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Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B05D-005/00
  • B05D-003/02
  • B05D-003/06
  • C23C-014/14
  • C23C-014/28
  • C23C-014/58
출원번호 US-0918287 (2004-08-13)
등록번호 US-7341765 (2008-03-11)
발명자 / 주소
  • Branagan,Daniel J.
  • Hyde,Timothy A.
  • Fincke,James R.
출원인 / 주소
  • Battelle Energy Alliance, LLC
대리인 / 주소
    Wells St. John
인용정보 피인용 횟수 : 5  인용 특허 : 32

초록

The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided within a deposition chamber along

대표청구항

The invention claimed is: 1. A method of forming a metallic material on a silicon-comprising substrate comprising: providing a semiconductor substrate having a silicon-comprising surface; forming a layer comprising metallic glass over the silicon-comprising surface, the metallic glass comprising an

이 특허에 인용된 특허 (32)

  1. Chiriac Horia,ROX ; Barariu Firuta,ROX ; Ovari Adrian Tibor,ROX ; Pop Gheorghe,ROX, Amorphous and nanocrystalline glass-covered wires.
  2. Chen Ho-Sou (Warren NJ) Polk Donald E. (Boston MA), Amorphous metal alloys composed of iron, nickel, phosphorus, boron and, optionally carbon.
  3. Sagel, Aléxander; Kopperger, Bertram; Bayer, Erwin; Smarsly, Wilfried, Antiabrasion coating.
  4. Ray Ranjan (Randolph NJ), Apparatus for making metallic glass powder.
  5. Kim Kang-Hyung (Kyung Nam KRX) Park Maeng-Roh (Kyung Nam KRX) Yang Seung-Ho (Seoul KRX) Chi Yong-Kwon (Kyung Nam KRX), Ferrous alloy composition and manufacture and coating methods of mechanical products using the same.
  6. Kim Kang-Hyung (Kyungnam KRX), High toughness and high strength untempered steel and processing method thereof.
  7. Masumoto Tsuyoshi (Sendai JA) Naka Masaaki (Izumi JA), Iron-chromium series amorphous alloys.
  8. Tanaka Fujio (Tokyo JPX) Imamura Nobutake (Tokyo JPX), Magneto-optical recording medium.
  9. Scruggs David M. (San Juan Capistrano CA), Materials transformable from the nonamorphous to the amorphous state under frictional loadings.
  10. Kroeger Donald M. (Knoxville TN) Koch Carl C. (Raleigh NC), Metallic glass composition.
  11. Ray Ranjan (Randolph NJ), Metallic glass powders from glassy alloys.
  12. Yamagata Kenji (Atsugi JPX) Kumomi Hideya (Tokyo JPX) Tokunaga Hiroyuki (Kawasaki JPX) Arao Kozo (Hikone JPX), Method for forming semiconductor crystal and semiconductor crystal article obtained by said method.
  13. Ray Ranjan (Randolph NJ), Method for making metallic glass powder.
  14. Branagan,Daniel J., Method for protecting a surface.
  15. Shingu Hideo (Kyoto JPX) Abe Mitsunobu (Kawasaki JPX) Sato Takashi (Kawasaki JPX) Yamada Toshio (Kawasaki JPX), Method for the manufacture of formed products from powders, foils, or fine wires.
  16. Pitt Gillies D. (Saffron Walden GB2) Greene Peter D. (Harlow GB2) Thrush Edward J. (Stansted Mountfitchet GB2) Whysall David H. (Harlow GB2), Method of making a Hall effect device.
  17. Ray Ranjan (Randolph NJ), Method of making complex boride particle containing alloys.
  18. Takayanagi Noboru (Aichi) Akihama Kazuhiro (Aichi JPX), Method of producing amorphous magnetic film.
  19. Branagan, Daniel J., Method of producing metallic materials.
  20. Nakamura Tsuneo (Nara JPX) Yamasaki Hidenori (Yamatokoriyama JPX) Kira Tohru (Tenri JPX) Yoshikawa Mitsuhiko (Ikoma JPX), Method of production of thin film magnetic head and magnetic head.
  21. Branagan, Daniel J., Methods of forming hardened surfaces.
  22. Branagan Daniel J. ; Burch Joseph V., Methods of forming steel.
  23. Gonsalves Kenneth E. (Storrs CT), Nanostructured steel alloy.
  24. Chen Ho-Sou (Warren NJ) Polk Donald E. (Morristown NJ), Novel amorphous metals and amorphous metal articles.
  25. Connie Chunling Liu ; Li-Ping Wang ; Linda Lijun Zhong ; Jeffery Lee Petrehn, Patterned magnetic media via thermally induced phase transition.
  26. Menzel Guenther (Munich DEX), Process for producing coarse-grain crystalline/mono-crystalline metal and alloy films.
  27. Fang Pao-Hsien (Belmont MA), Semiconductor devices having a metallic glass substrate.
  28. Hashimoto Koji (Izumi JPX) Kumagai Naokazu (Matsudo JPX) Asami Katsuhiko (Sendai JPX) Kawashima Asahi (Sendai JPX), Surface activated alloy electrodes and process for preparing them.
  29. Nakamura Yoshikatsu,JPX ; Masuyama Tetsuo,JPX ; Omiya Takao,JPX ; Takiguchi Hiroshi,JPX, Synchronizer ring.
  30. Lemelson Jerome H. ; Conley James G., Synthetic diamond coatings with intermediate amorphous metal bonding layers and methods of applying such coatings.
  31. Tanner Lee E. (Summit NJ) Ray Ranjan (Morristown NJ) Cline Carl F. (Walnut Creek CA), Titanium-beryllium base amorphous alloys.
  32. Dzuik Peter (Nuremburg DEX), Writing point for writing or recording instruments and process for its manufacture.

이 특허를 인용한 특허 (5)

  1. Huang, Wei-Chin; Zhuang, Chuan-Sheng, Apparatus and method for adjusting and controlling the stacking-up layer manufacturing.
  2. Branagan, Daniel J., Hardfacing material.
  3. Branagan, Daniel J., Method of forming a hardened surface on a substrate.
  4. Kusinski, Grzegorz Jan; Kusinski, Jan H., Surface treatment of amorphous coatings.
  5. Kusinski, Grzegorz Jan; Kusinski, Jan H., Surface treatment of amorphous coatings.
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