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Method for manufacturing semiconductor device

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/30
  • H01L-021/02
  • H01L-021/46
출원번호 US-0452987 (2006-06-15)
등록번호 US-7341924 (2008-03-11)
우선권정보 JP-2003-414879(2003-12-12)
발명자 / 주소
  • Takayama,Toru
  • Arai,Yasuyuki
  • Suzuki,Yukie
출원인 / 주소
  • Semiconductor Energy Laboratory Co., Ltd.
대리인 / 주소
    Robinson,Eric J.
인용정보 피인용 횟수 : 36  인용 특허 : 10

초록

A method of separating a lamination body with high yield without damaging the lamination body is provided. Further, a method of manufacturing a lightweight, flexible semiconductor device, which is thin in total is provided. The method of manufacturing the semiconductor device includes: a first step

대표청구항

What is claimed is: 1. A method for manufacturing a semiconductor device comprising: forming a semiconductor element over a first substrate with a layer interposed therebetween; providing a second substrate over the semiconductor element with a photocatalytic layer interposed therebetween; peeling

이 특허에 인용된 특허 (10)

  1. Shimoda, Tatsuya; Inoue, Satoshi; Miyazawa, Wakao, Exfoliating method, transferring method of thin film device, and thin film device, thin film integrated circuit device and liquid crystal display device produced by the same.
  2. Inoue Satoshi,JPX ; Shimoda Tatsuya,JPX, Manufacturing method of active matrix substrate, active matrix substrate and liquid crystal display device.
  3. Yamazaki Shunpei,JPX ; Nakajima Setsuo,JPX ; Arai Yasuyuki,JPX, Method for producing display device.
  4. Kimura,Mutsumi, Method of manufacturing electro-optical device, electro-optical device, transferred chip, transfer origin substrate.
  5. Ghyselen, Bruno; Letertre, Fabrice, Methods for fabricating final substrates.
  6. Yamazaki Shunpei (21-21 Kitakarasuyama 7-chome ; Setagaya-ku Tokyo JPX), Photoelectric conversion semiconductor and manufacturing method thereof.
  7. Sakaguchi Kiyofumi,JPX ; Yonehara Takao,JPX ; Nishida Shoji,JPX ; Yamagata Kenji,JPX, Process for producing semiconductor article.
  8. Hiroshi Yamada JP; Koujiro Ookawa JP; Yasuki Suzuura JP; Takakazu Goto JP; Hideki Arao JP; Atsuo Tsuzuki JP; Kazuyuki Takasawa JP; Hiroshi Yamamoto JP; Katsutoshi Konno JP, Protective sheet for solar battery module, method of fabricating the same and solar battery module.
  9. Tatsuya Shimoda JP; Satoshi Inoue JP; Wakao Miyazawa JP, Separating method, method for transferring thin film device, thin film device, thin film integrated circuit device, and liquid crystal display device manufactured by using the transferring method.
  10. Inoue, Satoshi; Shimoda, Tatsuya; Miyazawa, Wakao, Thin film device transfer method, thin film device, thin film integrated circuit device, active matrix board, liquid crystal display, and electronic apparatus.

이 특허를 인용한 특허 (36)

  1. Okamoto, Satohiro; Arai, Yasuyuki; Kawamata, Ikuko; Miyaguchi, Atsushi; Moriya, Yoshitaka, Display device.
  2. Okamoto, Satohiro; Arai, Yasuyuki; Kawamata, Ikuko; Miyaguchi, Atsushi; Moriya, Yoshitaka, Display device.
  3. Okamoto, Satohiro; Arai, Yasuyuki; Kawamata, Ikuko; Miyaguchi, Atsushi; Moriya, Yoshitaka, Display device.
  4. Okamoto, Satohiro; Arai, Yasuyuki; Kawamata, Ikuko; Miyaguchi, Atsushi; Moriya, Yoshitaka, Display device.
  5. Okamoto, Satohiro; Arai, Yasuyuki; Kawamata, Ikuko; Miyaguchi, Atsushi; Moriya, Yoshitaka, Display device.
  6. Yamazaki, Shunpei; Hirakata, Yoshiharu, Display device.
  7. Hatano, Kaoru; Seo, Satoshi; Nagata, Takaaki; Okano, Tatsuya, Display device including light-emitting layer.
  8. Yamazaki, Shunpei; Koyama, Jun; Arai, Yasuyuki; Kawamata, Ikuko; Miyaguchi, Atsushi; Moriya, Yoshitaka, Electronic book.
  9. Yamazaki, Shunpei; Koyama, Jun; Arai, Yasuyuki; Kawamata, Ikuko; Miyaguchi, Atsushi; Moriya, Yoshitaka, Electronic book.
  10. Yamazaki, Shunpei; Koyama, Jun; Arai, Yasuyuki; Kawamata, Ikuko; Miyaguchi, Atsushi; Moriya, Yoshitaka, Electronic book.
  11. Yamazaki, Shunpei; Koyama, Jun; Arai, Yasuyuki; Kawamata, Ikuko; Miyaguchi, Atsushi; Moriya, Yoshitaka, Electronic book.
  12. Trujillo, Jovan; Moyer, Curtis, Electronic display test device and related method.
  13. Hatano, Kaoru; Seo, Satoshi; Nagata, Takaaki; Okano, Tatsuya, Film and light-emitting device.
  14. Hatano, Kaoru; Seo, Satoshi; Nagata, Takaaki; Okano, Tatsuya, Flexible light-emitting device.
  15. Hatano, Kaoru; Seo, Satoshi; Nagata, Takaaki; Okano, Tatsuya, Flexible light-emitting device.
  16. Hatano, Kaoru; Seo, Satoshi; Nagata, Takaaki; Okano, Tatsuya, Light-emitting device and electronic device including substrate having flexibility.
  17. Hirakata, Yoshiharu, Light-emitting device and method for fabricating the same.
  18. Mo, Zailong; Shi, Tianlei, Method for manufacturing a liquid crystal panel.
  19. Maruyama, Junya; Jinbo, Yasuhiro; Shoji, Hironobu; Kuwabara, Hideaki; Yamazaki, Shunpei, Method for manufacturing a semiconductor device using a flexible substrate.
  20. Jinbo, Yasuhiro; Morisue, Masafumi; Kimura, Hajime; Yamazaki, Shunpei, Method for manufacturing semiconductor device.
  21. Jinbo, Yasuhiro; Morisue, Masafumi; Kimura, Hajime; Yamazaki, Shunpei, Method for manufacturing semiconductor device.
  22. Jinbo, Yasuhiro; Morisue, Masafumi; Kimura, Hajime; Yamazaki, Shunpei, Method for manufacturing semiconductor device.
  23. Jinbo, Yasuhiro; Morisue, Masafumi; Kimura, Hajime; Yamazaki, Shunpei, Method for manufacturing semiconductor device.
  24. Jinbo, Yasuhiro; Morisue, Masafumi; Kimura, Hajime; Yamazaki, Shunpei, Method for manufacturing semiconductor device.
  25. Jinbo, Yasuhiro; Morisue, Masafumi; Kimura, Hajime; Yamazaki, Shunpei, Method for manufacturing semiconductor device.
  26. Morisue, Masafumi; Jinbo, Yasuhiro; Fujii, Gen; Kimura, Hajime, Method for manufacturing semiconductor device.
  27. Morisue, Masafumi; Jinbo, Yasuhiro; Fujii, Gen; Kimura, Hajime, Method for manufacturing semiconductor device.
  28. Yamazaki, Shunpei; Sato, Masataka; Ikezawa, Naoki; Yanaka, Junpei; Idojiri, Satoru, Method for manufacturing semiconductor device.
  29. Okabe, Tohru, Method for manufacturing thin film multilayer device, method for manufacturing display device, and thin film multilayer device.
  30. Shin, Aram; Ahn, Tae-Joon, Method of fabricating flexible display device.
  31. Jinbo, Yasuhiro, Method of manufacturing semiconductor device.
  32. Jinbo, Yasuhiro; Isa, Toshiyuki; Honda, Tatsuya, Method of manufacturing semiconductor device.
  33. Jinbo, Yasuhiro; Isa, Toshiyuki; Honda, Tatsuya, Method of manufacturing semiconductor device.
  34. Jinbo, Yasuhiro; Isa, Toshiyuki; Honda, Tatsuya, Method of manufacturing semiconductor device.
  35. Kawabata, Kenichi; Ohkawa, Hiroshige, Method of manufacturing wiring board.
  36. Yamazaki, Shunpei; Yasumoto, Seiji; Kobayashi, Yuka; Idojiri, Satoru, Separation method, display device, display module, and electronic device.
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