초록 ▼

A ferroelectric capacitor circuit for sensing hydrogen gas having a closed integrated circuit package, a ferroelectric capacitor within the closed integrated circuit package, the ferroelectric capacitor having a bismuth oxide based ferroelectric layer being able to absorb hydrogen gas that is within

A ferroelectric capacitor circuit for sensing hydrogen gas having a closed integrated circuit package, a ferroelectric capacitor within the closed integrated circuit package, the ferroelectric capacitor having a bismuth oxide based ferroelectric layer being able to absorb hydrogen gas that is within the closed integrated circuit package, absorbed hydrogen gas chemically reducing a portion of the bismuth oxide based ferroelectric layer into bismuth metal, the ferroelectric capacitor having a ferroelectric voltage, the ferroelectric voltage having a voltage strength, and means for measuring a decrease in the voltage strength of the ferroelectric voltage of the ferroelectric capacitor.

대표청구항 ▼

What is claimed is: 1. A ferroelectric capacitor circuit for sensing hydrogen gas, comprising: (a) a closed integrated circuit package; (b) a ferroelectric capacitor within the closed integrated circuit package, the ferroelectric capacitor comprising a bismuth oxide based ferroelectric layer betwee

What is claimed is: 1. A ferroelectric capacitor circuit for sensing hydrogen gas, comprising: (a) a closed integrated circuit package; (b) a ferroelectric capacitor within the closed integrated circuit package, the ferroelectric capacitor comprising a bismuth oxide based ferroelectric layer between a first capacitor plate and a second capacitor plate, an outer perimeter of the bismuth oxide based ferroelectric layer being exposed within the closed integrated circuit package, the outer perimeter of the bismuth oxide based ferroelectric layer being able to absorb hydrogen gas that is within the closed integrated circuit package, absorbed hydrogen gas chemically reducing a portion of the bismuth oxide based ferroelectric layer into bismuth metal, the ferroelectric capacitor having a stored ferroelectric voltage, the stored ferroelectric voltage having a voltage strength; (c) an electrometer for measuring a decrease in the voltage strength of the stored ferroelectric voltage of the ferroelectric capacitor; and (d) a DC voltage source for storing the stored ferroelectric voltage in the ferroelectric capacitor. 2. A ferroelectric capacitor circuit for sensing hydrogen gas, comprising: (a) a closed integrated circuit package; (b) a ferroelectric capacitor within the closed integrated circuit package, the ferroelectric capacitor comprising a bismuth oxide based ferroelectric layer between a first capacitor plate and a second capacitor plate, an outer perimeter of the bismuth oxide based ferroelectric layer being exposed within the closed integrated circuit package, the outer perimeter of the bismuth oxide based ferroelectric layer being able to absorb hydrogen gas that is within the closed integrated circuit package, absorbed hydrogen gas chemically reducing a portion of the bismuth oxide based ferroelectric layer into bismuth metal, the ferroelectric capacitor having a ferroelectric voltage, the ferroelectric voltage having a voltage strength, wherein the bismuth oxide based ferroelectric layer is a Bi2SrTa72Nb28O9 ferroelectric layer; and (c) means for measuring a decrease in the voltage strength of the ferroelectric voltage of the ferroelectric capacitor. 3. A ferroelectric capacitor circuit for sensing hydrogen gas, comprising: (a) a closed integrated circuit package; (b) a ferroelectric capacitor within the closed integrated circuit package, the ferroelectric capacitor comprising a Bi2SrTa72Nb28O9 ferroelectric layer between a first capacitor plate and a second capacitor plate, an outer perimeter of the bismuth oxide based ferroelectric layer being exposed within the closed integrated circuit package, the outer perimeter of the bismuth oxide based ferroelectric layer being able to absorb hydrogen gas that is within the closed integrated circuit package, absorbed hydrogen gas chemically reducing a portion of the bismuth oxide based ferroelectric layer into bismuth metal, the ferroelectric capacitor having a ferroelectric voltage, the ferroelectric voltage having a voltage strength; and (c) means for measuring a decrease in the voltage strength of the ferroelectric voltage of the ferroelectric capacitor. 4. A method for sensing hydrogen gas in an environment, comprising: (a) placing a ferroelectric capacitor in the environment, the ferroelectric capacitor comprising a bismuth oxide based ferroelectric layer between a first capacitor plate and a second capacitor plate, an outer perimeter of the bismuth oxide based ferroelectric layer being exposed to the environment, the outer perimeter of the bismuth oxide based ferroelectric layer being able to absorb hydrogen gas that is in the environment, absorbed hydrogen gas chemically reducing a portion of the bismuth oxide based ferroelectric layer into bismuth metal; (b) giving the ferroelectric capacitor a particular ferroelectric voltage; and (c) measuring voltage strengths of the ferroelectric voltage of the ferroelectric capacitor over time, to detect the chemical reduction of the bismuth oxide based ferroelectric layer into bismuth metal by the hydrogen gas.