A MEMS-based fuel cell has a substrate, an electrolyte in contact with the substrate, a cathode in contact with the electrolyte, an anode spaced apart from the cathode and in contact with the electrolyte, and an integral manifold for supplying either a fuel or an oxidant or both together, the integr
A MEMS-based fuel cell has a substrate, an electrolyte in contact with the substrate, a cathode in contact with the electrolyte, an anode spaced apart from the cathode and in contact with the electrolyte, and an integral manifold for supplying either a fuel or an oxidant or both together, the integral manifold extending over at least a portion of the electrolyte and over at least one of the anode and cathode. Methods for making and using arrays of the fuel cells are disclosed.
대표청구항▼
What is claimed is: 1. A fabrication method for a micro-electro-mechanical system (MEMS)-based fuel cell using a fuel and an oxidant, the method comprising the steps of: providing a single unitary substrate; depositing an electrolyte upon the substrate; depositing and patterning a cathode in contac
What is claimed is: 1. A fabrication method for a micro-electro-mechanical system (MEMS)-based fuel cell using a fuel and an oxidant, the method comprising the steps of: providing a single unitary substrate; depositing an electrolyte upon the substrate; depositing and patterning a cathode in contact with the electrolyte; depositing and patterning an anode spaced apart from the cathode and in contact with the electrolyte; forming a reaction chamber extending over and contiguous with at least a portion of at least one of the cathode and anode, the reaction chamber including at least one integral manifold for at least one of the fuel and oxidant; and removing a portion of the substrate under the anode and cathode, selectively thinning the substrate and leaving a membrane portion of the substrate, the membrane portion supporting the anode and cathode. 2. The method of claim 1, further comprising the step of: patterning the electrolyte. 3. The method of claim 1, wherein the reaction chamber extends over at least the entire anode. 4. The method of claim 1, wherein the electrolyte-depositing step comprises depositing a solid-oxide electrolyte. 5. The method of claim 1, wherein the reaction-chamber-forming step comprises the substeps of: depositing a layer of sacrificial material; patterning the sacrificial material; covering the sacrificial material with a second material to form a chamber roof; and removing the sacrificial material. 6. The method of claim 5, wherein the second material is an electrolyte. 7. The method of claim 5, wherein the second material is a non-electrolyte. 8. The method of claim 5, wherein the second material is selected from the group consisting of silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, aluminum oxide, a spin-on-glass compound, a polyimide, a photopolymer, an electrolyte material, and combinations thereof. 9. The method of claim 1, wherein the steps are performed in the order recited. 10. The method of claim 1, wherein the electrolyte-depositing step is performed after the reaction-chamber-forming step. 11. The method of claim 1, further comprising the step of: forming a first opening through the substrate under the reaction chamber, the first opening communicating with the reaction chamber. 12. The method of claim 11, wherein the first opening is adapted for flow of at least one of the fuel and oxidant into the reaction chamber by forming the first opening in communication with a source of fuel or oxidant respectively. 13. The method of claim 11, further comprising the step of: forming a second opening through the substrate under the reaction chamber, the second opening communicating with the reaction chamber. 14. The method of claim 13, wherein the second opening is adapted for flow of at least one of the fuel and oxidant into the reaction chamber by forming the first opening in communication with a source of fuel or oxidant respectively. 15. The method of claim 13, wherein the second opening is adapted for exhaust flow of at least one of depleted fuel and depleted oxidant out of the reaction chamber by forming the first opening in communication with an exhaust manifold. 16. The method of claim 13, further comprising the step of: forming a third opening through the substrate under the reaction chamber, the third opening communicating with the reaction chamber. 17. The method of claim 16, wherein the third opening is adapted for exhaust flow of at least one of depleted fuel and depleted oxidant out of the reaction chamber by forming the first opening in communication with an exhaust manifold. 18. A fabrication method for a micro-electro-mechanical system (MEMS)-based fuel cell using a fuel and an oxidant, the method comprising the steps of: providing a single unitary substrate; depositing an electrolyte upon the substrate; depositing and patterning a cathode in contact with the electrolyte; depositing and patterning an anode spaced apart from the cathode and in contact with the electrolyte; forming a first reaction chamber extending over and contiguous with at least the anode, the first reaction chamber including an integral manifold for the fuel; forming a second reaction chamber extending over and contiguous with at least the cathode, the second reaction chamber including an integral manifold for the oxidant; removing at least a first portion of the substrate under the anode and cathode, leaving a thinner second portion forming a membrane portion, the membrane portion supporting the anode and cathode; forming a first opening through the substrate under the first reaction chamber, the first opening communicating with the first reaction chamber, whereby the first opening is adapted for flow of fuel into the first reaction chamber; and forming a second opening through the substrate under the second reaction chamber, the second opening communicating with the second reaction chamber, whereby the second opening is adapted for flow of oxidant into the second reaction chamber. 19. The method of claim 18, wherein the steps are performed in the order recited. 20. The method of claim 18, further comprising the step of: patterning the electrolyte. 21. The method of claim 18, wherein the membrane portion has a periphery, and the membrane portion is supported around Its entire periphery. 22. The method of claim 18, wherein at least part of the membrane portion is removed so as to leave the membrane portion cantilevered.
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이 특허에 인용된 특허 (7)
Joseph W. Bostaph ; Chowdary R. Koripella ; Allison M. Fisher ; Jay K. Neutzler, Direct methanol fuel cell including integrated flow field and method of fabrication.
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