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Microelectromechanical systems having trench isolated contacts, and methods for fabricating same

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-029/84
  • H01L-029/66
출원번호 US-0078253 (2005-03-11)
등록번호 US-7352040 (2008-04-01)
발명자 / 주소
  • Partridge,Aaron
  • Lutz,Markus
  • Kronmueller,Silvia
출원인 / 주소
  • Robert Bosch GmbH
대리인 / 주소
    Kenyon & Kenyon LLP
인용정보 피인용 횟수 : 14  인용 특허 : 189

초록

There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device, having mechanical structures encapsulated in a chamber prior to final packaging and a contact area disposed at

대표청구항

What is claimed is: 1. A microelectromechanical device comprising: a chamber; a mechanical structure, wherein at least a portion of the mechanical structure is disposed in the chamber; a first encapsulation layer having at least one vent formed therein, wherein the first encapsulation layer is at l

이 특허에 인용된 특허 (189)

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  1. Weber, Heribert; Kueppers, Hartmut; Reinmuth, Jochen; Davies, Neil; Frey, Jens, ASIC element including a via.
  2. Ernst, Thomas; Andreucci, Philippe; Colinet, Eric; Duraffourg, Laurent; Myers, Edward B.; Roukes, Michael L., Analysis device including a MEMS and/or NEMS network.
  3. Papageorgiou, Demetrios P, CMOS-compatible bulk-micromachining process for single-crystal MEMS/NEMS devices.
  4. Haeusler, Alfred, Fully embedded micromechanical device, system on chip and method for manufacturing the same.
  5. Inaba, Shogo; Sato, Akira; Watanabe, Toru; Mori, Takeshi, MEMS device and fabrication method thereof.
  6. Inaba, Shogo; Sato, Akira; Watanabe, Toru; Mori, Takeshi, MEMS device and fabrication method thereof.
  7. Arao, Tatsuya; Dozen, Yoshitaka; Yamada, Daiki; Sugiyama, Eiji; Tamura, Tomoko; Maruyama, Junya; Horikoshi, Nozomi; Goto, Yuugo, Method for manufacturing a semiconductor device.
  8. Kautzsch, Thoralf; Froehlich, Heiko; Vogt, Mirko; Stegemann, Maik; Santa, Thomas; Burian, Markus, Method of forming a resonator.
  9. Skog, Terje; Nilsen, Svein Moller, Method of manufacturing capacitive elements for a capacitive device.
  10. Kautzsch, Thoralf; Froehlich, Heiko; Vogt, Mirko; Stegemann, Maik; Santa, Thomas; Burian, Markus, Microelectromechanical resonators.
  11. Lin, Chung-Hsien; Cheng, Chun-Wen; Chu, Chia-Hua; Tsai, Yi Heng, Microstructure device with an improved anchor.
  12. Ballas, Gary; Magendanz, Galen, Mounting system for torsional suspension of a MEMS device.
  13. Yajima, Aritsugu, Oscillator having a plurality of switchable MEMS vibrators.
  14. Yajima, Aritsugu, Oscillator having a plurality of switchable MEMS vibrators.
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