing member disposed in the first portion of the flow for at least partially obstructing the first portion of the flow, the member deflecting in response to the first portion of the flow so that a degree of partial obstruction of the first portion of the flow by the flow obstructing member varies in response to the first portion of the fluid flow, wherein the flow obstructing member includes a first flap extending from a first wall of the spaced apart walls towards a second flap extending from a second wall of the spaced apart walls so that a gap is defined between the flaps having a variable geometry corresponding to a degree of deflection of the flaps, the flaps being compliant to the first portion of the fluid flow and being deflected in response to a flow parameter of the first portion of the fluid flow so that a degree of partial obstruction of the first portion of the fluid flow varies in response to the flow parameter. 2. The sensor of claim 1, further comprising a pressure transducer onboard the sensor responsive to a pressure of the fluid flow flowing through the sensor. 3. The sensor of claim 1, wherein the flow separating member comprises a tubular member. 4. The sensor of claim 3, wherein the flow obstructing member comprises a plurality of flaps extending from walls of the tubular member towards a central region of the tubular member so that a gap is defined between the flaps. 5. The sensor of claim 1, further comprising a pressure transducer onboard the sensor responsive to a pressure of the fluid flow flowing through the sensor. 6. The sensor of claim 1, wherein the sensor is integrally formed on a silicon substrate. 7. A micro-electro-mechanical flow meter comprising: a conduit comprising a flow acceleration zone for conducting a fluid therethrough; a micro-fluidic flow sensor disposed in the flow acceleration zone so that a first portion of the fluid flows through the sensor and a second portion of the fluid flows around the sensor, the sensor comprising: two spaced apart walls for directing the first portion of the fluid flow therebetween; first and second flaps extending from respective walls for partially obstructing the first portion of the fluid flow, the flaps being compliant to the first portion of the fluid flow and being deflected in response to a flow parameter of the first portion of the fluid flow so that a degree of partial obstruction of the first portion of the fluid flow varies in response to the flow parameter; and a first pressure transducer onboard the sensor responsive to a pressure of the first portion of the fluid flow flowing through the sensor. 8. The flow meter of claim 7, further comprising a gap defined between respective ends of the first and second flaps for allowing the fluid flow to flow unobstructed therethrough, the gap having a variable geometry responsive to the flaps being deflected away from each other in response to the flow parameter of the fluid flow. 9. The flow meter of claim 7, wherein a width of the gap ranges from about 10 microns to about 100 microns. 10. The flow meter of claim 7, wherein a width of the gap ranges from about 40 microns to about 60 microns. 11. The flow meter of claim 7, wherein the flow acceleration zone comprises geometry selected from the group consisting of a venturi and an orifice. 12. The flow meter of claim 7, wherein the walls comprise a geometry effective to impart a higher velocity to the second portion of the fluid flow than the first portion so that a pressure drop across the flow sensor is increased to provide a corresponding increased sensitivity for flow measurement. 13. The flow meter of claim 7, wherein the walls comprise respective upstream end portions being angled away from a centerline of the acceleration zone. 14. The flow meter of claim 13, wherein an angle of the end portions away from the centerline ranges from about 30 to about 60 degrees. 15. The flow meter of claim 13, wherein an angle of the end portions away from the centerline ranges from about 40 to about 50 degrees. 16. The flow meter of claim 13, wherein the walls comprise respective downstream end portions being angled away from a centerline of the acceleration zone. 17. The flow meter of claim 7, wherein the first pressure transducer is disposed upstream of the flaps. 18. The flow meter of claim 7, further comprising a second pressure transducer disposed downstream of the flaps. 19. The flow meter of claim 7, further comprising a first conduit having an inlet disposed upstream of the flaps and a second conduit having an inlet disposed downstream of the flaps, the disposed at respective outlet ends of the conduits for measuring a pressure differential between the flow at respective inlet ends. 20. The flow meter of claim 7, wherein the walls comprise respective upstream end portions being angled away from a centerline of the acceleration zone. 21. The flow meter of claim 7, further comprising a heating element on-board the sensor for limiting moisture condensation. 22. The flow meter of claim 7, wherein the pressure sensor comprises a piezo-resistive type pressure sensor. 23. The flow meter of claim 7, wherein a thickness of the flaps ranges from about 5 to about 20 microns. 24. The flow meter of claim 7, wherein a length of the flaps ranges from about 400 to about 500 microns. 25. The flow meter of claim 7, wherein a height of the flaps ranges from about 200 to about 400 microns. 26. The flow meter of claim 7, wherein a distance between the walls ranges from about 900 to about 1100 microns. 27. The flow meter of claim 7, wherein the sensor is integrally formed on a silicon substrate. 28. The flow meter of claim 7, further comprising a second set of flaps disposed downstream of the first and second flaps. 29. The flow meter of claim 7, further comprising a drain disposed in the conduit to allow fluids accumulated in the conduit to be drained away from the conduit. 30. The flow meter of claim 29, further comprising a valve to selectively open and close the drain. 31. The flow meter of claim 7, further comprising a contaminant entrapment structure disposed within the conduit proximate the flow sensor for limiting contaminants in the fluid from affecting an operation of the flow sensor. 32. The flow meter of claim 31, wherein the contaminant entrapment structure comprises a mesh ring annularly lining the conduit and extending radially inward from the conduit towards a centerline of the conduit so that an annular space remains between the ring and the sensor. 33. The flow meter of claim 31, wherein the contaminant entrapment structure comprises a circuitous path for conducting at least a portion of the fluid around the sensor. 34. The flow meter of claim 31, wherein the contaminant entrapment structure comprises a mesh disk at least partially across an inlet of the contaminant entrapment structure.
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